JPS6230315A - 電子銃装置 - Google Patents

電子銃装置

Info

Publication number
JPS6230315A
JPS6230315A JP16773485A JP16773485A JPS6230315A JP S6230315 A JPS6230315 A JP S6230315A JP 16773485 A JP16773485 A JP 16773485A JP 16773485 A JP16773485 A JP 16773485A JP S6230315 A JPS6230315 A JP S6230315A
Authority
JP
Japan
Prior art keywords
substrate
sample
electron
ions
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16773485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH051974B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Sumio Sakai
酒井　純朗
Shunichi Murakami
俊一 村上
Tetsuo Ishida
哲夫 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP16773485A priority Critical patent/JPS6230315A/ja
Publication of JPS6230315A publication Critical patent/JPS6230315A/ja
Publication of JPH051974B2 publication Critical patent/JPH051974B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16773485A 1985-07-31 1985-07-31 電子銃装置 Granted JPS6230315A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16773485A JPS6230315A (ja) 1985-07-31 1985-07-31 電子銃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16773485A JPS6230315A (ja) 1985-07-31 1985-07-31 電子銃装置

Publications (2)

Publication Number Publication Date
JPS6230315A true JPS6230315A (ja) 1987-02-09
JPH051974B2 JPH051974B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-11

Family

ID=15855148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16773485A Granted JPS6230315A (ja) 1985-07-31 1985-07-31 電子銃装置

Country Status (1)

Country Link
JP (1) JPS6230315A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0286824A (ja) * 1988-06-21 1990-03-27 Anelva Corp 真空蒸着装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208126A (en) * 1981-06-18 1982-12-21 Sekisui Chem Co Ltd Manufacture of semiconductor
JPS57208127A (en) * 1981-06-18 1982-12-21 Sekisui Chem Co Ltd Manufacture of semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208126A (en) * 1981-06-18 1982-12-21 Sekisui Chem Co Ltd Manufacture of semiconductor
JPS57208127A (en) * 1981-06-18 1982-12-21 Sekisui Chem Co Ltd Manufacture of semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0286824A (ja) * 1988-06-21 1990-03-27 Anelva Corp 真空蒸着装置

Also Published As

Publication number Publication date
JPH051974B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term