JPS62293633A - Alignment of prober - Google Patents

Abstract

PURPOSE:To display a real alignment position in real time, by displaying a semiconductor circuit pattern on a display and then making a trace of stage movement be memorized in an external controlling device. CONSTITUTION:Sizes of a chip and a wafer are inputted from an external memory 1 to an external controlling device 3, to display a semiconductor circuit pattern on a CRT 8 serving as a display. A wafer axis is matched with axes if x,y,z,and theta by means of an internal controlling device 4, a driving gear 5, a x-y-z-theta stage 6, and a camera laser 9,and then position alignment to a reference chip is manually performed by.an 10. The signal of the position where the determined position corresponds to the position on the semiconductor circuit pattern on the CRT 8 is inputted to the device 3 by using a mouse 7. A mouse key 14 is carried to any chip on the semiconductor circuit pattern, with the alignment being performed every chip in interlocking operation.

Description

Detailed Description of the Invention 3. Detailed Description of the Invention Field of Industrial Application The present invention relates to a prober alignment method, in particular:
When probing semiconductor circuit elements on a wafer, this method allows any semiconductor circuit element to be tested to be easily aligned with a probe needle using a mouse.

BACKGROUND ART FIG. 4 is a diagram showing a conventional prober alignment system, in which 31 is a camera/laser, 32 is a CRT, and 33 is a diagram showing a conventional prober alignment system.
is an internal control device, 34 is a drive device, 36 is x, y,
z.

θ stage, 36 is an internal storage device, and 37 is a human being.

In the conventional prober alignment method, first, a camera or a laser 31 is used to align the horizontal axis of the wafer's orientation flat and the stage with the devices 33, 34, . Performed on stage 36,
This is then done by a human manually aligning the probe needle to a reference point, and by moving it in index units from that position, all semiconductor circuit elements on the wafer that are regularly arranged are aligned to the probe needle. It made it possible.

Problems to be Solved by the Invention In the conventional method as described above, it is not possible to simultaneously observe the entire circuit pattern while moving in index units from the reference point manually aligned. Since it is not immediately clear whether the probe needle is aligned with the wafer, it is difficult to immediately know how far the index should be moved to align it to a certain semiconductor circuit element to be tested on the wafer. Ta. Therefore, this method is inappropriate for alignment when each chip on one wafer is probed in an irregular order.

Also, during probing, shield the surrounding area from light to eliminate noise.
Since the probe is blocked, it is impossible to observe it from the outside with a camera or the like, and there is a problem that it is increasingly difficult to know which position on the wafer is being probed.

Means to solve problems The present invention is an alignment method as follows.

First, there is a correspondence between the position used as a reference point in the conventional alignment method described above and the position of the semiconductor circuit pattern displayed on the display device, predicted from the chip size and wafer size, or stored in the external storage device. Set it so that it can be removed. Next, move the mouse key displayed on the display device to the semiconductor circuit position of the semiconductor circuit pattern to be next aligned. Since it is possible to calculate how far the position of the mouse key is from the reference point in the x17 direction, this information is sent to the drive device through an external control device to drive the stage and perform alignment.

By displaying the semiconductor circuit pattern on the action display device, it is possible to use the mouse key to determine which coordinate ("0+yo") the reference point corresponds to on the semiconductor circuit pattern. The external control device can store the history of how the stage has moved based on its coordinates ("or 3'o"), so it can check in real time where it is currently aligned. Can be displayed. Also, the above in conjunction with the mouse above!
,7. Alignment can be performed by moving the Z and θ stages in the x17 direction. Furthermore, even if the surrounding area is shielded from light to remove noise during probing, making it impossible to observe with a camera or the like from the outside, it can be observed because it is displayed on the CRT.

EXAMPLES Hereinafter, the present invention will be described in detail with reference to FIGS. 1, 2, and 3 of the drawings.

(First Embodiment) FIG. 1 is a system configuration diagram for realizing the prober alignment method according to the present invention, and the alignment method will be explained with reference as follows.

(1) The chip size and wafer size are input from the external storage device 1 to the external control device 3, and the semiconductor circuit pattern shown in FIG. 2 is displayed on the display device 0RTB. (2)
Internal control device 4. Drive device 5. x.

After aligning the wafer axis with the x+ 7 + ” + θ axis using the 7 + z + θ stage e and the camera/laser 9, the human 10 manually aligns the reference chip with the reference chip. (3) (The position determined by 2+) The mouse 7 is used to input to the external control device 3 which position of the semiconductor circuit pattern (FIG. 2) on the CRT corresponds.

(4) Move the mouse key 14 onto any chip on the semiconductor circuit pattern, and perform alignment for each chip in conjunction with this.

FIG. 2 shows a wafer (semiconductor substrate) 11, 12
is each chip, 13 is the reference chip, 14 is the mouse key, 1
6 is the orientation flat.

(Second Embodiment) In the external storage device 1 in the same system configuration diagram (FIG. 1) as in the first embodiment, the chip pattern on the wafer shown in FIG. 2 and the module in the chip shown in FIG. The pattern is stored, and the actual chip pattern is displayed on the CRT in step (1) of the first embodiment. In Figure 3, 21
is a scribe line, 22 is a module, and 23 is a reference point. Furthermore, the module pattern of each chip is also displayed hierarchically on the CRT, and the position of the reference chip is inputted to the external control device 3 using the mouse key 14 as in the first embodiment. In this way, the semiconductor circuit patterns on the wafer can be displayed hierarchically on the CRTB, and alignment within the chip can be performed in the same manner as in the first embodiment.

As described in detail, according to the present invention, the alignment of the prober can be performed in conjunction with the movement of the mouse while looking at the semiconductor circuit pattern displayed on the display device. Alignment can be easily performed from a semiconductor circuit onto any semiconductor circuit to be tested next. Furthermore, it is not necessary to confirm the probing position using a camera or microscope from the outside except when determining the reference point, and at other times there is no problem even if the surrounding area is shaded or blocked to prevent noise.

[Brief explanation of drawings]

FIG. 1 is a block diagram for explaining a method according to an embodiment of the present invention, and FIGS. 2 and 3 are plan views showing examples of display of a chip pattern on a wafer and a module pattern in a chip on a CRT, respectively. , FIG. 4 is a block diagram for explaining the conventional method. 1... External storage device, 2... Internal storage device, 3... External control device, 4... Internal control device, 6...・x, y, z, θ stages,
7...Song mouse, 8...Song RT0 Name of agent Patent attorney Toshio Nakao and 1 other person 1st
Figure 2 Figure 3

Claims (1)

[Claims] Displaying a semiconductor circuit pattern stored in an external storage device on a display device, selecting an arbitrary pattern in the semiconductor circuit pattern as a reference point, storing it in the external storage device or internal storage device, and selecting it with a mouse. A method for aligning a prober, in which a pattern position on a display device is made to correspond to a stage position, and the pattern position is displayed on the display device and the stage is driven.