JPS62297583A - 真空度調節弁装置 - Google Patents

真空度調節弁装置

Info

Publication number
JPS62297583A
JPS62297583A JP13886786A JP13886786A JPS62297583A JP S62297583 A JPS62297583 A JP S62297583A JP 13886786 A JP13886786 A JP 13886786A JP 13886786 A JP13886786 A JP 13886786A JP S62297583 A JPS62297583 A JP S62297583A
Authority
JP
Japan
Prior art keywords
valve
vacuum
diaphragm
outlet
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13886786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316550B2 (enrdf_load_stackoverflow
Inventor
Takayuki Morii
高之 森井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TLV Co Ltd
Original Assignee
TLV Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TLV Co Ltd filed Critical TLV Co Ltd
Priority to JP13886786A priority Critical patent/JPS62297583A/ja
Publication of JPS62297583A publication Critical patent/JPS62297583A/ja
Publication of JPH0316550B2 publication Critical patent/JPH0316550B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
JP13886786A 1986-06-13 1986-06-13 真空度調節弁装置 Granted JPS62297583A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13886786A JPS62297583A (ja) 1986-06-13 1986-06-13 真空度調節弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13886786A JPS62297583A (ja) 1986-06-13 1986-06-13 真空度調節弁装置

Publications (2)

Publication Number Publication Date
JPS62297583A true JPS62297583A (ja) 1987-12-24
JPH0316550B2 JPH0316550B2 (enrdf_load_stackoverflow) 1991-03-05

Family

ID=15231977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13886786A Granted JPS62297583A (ja) 1986-06-13 1986-06-13 真空度調節弁装置

Country Status (1)

Country Link
JP (1) JPS62297583A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0316550B2 (enrdf_load_stackoverflow) 1991-03-05

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