JPS6229178B2 - - Google Patents
Info
- Publication number
- JPS6229178B2 JPS6229178B2 JP53118493A JP11849378A JPS6229178B2 JP S6229178 B2 JPS6229178 B2 JP S6229178B2 JP 53118493 A JP53118493 A JP 53118493A JP 11849378 A JP11849378 A JP 11849378A JP S6229178 B2 JPS6229178 B2 JP S6229178B2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- plate
- workpiece
- notch
- internal gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11849378A JPS5548573A (en) | 1978-09-26 | 1978-09-26 | Automatic work taking out equipment for lapping machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11849378A JPS5548573A (en) | 1978-09-26 | 1978-09-26 | Automatic work taking out equipment for lapping machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5548573A JPS5548573A (en) | 1980-04-07 |
| JPS6229178B2 true JPS6229178B2 (ko) | 1987-06-24 |
Family
ID=14738030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11849378A Granted JPS5548573A (en) | 1978-09-26 | 1978-09-26 | Automatic work taking out equipment for lapping machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5548573A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102243075B1 (ko) * | 2019-11-12 | 2021-04-21 | 서연이엔지 주식회사 | 스프링백 보정이 가능한 프레스장치 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6124148U (ja) * | 1984-07-19 | 1986-02-13 | スピ−ドフアム株式会社 | 平面研摩装置 |
| JPS6127658U (ja) * | 1984-07-24 | 1986-02-19 | スピ−ドフアム株式会社 | 平面研摩装置 |
| KR20040013371A (ko) * | 2002-08-06 | 2004-02-14 | (주) 디씨엠 | 연마장치의 소재 운반용기 순환장치 |
-
1978
- 1978-09-26 JP JP11849378A patent/JPS5548573A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102243075B1 (ko) * | 2019-11-12 | 2021-04-21 | 서연이엔지 주식회사 | 스프링백 보정이 가능한 프레스장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5548573A (en) | 1980-04-07 |
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