JPS62291071A - Field-effect transistor - Google Patents

Field-effect transistor

Info

Publication number
JPS62291071A
JPS62291071A JP13528686A JP13528686A JPS62291071A JP S62291071 A JPS62291071 A JP S62291071A JP 13528686 A JP13528686 A JP 13528686A JP 13528686 A JP13528686 A JP 13528686A JP S62291071 A JPS62291071 A JP S62291071A
Authority
JP
Japan
Prior art keywords
gate electrode
fet
gate
electrode
input feed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13528686A
Other languages
Japanese (ja)
Inventor
Kazunao Tokunaga
徳永 一直
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP13528686A priority Critical patent/JPS62291071A/en
Publication of JPS62291071A publication Critical patent/JPS62291071A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To permit each FET unit to be operated under the same phase and improve RF characteristics in a case of FET in one chip that is an aggregate of FET unit by making a signal transmission distance from an input feed end to each gate electrode equal in the case of FET where the gate electrodes are arranged in a form of comb. CONSTITUTION:In an FET type transistor, in which gate electrodes 1 are arranged in a form of comb, the closer each gate electrode 2 gets to an input feed end 4, the longer it requires a distance between a gate electrode 1 and bus bar electrodes 3 and as a result, the above arrangement makes a signal transmission distance from the input feed end 4 to each gate electrode 1 equal and allows each FET unit consisting of each gate electrode 1 to be operated under the same phase. For instance, when the distance from the input feed end 4 to the bus bar electrode 1 is represented by a and each pitch between the gate electrodes is represented by b and the distances between the gate electrode 1 corresponding to each gate electrode and the bus bar electrodes 3 are represented by C1-C4 as well as the distances from the input feed ends to each gate electrode are represented by L1-L4, C1-C4 are set so that the following equations: L1=L2=L3=L4 are valid, provided that L1=a+4b+C1, L2=a+3b+C2, L3=a+2b+C3, and L4=a+b+C4.

Description

【発明の詳細な説明】 3、発明の詳細な説明 (産業上の利用分野〕 本発明はGaAs ME8FET  に関し、高出力化
を図るために多数のゲート電極を並列に並べることによ
り生じた各ゲート電極により構成される単位FETが同
一位相で動作しない現象を同一位相で動作させることに
よりRE’特性向上を図ることに関するものである。
[Detailed Description of the Invention] 3. Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a GaAs ME8FET, and the present invention relates to a GaAs ME8FET. This invention relates to improving the RE' characteristic by operating the unit FETs in the same phase instead of operating in the same phase.

〔従来の技術〕[Conventional technology]

従来、この種の電極形状は第2図に示す様になっており
、ゲート電極とバスバー電極の接続領域が同一形状で形
成され、結果として入力給電端から各ゲート電極までの
信号伝搬距離が異っていた。
Conventionally, this type of electrode shape has been as shown in Figure 2, in which the connection area between the gate electrode and the busbar electrode is formed in the same shape, and as a result, the signal propagation distance from the input feed end to each gate electrode is different. It was.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

前述した従来の電極形状では、入力給電端に最も近いゲ
ート電極に入力信号は最も早く到達し、入力給電端から
除々に遠ざかる他のゲート1d極への入力信号の到達は
除々に時間的に遅娘が生じ、各ゲート電極で構成されて
いる各単位、T” E Tが同一位相で動作しなくなる
。その結果、単位F E ’I’の集合体である1チツ
プのG a A s N ES F” E TのfLF
特性が低下するという欠点がある。
In the conventional electrode shape described above, the input signal reaches the gate electrode closest to the input power supply end the earliest, and the input signal arrives at the other gate 1d poles that gradually move away from the input power supply end with a time delay. Daughters are generated, and each unit, T''ET, made up of each gate electrode no longer operates in the same phase.As a result, one chip of GaAs, which is a collection of units FE'I'', F”ET fLF
The disadvantage is that the characteristics deteriorate.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の特徴は1図−1に示す様にゲート電極とバスバ
ー電極との間の電極形状(信号伝搬距l!#)を谷ゲー
ト電極毎に異なる形状にし、結果とじて入力給電端から
ゲート電極までの信号伝搬距離が等しくなる11f他形
状をイ1している。
The feature of the present invention is that, as shown in Figure 1-1, the electrode shape (signal propagation distance l!#) between the gate electrode and the busbar electrode is made different for each valley gate electrode. 11f and other shapes in which the signal propagation distances to the electrodes are equal are used.

〔実施例〕〔Example〕

本発明について第1図を参照して説明する。ゲート電極
とバスバー電極の間の形状を例えば旋状にする。入力給
電端からバスバー電極、極までの距離をa、谷ゲート電
極間ピッチb、ゲート1J1極1゜2 、3 、 l?
−灯心するゲート電極と、パスバー電極問丸l!llt
をそれぞれc、、I CZ  ICM  + C4とし
The present invention will be explained with reference to FIG. For example, the shape between the gate electrode and the bus bar electrode is made spiral. The distance from the input power supply end to the busbar electrode is a, the pitch between the valley gate electrodes is b, and the gate 1J1 pole is 1°2, 3, l?
- Inquiry about the gate electrode and the passbar electrode! llt
Let them be c, , I CZ ICM + C4, respectively.

入力給′111から谷ゲート電極までの距離をL工、2
,3.4とすれば LH−2+ 4 b + CI L2 ”” a + 3 b 十C! L3 := a + 2 b +c 3L、二a+  
b+c4 C3:21)+C里 c4−=3b+C。
The distance from the input supply '111 to the valley gate electrode is L, 2
, 3.4, then LH-2+ 4 b + CI L2 "" a + 3 b 10C! L3 := a + 2 b + c 3L, 2 a+
b+c4 C3:21)+Cric4-=3b+C.

となる様に設定すればり、==L、=L3=1,4とな
り全てのゲート電極壕でのは号伝搬距離は等しくなる。
If it is set so that ==L, =L3=1, 4, the signal propagation distance in all gate electrode trenches becomes equal.

〔発明の効果〕〔Effect of the invention〕

以ヒ説明したように本発明は、ゲート電極を櫛状に並べ
た()aAsMEsIi’ETにおいて入力給電端から
各ゲート電極までの信号伝搬距離を等しくすることによ
り、各単位F E ’I’を同一位相で動作させ、結果
として単位)” E Tの集合体であるエチップのJI
’ E TのRF特性向上に効果がある。
As explained below, in the present invention, each unit F E 'I' is made equal by equalizing the signal propagation distance from the input feed end to each gate electrode in ()aAsMEsIi'ET in which gate electrodes are arranged in a comb shape. Operates in the same phase, resulting in a unit)”ETIP JI which is a collection of
' It is effective in improving the RF characteristics of ET.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を7廖す平面図、第2図は従
来の平面図。 ■・・・・・ゲート電極、2−・・−ゲート電極とバス
バー電極の接続領域、3・・・・・・バスバー電極、4
・・・・・入力給電端。
FIG. 1 is a plan view of an embodiment of the present invention, and FIG. 2 is a plan view of a conventional structure. ■...Gate electrode, 2-...Connection area between gate electrode and busbar electrode, 3...Busbar electrode, 4
...Input power supply end.

Claims (1)

【特許請求の範囲】[Claims] ゲート電極を櫛状に並べた電界効果型トランジスタにお
いては、ゲート電極とバスバー電極の間の距離を入力給
電端に近い程に長くし、結果として入力給電端から各ゲ
ート電極までの信号伝搬距離が等しくなることにより各
ゲート電極により構成される各単位FETが同一位相で
動作することを特徴とする電界効果型トランジスタ。
In a field effect transistor in which gate electrodes are arranged in a comb shape, the distance between the gate electrode and the busbar electrode is made longer as it approaches the input power supply end, and as a result, the signal propagation distance from the input power supply end to each gate electrode is increased. A field effect transistor characterized in that each unit FET constituted by each gate electrode operates in the same phase by being made equal.
JP13528686A 1986-06-10 1986-06-10 Field-effect transistor Pending JPS62291071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13528686A JPS62291071A (en) 1986-06-10 1986-06-10 Field-effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13528686A JPS62291071A (en) 1986-06-10 1986-06-10 Field-effect transistor

Publications (1)

Publication Number Publication Date
JPS62291071A true JPS62291071A (en) 1987-12-17

Family

ID=15148149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13528686A Pending JPS62291071A (en) 1986-06-10 1986-06-10 Field-effect transistor

Country Status (1)

Country Link
JP (1) JPS62291071A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03276734A (en) * 1990-03-27 1991-12-06 Nec Corp Field-effect transistor
JPH09106994A (en) * 1995-10-13 1997-04-22 Nec Corp Microwave transistor
JP2010161348A (en) * 2008-12-10 2010-07-22 Toshiba Corp High-frequency semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03276734A (en) * 1990-03-27 1991-12-06 Nec Corp Field-effect transistor
JPH09106994A (en) * 1995-10-13 1997-04-22 Nec Corp Microwave transistor
JP2010161348A (en) * 2008-12-10 2010-07-22 Toshiba Corp High-frequency semiconductor device

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