JPS62290862A - 真空蒸着法 - Google Patents
真空蒸着法Info
- Publication number
- JPS62290862A JPS62290862A JP13402886A JP13402886A JPS62290862A JP S62290862 A JPS62290862 A JP S62290862A JP 13402886 A JP13402886 A JP 13402886A JP 13402886 A JP13402886 A JP 13402886A JP S62290862 A JPS62290862 A JP S62290862A
- Authority
- JP
- Japan
- Prior art keywords
- melt
- deposition
- vapor
- roller
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title description 15
- 239000000463 material Substances 0.000 claims abstract description 33
- 239000000155 melt Substances 0.000 claims abstract description 28
- 238000001704 evaporation Methods 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- 238000000151 deposition Methods 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 17
- 239000000126 substance Substances 0.000 claims description 5
- 238000007598 dipping method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 13
- 238000009835 boiling Methods 0.000 abstract description 6
- 239000007788 liquid Substances 0.000 abstract description 5
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 229910052736 halogen Inorganic materials 0.000 abstract description 4
- 150000002367 halogens Chemical class 0.000 abstract description 4
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 description 12
- 239000010408 film Substances 0.000 description 10
- 239000007791 liquid phase Substances 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000012768 molten material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000013021 overheating Methods 0.000 description 4
- 108091008695 photoreceptors Proteins 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000010025 steaming Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000009940 knitting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13402886A JPS62290862A (ja) | 1986-06-09 | 1986-06-09 | 真空蒸着法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13402886A JPS62290862A (ja) | 1986-06-09 | 1986-06-09 | 真空蒸着法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62290862A true JPS62290862A (ja) | 1987-12-17 |
| JPH0580553B2 JPH0580553B2 (enrdf_load_stackoverflow) | 1993-11-09 |
Family
ID=15118689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13402886A Granted JPS62290862A (ja) | 1986-06-09 | 1986-06-09 | 真空蒸着法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62290862A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007224394A (ja) * | 2006-02-27 | 2007-09-06 | Hitachi Zosen Corp | 蒸着材料の蒸発方法および蒸発装置ならびに真空蒸着装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59177365A (ja) * | 1983-03-24 | 1984-10-08 | Matsushita Electric Ind Co Ltd | 蒸発方法とその装置 |
-
1986
- 1986-06-09 JP JP13402886A patent/JPS62290862A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59177365A (ja) * | 1983-03-24 | 1984-10-08 | Matsushita Electric Ind Co Ltd | 蒸発方法とその装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007224394A (ja) * | 2006-02-27 | 2007-09-06 | Hitachi Zosen Corp | 蒸着材料の蒸発方法および蒸発装置ならびに真空蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0580553B2 (enrdf_load_stackoverflow) | 1993-11-09 |
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