JPS6228874U - - Google Patents

Info

Publication number
JPS6228874U
JPS6228874U JP11829485U JP11829485U JPS6228874U JP S6228874 U JPS6228874 U JP S6228874U JP 11829485 U JP11829485 U JP 11829485U JP 11829485 U JP11829485 U JP 11829485U JP S6228874 U JPS6228874 U JP S6228874U
Authority
JP
Japan
Prior art keywords
plate
electrode
bonded
plasma cvd
ceramic heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11829485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11829485U priority Critical patent/JPH0454Y2/ja
Publication of JPS6228874U publication Critical patent/JPS6228874U/ja
Application granted granted Critical
Publication of JPH0454Y2 publication Critical patent/JPH0454Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11829485U 1985-07-31 1985-07-31 Expired JPH0454Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11829485U JPH0454Y2 (enrdf_load_stackoverflow) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11829485U JPH0454Y2 (enrdf_load_stackoverflow) 1985-07-31 1985-07-31

Publications (2)

Publication Number Publication Date
JPS6228874U true JPS6228874U (enrdf_load_stackoverflow) 1987-02-21
JPH0454Y2 JPH0454Y2 (enrdf_load_stackoverflow) 1992-01-06

Family

ID=31004613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11829485U Expired JPH0454Y2 (enrdf_load_stackoverflow) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPH0454Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013508956A (ja) * 2010-06-11 2013-03-07 深▲せん▼市創益科技発展有限公司 シリコン系薄膜太陽電池のための可動治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013508956A (ja) * 2010-06-11 2013-03-07 深▲せん▼市創益科技発展有限公司 シリコン系薄膜太陽電池のための可動治具

Also Published As

Publication number Publication date
JPH0454Y2 (enrdf_load_stackoverflow) 1992-01-06

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