JPS62271973A - ドライ真空ポンプのラビリンスシ−ル - Google Patents

ドライ真空ポンプのラビリンスシ−ル

Info

Publication number
JPS62271973A
JPS62271973A JP11375686A JP11375686A JPS62271973A JP S62271973 A JPS62271973 A JP S62271973A JP 11375686 A JP11375686 A JP 11375686A JP 11375686 A JP11375686 A JP 11375686A JP S62271973 A JPS62271973 A JP S62271973A
Authority
JP
Japan
Prior art keywords
stage
pump
labyrinth seal
dry vacuum
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11375686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312676B2 (enrdf_load_stackoverflow
Inventor
Katsumi Hikuma
日隈　克己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIA SHINKU GIKEN KK
Original Assignee
DIA SHINKU GIKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DIA SHINKU GIKEN KK filed Critical DIA SHINKU GIKEN KK
Priority to JP11375686A priority Critical patent/JPS62271973A/ja
Publication of JPS62271973A publication Critical patent/JPS62271973A/ja
Publication of JPH0312676B2 publication Critical patent/JPH0312676B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP11375686A 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル Granted JPS62271973A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11375686A JPS62271973A (ja) 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11375686A JPS62271973A (ja) 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル

Publications (2)

Publication Number Publication Date
JPS62271973A true JPS62271973A (ja) 1987-11-26
JPH0312676B2 JPH0312676B2 (enrdf_load_stackoverflow) 1991-02-20

Family

ID=14620339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11375686A Granted JPS62271973A (ja) 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル

Country Status (1)

Country Link
JP (1) JPS62271973A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021193A (ja) * 1988-03-03 1990-01-05 Fanuc Ltd レーザ発振装置
JP2002257070A (ja) * 2001-02-28 2002-09-11 Toyota Industries Corp 真空ポンプにおける軸封構造

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106110A (en) * 1976-03-03 1977-09-06 Hitachi Ltd Rotating air tight seal mechanism

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106110A (en) * 1976-03-03 1977-09-06 Hitachi Ltd Rotating air tight seal mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021193A (ja) * 1988-03-03 1990-01-05 Fanuc Ltd レーザ発振装置
JP2002257070A (ja) * 2001-02-28 2002-09-11 Toyota Industries Corp 真空ポンプにおける軸封構造

Also Published As

Publication number Publication date
JPH0312676B2 (enrdf_load_stackoverflow) 1991-02-20

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