JPS62291003A - 薄膜サ−ミスタの製造方法 - Google Patents

薄膜サ−ミスタの製造方法

Info

Publication number
JPS62291003A
JPS62291003A JP13462086A JP13462086A JPS62291003A JP S62291003 A JPS62291003 A JP S62291003A JP 13462086 A JP13462086 A JP 13462086A JP 13462086 A JP13462086 A JP 13462086A JP S62291003 A JPS62291003 A JP S62291003A
Authority
JP
Japan
Prior art keywords
thermistor
thin film
temperature
composite oxide
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13462086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354843B2 (enExample
Inventor
道井　敏
信善 竹内
直樹 原田
英一 真壁
健夫 山田
大高　晋一郎
鈴木　友信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Unizon KK
Original Assignee
Unizon KK
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unizon KK, NKK Corp, Nippon Kokan Ltd filed Critical Unizon KK
Priority to JP13462086A priority Critical patent/JPS62291003A/ja
Publication of JPS62291003A publication Critical patent/JPS62291003A/ja
Publication of JPH0354843B2 publication Critical patent/JPH0354843B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP13462086A 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法 Granted JPS62291003A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13462086A JPS62291003A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13462086A JPS62291003A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Publications (2)

Publication Number Publication Date
JPS62291003A true JPS62291003A (ja) 1987-12-17
JPH0354843B2 JPH0354843B2 (enExample) 1991-08-21

Family

ID=15132641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13462086A Granted JPS62291003A (ja) 1986-06-10 1986-06-10 薄膜サ−ミスタの製造方法

Country Status (1)

Country Link
JP (1) JPS62291003A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04170003A (ja) * 1990-10-09 1992-06-17 Mitsubishi Materials Corp 薄膜サーミスタ及びその製造方法
JPH04170001A (ja) * 1990-10-09 1992-06-17 Mitsubishi Materials Corp 薄膜サーミスタ及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04170003A (ja) * 1990-10-09 1992-06-17 Mitsubishi Materials Corp 薄膜サーミスタ及びその製造方法
JPH04170001A (ja) * 1990-10-09 1992-06-17 Mitsubishi Materials Corp 薄膜サーミスタ及びその製造方法

Also Published As

Publication number Publication date
JPH0354843B2 (enExample) 1991-08-21

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