JPS62294914A - 極低温冷媒液面計 - Google Patents

極低温冷媒液面計

Info

Publication number
JPS62294914A
JPS62294914A JP62151208A JP15120887A JPS62294914A JP S62294914 A JPS62294914 A JP S62294914A JP 62151208 A JP62151208 A JP 62151208A JP 15120887 A JP15120887 A JP 15120887A JP S62294914 A JPS62294914 A JP S62294914A
Authority
JP
Japan
Prior art keywords
double pipe
liquid level
liquid
pipe
electric heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62151208A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547050B2 (enExample
Inventor
Shigeyuki Sasaki
重幸 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62151208A priority Critical patent/JPS62294914A/ja
Publication of JPS62294914A publication Critical patent/JPS62294914A/ja
Publication of JPH0547050B2 publication Critical patent/JPH0547050B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
JP62151208A 1987-06-19 1987-06-19 極低温冷媒液面計 Granted JPS62294914A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62151208A JPS62294914A (ja) 1987-06-19 1987-06-19 極低温冷媒液面計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62151208A JPS62294914A (ja) 1987-06-19 1987-06-19 極低温冷媒液面計

Publications (2)

Publication Number Publication Date
JPS62294914A true JPS62294914A (ja) 1987-12-22
JPH0547050B2 JPH0547050B2 (enExample) 1993-07-15

Family

ID=15513599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62151208A Granted JPS62294914A (ja) 1987-06-19 1987-06-19 極低温冷媒液面計

Country Status (1)

Country Link
JP (1) JPS62294914A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220827A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 塗布装置
CN102519543A (zh) * 2011-12-14 2012-06-27 张家港圣汇气体化工装备有限公司 用于深冷液体贮槽的差压液位计的取压装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009068948A (ja) * 2007-09-12 2009-04-02 Cryovac Corp 低温液体用液面計及びそれを備えた低温液体貯留容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220827A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 塗布装置
CN102519543A (zh) * 2011-12-14 2012-06-27 张家港圣汇气体化工装备有限公司 用于深冷液体贮槽的差压液位计的取压装置

Also Published As

Publication number Publication date
JPH0547050B2 (enExample) 1993-07-15

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