JPS6227947B2 - - Google Patents
Info
- Publication number
- JPS6227947B2 JPS6227947B2 JP53118492A JP11849278A JPS6227947B2 JP S6227947 B2 JPS6227947 B2 JP S6227947B2 JP 53118492 A JP53118492 A JP 53118492A JP 11849278 A JP11849278 A JP 11849278A JP S6227947 B2 JPS6227947 B2 JP S6227947B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- carrier
- internal gear
- workpiece
- notch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012840 feeding operation Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11849278A JPS5548572A (en) | 1978-09-26 | 1978-09-26 | Automatic work feeding equipment for lapping machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11849278A JPS5548572A (en) | 1978-09-26 | 1978-09-26 | Automatic work feeding equipment for lapping machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5548572A JPS5548572A (en) | 1980-04-07 |
| JPS6227947B2 true JPS6227947B2 (show.php) | 1987-06-17 |
Family
ID=14738002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11849278A Granted JPS5548572A (en) | 1978-09-26 | 1978-09-26 | Automatic work feeding equipment for lapping machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5548572A (show.php) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58126063A (ja) * | 1982-03-03 | 1983-07-27 | Fujikoshi Kikai Kogyo Kk | 研摩機用ワ−クピ−ス・ロ−デイング装置 |
| KR20040013371A (ko) * | 2002-08-06 | 2004-02-14 | (주) 디씨엠 | 연마장치의 소재 운반용기 순환장치 |
| JP6822801B2 (ja) * | 2016-09-05 | 2021-01-27 | 浜井産業株式会社 | ワーク搬出入装置及び平面加工システム |
-
1978
- 1978-09-26 JP JP11849278A patent/JPS5548572A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5548572A (en) | 1980-04-07 |
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