JPS62299917A - Waveguide-grating type optical multiplexer and demultiplexer and its production - Google Patents
Waveguide-grating type optical multiplexer and demultiplexer and its productionInfo
- Publication number
- JPS62299917A JPS62299917A JP14428086A JP14428086A JPS62299917A JP S62299917 A JPS62299917 A JP S62299917A JP 14428086 A JP14428086 A JP 14428086A JP 14428086 A JP14428086 A JP 14428086A JP S62299917 A JPS62299917 A JP S62299917A
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- demultiplexer
- substrate
- grating
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 230000000737 periodic effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 abstract description 9
- 230000006866 deterioration Effects 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 239000000835 fiber Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000002840 optical waveguide grating Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
- G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
- G02B6/29326—Diffractive elements having focusing properties, e.g. curved gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
- G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
- G02B6/29328—Diffractive elements operating in reflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
【発明の詳細な説明】
３、発明の詳細な説明
〔概 要〕
本発明は、光合分波器において製造時の精密な位置合せ
を無くすため、シリコン基板上に先導波路部と光フアイ
バ支持部及びグレーティング部支持部を一体的に形成す
ることにより、製造時に各部の位置合せを行なうことな
く光合分波器を構成したものである。[Detailed Description of the Invention] 3. Detailed Description of the Invention [Summary] In order to eliminate precise alignment during manufacturing in an optical multiplexer/demultiplexer, the present invention provides a leading waveguide section and an optical fiber support section on a silicon substrate. By integrally forming the grating portion support portion and the grating portion support portion, an optical multiplexer/demultiplexer is constructed without aligning each portion during manufacturing.
本発明は光合分波器及びその製造方法に係り、特に、先
導波路−グレーティング形光合分波器及びその製造方法
に関する。The present invention relates to an optical multiplexer/demultiplexer and a method for manufacturing the same, and particularly relates to a leading waveguide/grating type optical multiplexer/demultiplexer and a method for manufacturing the same.
光導波路−グレーティング形光合分波器としては、第３
図に示されるように、平面光導波路を構成するシリコン
又はガラス基板ｌＯと１２に複数の光ファイバ１４を結
合し、平面光導波路の端部にそれぞれグレーティング部
１６を接合するようにしたものが従来用いられていた。As an optical waveguide-grating type optical multiplexer/demultiplexer, the third
As shown in the figure, conventionally, a plurality of optical fibers 14 are coupled to silicon or glass substrates 10 and 12 constituting a planar optical waveguide, and grating portions 16 are respectively bonded to the ends of the planar optical waveguide. It was used.
この光合分波器によれば、光ファイバ１４から伝送され
た光をグレーティング部１６の壁面で反射させて他の光
ファイバ１．４へ伝送させることができる。According to this optical multiplexer/demultiplexer, the light transmitted from the optical fiber 14 can be reflected on the wall surface of the grating section 16 and transmitted to the other optical fiber 1.4.
しかしながら、第３図に示す従来の光合分波器は、平面
光導波路を構成するシリコン又はガラス基板１０，１２
、グレーティング部１６をそれぞれ別体とし、各部を接
着剤で接合する構成が採用されていたため、製造時に各
部を精密に位置合せしなければならず、製作に多くの時
間を要するという不具合があった。又さらに製造後にお
いても、経時変化によって各部の接合状態がずれて伝送
特性が変化するという不具合があった。However, the conventional optical multiplexer/demultiplexer shown in FIG.
, since the grating part 16 was made into separate parts and each part was joined with adhesive, each part had to be precisely aligned during manufacturing, which caused a problem in that it took a lot of time to manufacture. . Furthermore, even after manufacturing, there is a problem in that the connection state of each part shifts due to changes over time, causing changes in transmission characteristics.
本発明は、前記従来の課題に鑑みて為されたものであり
、その目的は、精密な位置合せをすること無く製作する
ことが出来る導波路−グレーティング形光合分波器及び
その製造方法を提供することにある。The present invention has been made in view of the above-mentioned conventional problems, and its purpose is to provide a waveguide-grating type optical multiplexer/demultiplexer that can be manufactured without precise alignment, and a method for manufacturing the same. It's about doing.
前記目的を達成するために本発明は、第１図及び第２図
に示す如（、基板２０中央部上に形成された導波路構成
要素一側壁２６Ａが凸面状を為すと共に該一側壁２６Ａ
とは反対側の基板面に複数の光導体配設溝２８が形成さ
れた導波素子と、前記複数の光導体配設溝２８に固定さ
れた光導体３０と、前記一側壁側の基板面２７上に、且
つ凹面状壁面３２Ａを前記凸面状壁面に嵌合固定した、
前記凹面状壁面３２Ａに光反射性周期溝３２Ｂを有する
グレーティング部３２とから導波路−グレーティング形
光合分波器を構成し、そして、平面導波路を形成し、該
平面導波路の両側平面導波路基板上の導波路構成要素部
分の除去及び平面導波路基板上の残在導波路構成要素一
側壁の凸面状化を行ない、前記一側壁とは反対側の平面
導波路露出基板面に複数の光導体配設溝を形成し、前記
凸面状壁面と嵌合可能な凹面状壁面に光反射性周期溝を
有するグレーティング部の前記一側壁側平面導波路露出
基板面への嵌合固定及び前記各光導体配設溝への光導体
の固定を行なうことから導波路−グレーティング形光合
分波器を製造するようにしたものである。In order to achieve the above object, the present invention has a configuration in which one side wall 26A of the waveguide component formed on the center portion of the substrate 20 has a convex shape, as shown in FIGS. 1 and 2.
a waveguide element in which a plurality of light guide grooves 28 are formed on the substrate surface opposite to the substrate surface, a light guide 30 fixed to the plurality of light guide grooves 28, and a substrate surface on the one side wall side. 27, and a concave wall surface 32A is fitted and fixed to the convex wall surface,
A waveguide-grating type optical multiplexer/demultiplexer is constructed from the grating portion 32 having the light reflective periodic grooves 32B on the concave wall surface 32A, and a planar waveguide is formed, and planar waveguides on both sides of the planar waveguide are formed. By removing the waveguide component portion on the substrate and making one side wall of the remaining waveguide component on the planar waveguide substrate convex, a plurality of light beams are formed on the surface of the planar waveguide exposed substrate opposite to the one side wall. Fitting and fixing a grating portion having a conductor arrangement groove and having a light reflective periodic groove on a concave wall surface that can be fitted with the convex wall surface to the exposed substrate surface of the planar waveguide on the one side wall side, and A waveguide-grating type optical multiplexer/demultiplexer is manufactured by fixing an optical guide to a conductor groove.
本発明の導波路−グレーティング形光合分波器は光導波
路部とグレーティング部支持部及び光フアイバ支持部と
してのファイバアレイ溝が一体的に形成されているため
、製造時に各部を正確に位置合せしなくても光合分波器
を製作することができる。In the waveguide-grating type optical multiplexer/demultiplexer of the present invention, the optical waveguide part, the grating part support part, and the fiber array groove as the optical fiber support part are integrally formed, so each part must be accurately aligned during manufacturing. It is possible to manufacture an optical multiplexer/demultiplexer without it.
本発明に係る導波路−グレーティング形光合分波器を製
造するに際しては、第１図に示されるように、シリコン
基板２０上にＳｉＯ２からなる平面導波路層２２とガラ
ス板２４が積層されたもの（平面導波路）を用意する（
第１図の（ａ）を参照）。そしてドライエツチングなど
により、シリコン基板２０のほぼ中央部に、シリコン基
板２０から突出した光導波路２６を形成する（第１図の
（ｂ）を参照）。そしてシリコン基板２０上のうち一側
露出基板面に複数のファイバアレイ溝２８を形成すると
共に、光導波路部２６の一端側の端面２６Ａを凸面状に
形成する。これで、グレーティング部支持部２７も一体
的にでき上がる。When manufacturing the waveguide-grating type optical multiplexer/demultiplexer according to the present invention, as shown in FIG. 1, a planar waveguide layer 22 made of SiO2 and a glass plate 24 are laminated on a silicon substrate 20. Prepare (planar waveguide) (
(See Figure 1(a)). Then, by dry etching or the like, an optical waveguide 26 protruding from the silicon substrate 20 is formed approximately at the center of the silicon substrate 20 (see (b) in FIG. 1). Then, a plurality of fiber array grooves 28 are formed on one exposed substrate surface of the silicon substrate 20, and an end surface 26A on one end side of the optical waveguide portion 26 is formed into a convex shape. In this way, the grating portion support portion 27 is also integrally completed.
次に（Ｃ）に示されるように、ファイバアレイ溝２８に
それぞれ光ファイバ３０を固着し、シリコン基板２０上
の他端部にはグレーティング部３２を固定する。このグ
レーティング部３２は、光導波路部２６の凸面状壁面と
嵌合可能な凹面状壁３２Ａを有すると共に、該壁面３２
Ａに光反射性周期溝３２Ｂが形成されている。そして凹
面状壁面３２Ａに接着剤を塗布することによってグレー
ティング部３２を光導波路部２６へ接合させることがで
きる。Next, as shown in (C), optical fibers 30 are fixed in each of the fiber array grooves 28, and a grating section 32 is fixed on the other end of the silicon substrate 20. This grating section 32 has a concave wall 32A that can fit into the convex wall surface of the optical waveguide section 26, and the wall surface 32A
A light reflective periodic groove 32B is formed at A. The grating section 32 can be joined to the optical waveguide section 26 by applying an adhesive to the concave wall surface 32A.
以上の工程において、第２図に示されるように、シリコ
ン基板２０上の各ファイバアレイ溝２８に光ファイバ３
０が固定され、シリコン基板２０の中央部には光導波路
部２６が形成され、この光導波路部２６に隣接してグレ
ーティング部３２が一体的に固定される。このため、光
合分波器を製造するときでも各部を正確に位置合せする
こと無く行なうことができる。In the above steps, as shown in FIG.
0 is fixed, an optical waveguide section 26 is formed in the center of the silicon substrate 20, and a grating section 32 is integrally fixed adjacent to this optical waveguide section 26. Therefore, even when manufacturing an optical multiplexer/demultiplexer, it is possible to manufacture the optical multiplexer/demultiplexer without accurately aligning each part.
以上説明したように本発明によれば、シリコン基板上に
光導波路部と光フアイバ支持部及びグレーティング部支
持部を一体的に形成したため、精密な位置合せをするこ
と無く製作をすることが出来、特性劣化防止、！！Ｊ造
コストの低減及び量産性の向上に寄与することができる
という優れた効果が得られる。As explained above, according to the present invention, since the optical waveguide section, the optical fiber support section, and the grating section support section are integrally formed on the silicon substrate, manufacturing can be performed without precise alignment. Prevents characteristic deterioration! ! The excellent effect of contributing to a reduction in J manufacturing costs and an improvement in mass productivity can be obtained.
第１図は本発明に係る導波路−グレーティング形光合分
波器の製造工程を説明するための図、第２図は本発明に
係る導波路−グレーティング形光合分波器の側面図、
第３図は従来の導波路−グレーティング形光合分波器の
斜視図である。
第１図及び第２図において、
２０はシリコン基板、
２２は平面導波路層、
２４はガラス板、
２６は光導波路部、
２８はファイバアレイ溝、
３０は光ファイバ、
３２はグレーティング部である。
本発明の製造工程図
第１図
ング形光合分波器の側面図
従来例の斜視図
第３図1 is a diagram for explaining the manufacturing process of the waveguide-grating type optical multiplexer/demultiplexer according to the present invention, FIG. 2 is a side view of the waveguide-grating type optical multiplexer/demultiplexer according to the present invention, and FIG. The figure is a perspective view of a conventional waveguide-grating type optical multiplexer/demultiplexer. 1 and 2, 20 is a silicon substrate, 22 is a planar waveguide layer, 24 is a glass plate, 26 is an optical waveguide section, 28 is a fiber array groove, 30 is an optical fiber, and 32 is a grating section. Manufacturing process diagram of the present invention Fig. 1 Side view of a multiplication type optical multiplexer/demultiplexer Fig. 3 Perspective view of a conventional example
Claims (2)
素一側壁（２６Ａ）が凸面状を為すと共に該一側壁（２
６Ａ）とは反対側の基板面に複数の光導体配設溝（２８
）が形成された導波素子と、前記複数の光導体配設溝（
２８）に固定された光導体（３０）と、 前記一側壁側の基板面（２７）上に、且つ凹面状壁面（
３２Ａ）を前記凸面状壁面に嵌合固定した、前記凹面状
壁面（３２Ａ）に光反射性周期溝（３２Ｂ）を有するグ
レーティング部（３２）とから成る導波路−グレーティ
ング形光合分波器。(1) One side wall (26A) of the waveguide component formed on the center part of the substrate (20) has a convex shape, and the one side wall (26A) has a convex shape.
A plurality of light guide grooves (28
), and a plurality of optical guide grooves (
a light guide (30) fixed to a concave wall surface (28);
32A) is fitted and fixed to the convex wall surface, and a grating section (32) having light reflective periodic grooves (32B) on the concave wall surface (32A).
部分の除去及び平面導波路基板上の残在導波路構成要素
一側壁の凸面状化を行ない、前記一側壁とは反対側の平
面導波路露出基板面に複数の光導体配設溝を形成し、 前記凸面状壁面と嵌合可能な凹面状壁面に光反射性周期
溝を有するグレーティング部の前記一側壁側平面導波路
露出基板面への嵌合固定及び前記各光導体配設溝への光
導体の固定を行なうことから成る導波路−グレーティン
グ形光合分波器の製造方法。(2) Forming a planar waveguide, removing the waveguide component portions on the planar waveguide substrate on both sides of the planar waveguide, and making the sidewall of the remaining waveguide component on the planar waveguide substrate convex. , a grating portion having a plurality of optical guide grooves formed on a surface of the planar waveguide exposed substrate opposite to the one side wall, and having light reflective periodic grooves on a concave wall surface that can be fitted with the convex wall surface; A method for manufacturing a waveguide-grating type optical multiplexer/demultiplexer, which comprises fitting and fixing the planar waveguide on the one side wall to the exposed substrate surface and fixing the optical guide to each of the optical guide grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14428086A JPS62299917A (en) | 1986-06-20 | 1986-06-20 | Waveguide-grating type optical multiplexer and demultiplexer and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14428086A JPS62299917A (en) | 1986-06-20 | 1986-06-20 | Waveguide-grating type optical multiplexer and demultiplexer and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62299917A true JPS62299917A (en) | 1987-12-26 |
Family
ID=15358407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14428086A Pending JPS62299917A (en) | 1986-06-20 | 1986-06-20 | Waveguide-grating type optical multiplexer and demultiplexer and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62299917A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6090311A (en) * | 1983-10-24 | 1985-05-21 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of optical waveguide film provided with diffraction grating |
-
1986
- 1986-06-20 JP JP14428086A patent/JPS62299917A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6090311A (en) * | 1983-10-24 | 1985-05-21 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of optical waveguide film provided with diffraction grating |
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