JPS6230692A - 液相エピタキシヤル成長装置 - Google Patents

Info

Publication number

JPS6230692A

JPS6230692A JP16681285A JP16681285A JPS6230692A JP S6230692 A JPS6230692 A JP S6230692A JP 16681285 A JP16681285 A JP 16681285A JP 16681285 A JP16681285 A JP 16681285A JP S6230692 A JPS6230692 A JP S6230692A

Authority

JP

Japan

Prior art keywords

melt

holding device

substrate holding

reservoir

liquid phase

Prior art date

1985-07-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 230000012010 growth Effects 0.000 title claims description 38
• 239000007791 liquid phase Substances 0.000 title claims description 19
• 239000000758 substrate Substances 0.000 claims description 78
• 239000000155 melt Substances 0.000 claims description 58
• 238000005192 partition Methods 0.000 claims description 39
• 238000003860 storage Methods 0.000 claims description 15
• 238000004891 communication Methods 0.000 claims description 9
• 239000004065 semiconductor Substances 0.000 claims description 9
• 238000000034 method Methods 0.000 description 23
• 230000005484 gravity Effects 0.000 description 10
• 239000013078 crystal Substances 0.000 description 9
• 239000007788 liquid Substances 0.000 description 4
• 230000000694 effects Effects 0.000 description 3
• HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
• 238000004943 liquid phase epitaxy Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 239000011701 zinc Substances 0.000 description 2
• 229910052725 zinc Inorganic materials 0.000 description 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 230000010261 cell growth Effects 0.000 description 1
• 150000001875 compounds Chemical class 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 238000005520 cutting process Methods 0.000 description 1
• 230000007123 defense Effects 0.000 description 1
• 238000000407 epitaxy Methods 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 229910002804 graphite Inorganic materials 0.000 description 1
• 239000010439 graphite Substances 0.000 description 1
• 229910052739 hydrogen Inorganic materials 0.000 description 1
• 239000001257 hydrogen Substances 0.000 description 1
• 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1
• 239000012071 phase Substances 0.000 description 1
• 238000012545 processing Methods 0.000 description 1
• 238000011160 research Methods 0.000 description 1
• 125000006850 spacer group Chemical group 0.000 description 1
• 238000012546 transfer Methods 0.000 description 1