JPH079496B2 - Method of forming optical waveguide device - Google Patents

Method of forming optical waveguide device

Info

Publication number
JPH079496B2
JPH079496B2 JP61165723A JP16572386A JPH079496B2 JP H079496 B2 JPH079496 B2 JP H079496B2 JP 61165723 A JP61165723 A JP 61165723A JP 16572386 A JP16572386 A JP 16572386A JP H079496 B2 JPH079496 B2 JP H079496B2
Authority
JP
Japan
Prior art keywords
optical
optical waveguide
substrate
lens
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61165723A
Other languages
Japanese (ja)
Other versions
JPS6321610A (en
Inventor
實 清野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61165723A priority Critical patent/JPH079496B2/en
Publication of JPS6321610A publication Critical patent/JPS6321610A/en
Publication of JPH079496B2 publication Critical patent/JPH079496B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G02B6/1245—Geodesic lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Description

【発明の詳細な説明】 〔概 要〕 光学素子と光導波路との接続は間にレンズを介在せしめ
たり、数10μｍ以下に加工した光学素子を光導波路の隙
間に挿入することにより行われる。この場合前者では光
学基板上にそれ等の光学素子とレンズを組込む作業は極
めて困難であり、後者では光学素子を薄く加工すること
が困難で損失が大きい。そこで光導波路を形成する際に
レンズも同時に形成せしめ、それ等の光学素子と光導波
路の接続を簡略化したものである。DETAILED DESCRIPTION OF THE INVENTION [Outline] Connection between an optical element and an optical waveguide is performed by interposing a lens between them or inserting an optical element processed to have a size of several tens of μm or less into a gap between the optical waveguides. In this case, in the former case, it is extremely difficult to assemble the optical element and the lens on the optical substrate, and in the latter case, it is difficult to process the optical element thinly and the loss is large. Therefore, when forming the optical waveguide, the lens is also formed at the same time, and the connection between these optical elements and the optical waveguide is simplified.

〔産業上の利用分野〕[Industrial application field]

本発明は光通信システムを構成するデバイスに係り、特
に光学素子との接続を簡略化できる光導波路デバイスの
形成方法に関する。The present invention relates to a device forming an optical communication system, and more particularly to a method of forming an optical waveguide device that can simplify connection with an optical element.

光を用いた通信システムは情報化社会における最適の通
信システムとして広い分野に普及しつつある。しかしこ
れまでに提供されていた光デバイスは高い精度や信頼性
が要求され量産化できないものが多く、光を用いた通信
システムの低価格化を阻害する原因になっている。The communication system using light is spreading in a wide field as an optimum communication system in the information society. However, many of the optical devices that have been provided so far are required to have high accuracy and reliability and cannot be mass-produced, which is an obstacle to lowering the price of a communication system using light.

そこで通信システムの低価格化を実現するための手段と
して、高い精度や信頼性を維持しながら量産化できるよ
うに部品や装置の形態を改良すると共に、それを量産化
するための製造技術の開発が望まれている。Therefore, as a means to realize the cost reduction of communication systems, the forms of parts and devices are improved so that they can be mass-produced while maintaining high accuracy and reliability, and the development of manufacturing technology for mass-producing them. Is desired.

〔従来の技術〕[Conventional technology]

第５図は従来の光導波路と光ファイバの接続を示す側断
面図、第６図は従来の個別光素子による光分波器の構成
を示す平面図である。FIG. 5 is a side sectional view showing a connection between a conventional optical waveguide and an optical fiber, and FIG. 6 is a plan view showing a configuration of a conventional optical demultiplexer using individual optical elements.

第５図において光ファイバ１はクラッド層11およびコア
層12からなり、一方光導波路デバイス２は光学基板21と
クラッド層22およびコア層23からなる光導波路24とで形
成されている。この両者は従来同図（ａ）または（ｂ）
に示す方法で接続されていた。In FIG. 5, the optical fiber 1 comprises a cladding layer 11 and a core layer 12, while the optical waveguide device 2 comprises an optical substrate 21 and an optical waveguide 24 comprising a cladding layer 22 and a core layer 23. Both of them are conventionally shown in FIG.
It was connected by the method shown in.

第５図（ａ）は光ファイバ１と光導波路デバイス２とを
直接接続する方法で、光導波路24の端面に光ファイバ１
の端面を当接せしめた後例えば樹脂31等によって接着し
ている。また第５図（ｂ）は光ファイバ１と光導波路デ
バイス２とをレンズ32を介して接続する方法で、光導波
路24の端面にレンズ32を当接せしめた後例えば樹脂31等
によって接着し、これを光ファイバ１の端面と対向せし
めて基板３に固定することによって接続している。FIG. 5 (a) shows a method of directly connecting the optical fiber 1 and the optical waveguide device 2 to each other.
After abutting the end faces thereof, they are adhered by, for example, resin 31 or the like. Further, FIG. 5 (b) shows a method of connecting the optical fiber 1 and the optical waveguide device 2 via the lens 32. After the lens 32 is brought into contact with the end face of the optical waveguide 24, it is adhered by, for example, resin 31 or the like. The optical fiber 1 is connected to the end face of the optical fiber 1 so as to face the end face and fixed to the substrate 3.

また従来の個別光素子による光分波器は第６図に示す如
く、基板４上に配置された複数個の光ファイバ１と光フ
ァイバ１に対応して設けられたレンズ42と、それぞれ対
になる光ファイバ１の間に設置された干渉フィルタ43か
らなり、図示のごとく１個の光ファイバ１を伝播してき
たλ１とλ２の二つの波長を有する光は、干渉フィルタ
43によって波長λ１の光と波長λ２の光とに分波され、
分波された光はそれぞれ別の光ファイバ１を経由して伝
播される。Further, as shown in FIG. 6, a conventional optical demultiplexer using individual optical elements is composed of a plurality of optical fibers 1 arranged on a substrate 4 and lenses 42 provided corresponding to the optical fibers 1 in pairs. The light having the two wavelengths λ 1 and λ 2 that has propagated through one optical fiber 1 as shown in the figure is formed by the interference filter 43 installed between the optical filters 1.
It is demultiplexed into light of wavelength λ 1 and light of wavelength λ 2 by 43,
The demultiplexed lights are propagated via different optical fibers 1.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

従来の光導波路はその端面に光ファイバを直接当接させ
る場合であっても、またレンズを介して光ファイバやそ
の他の光学素子と接続する場合であっても、光の損失を
少なくするためにその端面は必ず鏡面状に研摩しなけれ
ばならない。しかし光学基板上に形成された光導波路を
途中で切断しその端面を鏡面研摩するすることは極めて
難しい。したがって光導波路デバイスを光ファイバやそ
の他の光学素子と共に、別の基板状に配置しその間に別
に形成したレンズを装着する必要が生じる。In the conventional optical waveguide, in order to reduce the loss of light, even when the optical fiber is directly brought into contact with the end face of the optical waveguide or when the optical fiber is connected to another optical element through a lens. The end face must be polished to a mirror surface. However, it is extremely difficult to cut the optical waveguide formed on the optical substrate on the way and to polish the end face of the optical waveguide. Therefore, it becomes necessary to dispose the optical waveguide device together with the optical fiber and other optical elements on another substrate and mount a lens separately formed therebetween.

その結果従来の光導波路デバイスと光ファイバやその他
の光学素子からなる光デバイスの形成は、高精度な位置
合わせや光軸合わせが多くなり組立てが困難であると共
に高価になるという問題があった。As a result, formation of an optical device including a conventional optical waveguide device and an optical fiber or other optical element has a problem in that highly accurate alignment and optical axis alignment increase, which makes assembly difficult and expensive.

〔問題を解決するための手段〕[Means for solving problems]

上記目的を達成するために本発明は、第１図に例示した
ように、光学素子に光結合する、光学基板６と光学基板
６の上に形成された光導波路７とからなる光導波路デバ
イスの形成方法において、 光学基板６を光導波路７と異なる光学材料で形成するこ
とにより、エッチング手法により光導波路７の先端部を
光学基板６から突出せしめる。In order to achieve the above object, the present invention provides an optical waveguide device comprising an optical substrate 6 and an optical waveguide 7 formed on the optical substrate 6, which is optically coupled to an optical element, as illustrated in FIG. In the forming method, by forming the optical substrate 6 from an optical material different from that of the optical waveguide 7, the tip of the optical waveguide 7 is made to project from the optical substrate 6 by an etching method.

次に、光学基板６から突出した光導波路７の先端部を覆
うように、CVD法により光学膜８を形成し、光導波路７
の端面に光学膜８からなるレンズ81を設ける構成とす
る。Next, an optical film 8 is formed by a CVD method so as to cover the tip of the optical waveguide 7 protruding from the optical substrate 6, and the optical waveguide 7 is formed.
A lens 81 made of the optical film 8 is provided on the end face of the.

〔作用〕[Action]

本発明によれば、光学基板から突出した光導波路の先端
部に、CVD法により光導波路の表面に光学膜を形成する
と、光導波路の先端部が光学基板から突出しているの
で、光導波路の端面には凸レンズ状に光学膜が被着す
る。即ち光導波路の端面にレンズが形成される。According to the present invention, when the optical film is formed on the surface of the optical waveguide by the CVD method at the tip of the optical waveguide projecting from the optical substrate, the tip of the optical waveguide projects from the optical substrate, so that the end surface of the optical waveguide An optical film is applied to the lens in the shape of a convex lens. That is, a lens is formed on the end face of the optical waveguide.

したがって、従来の光導波路デバイスでは不可欠な作業
であった光導波路の端面を鏡面状に研摩する作業が不要
になる。また同一光学基板上に光導波路とレンズを同時
に形成することが可能になり、従来の光導波路デバイス
では別に形成し光導波路に対応させて装着していたレン
ズが不要になる。そして光導波路とレンズを同時に形成
した光学基板上に、光ファイバやその他の光学素子を装
着することが可能になり、光導波路と光ファイバやその
他の光学素子との接続が簡略化されて、高精度な位置合
わせや光軸合わせを低減することができる。Therefore, the work of polishing the end face of the optical waveguide into a mirror surface, which is indispensable for the conventional optical waveguide device, becomes unnecessary. Further, it becomes possible to simultaneously form the optical waveguide and the lens on the same optical substrate, and the lens which is separately formed in the conventional optical waveguide device and corresponding to the optical waveguide becomes unnecessary. Then, it becomes possible to mount the optical fiber and other optical elements on the optical substrate on which the optical waveguide and the lens are formed at the same time, simplifying the connection between the optical waveguide and the optical fiber and other optical elements, and It is possible to reduce accurate alignment and optical axis alignment.

〔実施例〕〔Example〕

以下添付図により本発明の実施例について説明する。第
２図乃至第４図は本発明になる光導波路デバイスの応用
例を示す図で、第２図は光導波路デバイスと光ファイバ
の接続を示す側断面図、第３図は光導波路デバイスによ
る光分波器の構成を示す平面図、第４図は光導波路デバ
イスと光学素子との接続を示す側断面図である。なお全
図を通し同じ対象物は同一記号で表している。An embodiment of the present invention will be described below with reference to the accompanying drawings. 2 to 4 are views showing an application example of the optical waveguide device according to the present invention, FIG. 2 is a side sectional view showing the connection between the optical waveguide device and the optical fiber, and FIG. FIG. 4 is a plan view showing the configuration of the demultiplexer, and FIG. 4 is a side sectional view showing the connection between the optical waveguide device and the optical element. Note that the same object is denoted by the same symbol throughout the drawings.

第１図（ａ）においてクラッド層71およびコア層72から
なる光導波路７と、その光導波路７を支持する光学基板
６とは異なる光学材料で形成されており、ドライエッチ
ングやケミカルエッチング等のエッチング手法により、
光導波路７の蔭になる光学基板６の一部までエッチング
することができる。その結果光導波路７の先端部が光学
基板６から突出する。In FIG. 1A, the optical waveguide 7 including the clad layer 71 and the core layer 72 and the optical substrate 6 that supports the optical waveguide 7 are formed of different optical materials, and are etched by dry etching, chemical etching, or the like. By the method,
It is possible to etch even a part of the optical substrate 6 which is to be the back of the optical waveguide 7. As a result, the tip of the optical waveguide 7 projects from the optical substrate 6.

第１図（ｂ）に示す如くその上にCVD法等によってSiやS
iO2等の光学膜８を被着させると、光学膜８は光導波路
７の先端部に回り込み光導波路７の端面を覆う。この光
導波路７の端面を覆う光学膜８は端面における疵の部分
にまず充填されるため、光学膜８の被着に先立って端面
を鏡面状に研摩する必要はない。なお光導波路７の上に
光学膜８を被着させるため、光学膜８とコア層72との間
に形成したクラッド層71は省略或は薄くすることが可能
である。As shown in FIG. 1 (b), Si or S is formed on top by CVD or the like.
When the optical film 8 such as iO 2 is deposited, the optical film 8 wraps around the tip of the optical waveguide 7 and covers the end face of the optical waveguide 7. Since the optical film 8 covering the end face of the optical waveguide 7 is first filled in the flaw portion of the end face, it is not necessary to polish the end face into a mirror surface prior to the deposition of the optical film 8. Since the optical film 8 is deposited on the optical waveguide 7, the clad layer 71 formed between the optical film 8 and the core layer 72 can be omitted or thinned.

光導波路７の端面を覆う光学膜８が更に厚くなると光導
波路７の端面にレンズ81を形成する。因にこのレンズ81
の曲率半径ひいてはレンズ81の焦点距離は、光導波路７
の端面の面積と光導波路７の端面に披着させる光学膜８
の厚さを変えることにより制御できる。When the optical film 8 covering the end face of the optical waveguide 7 becomes thicker, the lens 81 is formed on the end face of the optical waveguide 7. This lens 81
The radius of curvature of the
Area of the end face of the optical film 8 and the optical film 8 to be attached to the end face of the optical waveguide 7.
It can be controlled by changing the thickness of.

かかる光導波路デバイスと光ファイバとの接続は第２図
に示す如く、光導波路７を形成した光学基板６に光ファ
イバ１を装着することによって、光導波路７のコア層72
と光ファイバ１のコア層12がレンズ81を介して接続され
る。このようにレンズ81を介して接続することによって
位置合わせや光軸合わせが容易になり、光導波路７と光
ファイバ１との接続が簡略される。The connection between the optical waveguide device and the optical fiber is performed by mounting the optical fiber 1 on the optical substrate 6 on which the optical waveguide 7 is formed, as shown in FIG.
And the core layer 12 of the optical fiber 1 are connected via a lens 81. By thus connecting via the lens 81, alignment and optical axis alignment are facilitated, and the connection between the optical waveguide 7 and the optical fiber 1 is simplified.

また本発明になる光導波路デバイスによる光分波器は第
３図に示す如く、複数個の光導波路７は同一光学基板６
に同時に形成され、それぞれの光導波路７が端面にレン
ズ81を具えていれため、光導波路７を形成した光学基板
６に干渉フィルタ43を設置し、光導波路７と干渉フィル
タ43の位置合わせを行うだけで容易に形成することがで
きる。An optical demultiplexer using an optical waveguide device according to the present invention has a plurality of optical waveguides 7 on the same optical substrate 6 as shown in FIG.
Since the optical waveguides 7 are formed at the same time, and each optical waveguide 7 has a lens 81 on the end face, the interference filter 43 is installed on the optical substrate 6 on which the optical waveguide 7 is formed, and the optical waveguide 7 and the interference filter 43 are aligned with each other. It can be easily formed only.

更に本発明になる光導波路デバイスと光学素子との接続
は第７図に示す如く、端面にレンズ81を具えた光導波路
７とリレーレンズ82、83が同一光学基板６に同時に形成
されているため、光導波路７を形成した光学基板６に光
学素子51を装着することによって、光導波路７と光学素
子51とを容易に接続することができる。Further, as shown in FIG. 7, the connection between the optical waveguide device according to the present invention and the optical element is such that the optical waveguide 7 having the lens 81 on the end face and the relay lenses 82 and 83 are simultaneously formed on the same optical substrate 6. By mounting the optical element 51 on the optical substrate 6 on which the optical waveguide 7 is formed, the optical waveguide 7 and the optical element 51 can be easily connected.

このように本発明になる光導波路デバイスの形成方法に
よって、光導波路とレンズを同時に形成した光学基板上
に、光ファイバやその他の光学素子装着することが可能
になり、光導波路と光ファイバやその他の光学素子との
接続が簡略化されて、高精度な位置合わせや光軸合わせ
を低減することができる。As described above, according to the method of forming an optical waveguide device according to the present invention, it becomes possible to mount an optical fiber or other optical element on an optical substrate on which an optical waveguide and a lens are formed at the same time. Since the connection with the optical element is simplified, highly accurate alignment and optical axis alignment can be reduced.

〔発明の効果〕〔The invention's effect〕

上述の如く本発明によれば光学素子との接続を簡略化で
きる、光導波路デバイスの形式方法を提供することがで
きる。As described above, according to the present invention, it is possible to provide a method of forming an optical waveguide device in which connection with an optical element can be simplified.

【図面の簡単な説明】[Brief description of drawings]

第１図は本発明になる光導波路デバイスの形成方法を示
す側断面図、 第２図は光導波路デバイスと光ファイバの接続を示す側
断面図、 第３図は光導波路デバイスによる光分波器の構成を示す
平面図、 第４図は光導波路デバイスと光学素子との接続を示す側
断面図、 第５図は従来の光導波路と光ファイバの接続を示す側断
面図、 第６図は従来の個別光素子による光分波器の構成を示す
平面図、 である。図において １は光ファイバ、６は光学基板、 ７は光導波路、８は光学膜、 11はクラッド層、12はコア層、 43は干渉フィルタ、51は光学素子、 71はクラッド層、72はコア層、 81はレンズ、82、83はリレーレンズ、 をそれぞれ表す。1 is a side sectional view showing a method for forming an optical waveguide device according to the present invention, FIG. 2 is a side sectional view showing a connection between an optical waveguide device and an optical fiber, and FIG. 3 is an optical demultiplexer using the optical waveguide device. FIG. 4 is a side sectional view showing a connection between an optical waveguide device and an optical element, FIG. 5 is a side sectional view showing a connection between a conventional optical waveguide and an optical fiber, and FIG. FIG. 6 is a plan view showing the configuration of an optical demultiplexer including the individual optical element of FIG. In the figure, 1 is an optical fiber, 6 is an optical substrate, 7 is an optical waveguide, 8 is an optical film, 11 is a clad layer, 12 is a core layer, 43 is an interference filter, 51 is an optical element, 71 is a clad layer, and 72 is a core. Layers, 81 is a lens, and 82 and 83 are relay lenses.

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】光学素子に光結合する、光学基板（６）と
該光学基板（６）上に形成された光導波路（７）とから
なる光導波路デバイスの形成方法において、 該光学基板（６）を該光導波路（７）と異なる光学材料
で形成することにより、エッチング手法により該光導波
路（７）の先端部を該光学基板（６）から突出せしめ、 該光学基板（６）から突出した該光導波路（７）の先端
部を覆うように、CVD法により光学膜（８）を形成し、
該光導波路（７）の端面に該光学膜（８）からなるレン
ズ（81）を設けることを特徴とする光導波路デバイスの
形成方法。1. A method for forming an optical waveguide device comprising an optical substrate (6) and an optical waveguide (7) formed on the optical substrate (6), which is optically coupled to an optical element. ) Is formed of an optical material different from that of the optical waveguide (7), the tip of the optical waveguide (7) is projected from the optical substrate (6) by an etching method, and is projected from the optical substrate (6). An optical film (8) is formed by a CVD method so as to cover the tip of the optical waveguide (7),
A method for forming an optical waveguide device, characterized in that a lens (81) made of the optical film (8) is provided on an end face of the optical waveguide (7).
JP61165723A 1986-07-15 1986-07-15 Method of forming optical waveguide device Expired - Lifetime JPH079496B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61165723A JPH079496B2 (en) 1986-07-15 1986-07-15 Method of forming optical waveguide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61165723A JPH079496B2 (en) 1986-07-15 1986-07-15 Method of forming optical waveguide device

Publications (2)

Publication Number Publication Date
JPS6321610A JPS6321610A (en) 1988-01-29
JPH079496B2 true JPH079496B2 (en) 1995-02-01

Family

ID=15817847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61165723A Expired - Lifetime JPH079496B2 (en) 1986-07-15 1986-07-15 Method of forming optical waveguide device

Country Status (1)

Country Link
JP (1) JPH079496B2 (en)

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US20220057580A1 (en) * 2019-04-15 2022-02-24 Nippon Telegraph And Telephone Corporation Optical Connecting Structure

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4904249B2 (en) * 2007-11-15 2012-03-28 日東電工株式会社 Optical waveguide for touch panel and touch panel using the same
JP5063510B2 (en) 2008-07-01 2012-10-31 日東電工株式会社 Optical touch panel and manufacturing method thereof
JP4891952B2 (en) 2008-07-03 2012-03-07 日東電工株式会社 Optical waveguide for touch panel and touch panel using the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4874242A (en) * 1971-12-29 1973-10-06
JPS6111708A (en) * 1984-06-28 1986-01-20 Nippon Telegr & Teleph Corp <Ntt> Channel optical waveguide with end face lens and its production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220057580A1 (en) * 2019-04-15 2022-02-24 Nippon Telegraph And Telephone Corporation Optical Connecting Structure
US11934011B2 (en) * 2019-04-15 2024-03-19 Nippon Telegraph And Telephone Corporation Optical connecting structure

Also Published As

Publication number Publication date
JPS6321610A (en) 1988-01-29

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