JPS6228155U - - Google Patents
Info
- Publication number
- JPS6228155U JPS6228155U JP11818585U JP11818585U JPS6228155U JP S6228155 U JPS6228155 U JP S6228155U JP 11818585 U JP11818585 U JP 11818585U JP 11818585 U JP11818585 U JP 11818585U JP S6228155 U JPS6228155 U JP S6228155U
- Authority
- JP
- Japan
- Prior art keywords
- screen
- inspected
- projecting
- onto
- defect inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11818585U JPS6228155U (en:Method) | 1985-08-02 | 1985-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11818585U JPS6228155U (en:Method) | 1985-08-02 | 1985-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228155U true JPS6228155U (en:Method) | 1987-02-20 |
Family
ID=31004400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11818585U Pending JPS6228155U (en:Method) | 1985-08-02 | 1985-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228155U (en:Method) |
-
1985
- 1985-08-02 JP JP11818585U patent/JPS6228155U/ja active Pending