JPS62295840A - グリツプ装置 - Google Patents

グリツプ装置

Info

Publication number
JPS62295840A
JPS62295840A JP13967286A JP13967286A JPS62295840A JP S62295840 A JPS62295840 A JP S62295840A JP 13967286 A JP13967286 A JP 13967286A JP 13967286 A JP13967286 A JP 13967286A JP S62295840 A JPS62295840 A JP S62295840A
Authority
JP
Japan
Prior art keywords
wafer
claws
rods
grip device
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13967286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0378232B2 (enExample
Inventor
Takeshi Yoshihara
健 吉原
Shigeji Fukui
福井　茂次
Keiji Kato
圭司 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shin Meiva Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Meiva Industry Ltd filed Critical Shin Meiva Industry Ltd
Priority to JP13967286A priority Critical patent/JPS62295840A/ja
Publication of JPS62295840A publication Critical patent/JPS62295840A/ja
Publication of JPH0378232B2 publication Critical patent/JPH0378232B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13967286A 1986-06-16 1986-06-16 グリツプ装置 Granted JPS62295840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13967286A JPS62295840A (ja) 1986-06-16 1986-06-16 グリツプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13967286A JPS62295840A (ja) 1986-06-16 1986-06-16 グリツプ装置

Publications (2)

Publication Number Publication Date
JPS62295840A true JPS62295840A (ja) 1987-12-23
JPH0378232B2 JPH0378232B2 (enExample) 1991-12-13

Family

ID=15250732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13967286A Granted JPS62295840A (ja) 1986-06-16 1986-06-16 グリツプ装置

Country Status (1)

Country Link
JP (1) JPS62295840A (enExample)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104990U (enExample) * 1989-02-07 1990-08-21
US5188501A (en) * 1990-04-27 1993-02-23 Shin-Etsu Handotai Co., Ltd. Wafer transfer system
US6988879B2 (en) * 2002-10-18 2006-01-24 Asm Technology Singapore Pte Ltd Apparatus and method for reducing substrate warpage
JP2008049418A (ja) * 2006-08-23 2008-03-06 Nachi Fujikoshi Corp 産業用ロボットのハンド装置
JP2014138674A (ja) * 2013-01-21 2014-07-31 National Institute Of Advanced Industrial & Technology 電動把持装置およびハンドユニット
CN104505364A (zh) * 2014-12-26 2015-04-08 苏州凯锝微电子有限公司 一种晶圆可旋转的夹持装置
US9082801B2 (en) 2012-09-05 2015-07-14 Industrial Technology Research Institute Rotatable locating apparatus with dome carrier and operating method thereof
CN105563509A (zh) * 2014-10-13 2016-05-11 北京自动化控制设备研究所 一种提高刚性连杆式夹持结构
CN105563510A (zh) * 2014-10-13 2016-05-11 北京自动化控制设备研究所 一种多功能末端夹持器
US9373534B2 (en) 2012-09-05 2016-06-21 Industrial Technology Research Institute Rotary positioning apparatus with dome carrier, automatic pick-and-place system, and operating method thereof
JP2022189234A (ja) * 2021-06-11 2022-12-22 国立大学法人北海道国立大学機構 ロボットハンド及びロボットハンドを備えたつる性作物収穫装置
FR3128656A1 (fr) * 2021-11-04 2023-05-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Préhenseur

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104990U (enExample) * 1989-02-07 1990-08-21
US5188501A (en) * 1990-04-27 1993-02-23 Shin-Etsu Handotai Co., Ltd. Wafer transfer system
US6988879B2 (en) * 2002-10-18 2006-01-24 Asm Technology Singapore Pte Ltd Apparatus and method for reducing substrate warpage
JP2008049418A (ja) * 2006-08-23 2008-03-06 Nachi Fujikoshi Corp 産業用ロボットのハンド装置
US9082801B2 (en) 2012-09-05 2015-07-14 Industrial Technology Research Institute Rotatable locating apparatus with dome carrier and operating method thereof
US9373534B2 (en) 2012-09-05 2016-06-21 Industrial Technology Research Institute Rotary positioning apparatus with dome carrier, automatic pick-and-place system, and operating method thereof
JP2014138674A (ja) * 2013-01-21 2014-07-31 National Institute Of Advanced Industrial & Technology 電動把持装置およびハンドユニット
CN105563509A (zh) * 2014-10-13 2016-05-11 北京自动化控制设备研究所 一种提高刚性连杆式夹持结构
CN105563510A (zh) * 2014-10-13 2016-05-11 北京自动化控制设备研究所 一种多功能末端夹持器
CN105563510B (zh) * 2014-10-13 2017-12-26 北京自动化控制设备研究所 一种多功能末端夹持器
CN105563509B (zh) * 2014-10-13 2018-02-09 北京自动化控制设备研究所 一种提高刚性连杆式夹持结构
CN104505364A (zh) * 2014-12-26 2015-04-08 苏州凯锝微电子有限公司 一种晶圆可旋转的夹持装置
JP2022189234A (ja) * 2021-06-11 2022-12-22 国立大学法人北海道国立大学機構 ロボットハンド及びロボットハンドを備えたつる性作物収穫装置
FR3128656A1 (fr) * 2021-11-04 2023-05-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Préhenseur
EP4177017A1 (fr) * 2021-11-04 2023-05-10 Commissariat à l'énergie atomique et aux énergies alternatives Prehenseur

Also Published As

Publication number Publication date
JPH0378232B2 (enExample) 1991-12-13

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