JPS62271478A - 電歪効果素子の製造方法 - Google Patents
電歪効果素子の製造方法Info
- Publication number
- JPS62271478A JPS62271478A JP61115606A JP11560686A JPS62271478A JP S62271478 A JPS62271478 A JP S62271478A JP 61115606 A JP61115606 A JP 61115606A JP 11560686 A JP11560686 A JP 11560686A JP S62271478 A JPS62271478 A JP S62271478A
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive
- grooves
- electrodes
- electrostrictive effect
- laminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000694 effects Effects 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000463 material Substances 0.000 claims abstract description 27
- 238000010030 laminating Methods 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 10
- 230000001747 exhibiting effect Effects 0.000 claims description 4
- 238000003475 lamination Methods 0.000 claims description 3
- 238000005245 sintering Methods 0.000 abstract description 6
- 238000003754 machining Methods 0.000 abstract description 5
- 230000006866 deterioration Effects 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 3
- 239000005041 Mylar™ Substances 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000007606 doctor blade method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 229910003781 PbTiO3 Inorganic materials 0.000 description 2
- FKSZLDCMQZJMFN-UHFFFAOYSA-N [Mg].[Pb] Chemical compound [Mg].[Pb] FKSZLDCMQZJMFN-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61115606A JPS62271478A (ja) | 1986-05-19 | 1986-05-19 | 電歪効果素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61115606A JPS62271478A (ja) | 1986-05-19 | 1986-05-19 | 電歪効果素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62271478A true JPS62271478A (ja) | 1987-11-25 |
| JPH0519995B2 JPH0519995B2 (enrdf_load_stackoverflow) | 1993-03-18 |
Family
ID=14666797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61115606A Granted JPS62271478A (ja) | 1986-05-19 | 1986-05-19 | 電歪効果素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62271478A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008105382A1 (ja) | 2007-02-26 | 2008-09-04 | Denso Corporation | 積層型圧電素子 |
| DE102008000402A1 (de) | 2007-02-26 | 2008-09-18 | Denso Corp., Kariya | Verfahren zum Herstellen eines gestapelten piezoelektrischen Elements |
| DE112008000509T5 (de) | 2007-02-26 | 2010-01-07 | DENSO CORPORATION, Kariya-shi | Piezoelektrische Stapelvorrichtung |
| JP2011181958A (ja) * | 2011-05-23 | 2011-09-15 | Taiheiyo Cement Corp | 積層型圧電アクチュエータの製造方法 |
-
1986
- 1986-05-19 JP JP61115606A patent/JPS62271478A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008105382A1 (ja) | 2007-02-26 | 2008-09-04 | Denso Corporation | 積層型圧電素子 |
| DE102008000402A1 (de) | 2007-02-26 | 2008-09-18 | Denso Corp., Kariya | Verfahren zum Herstellen eines gestapelten piezoelektrischen Elements |
| DE112008000509T5 (de) | 2007-02-26 | 2010-01-07 | DENSO CORPORATION, Kariya-shi | Piezoelektrische Stapelvorrichtung |
| US8240582B2 (en) | 2007-02-26 | 2012-08-14 | Denso Corporation | Stacked piezoelectric device |
| JP2011181958A (ja) * | 2011-05-23 | 2011-09-15 | Taiheiyo Cement Corp | 積層型圧電アクチュエータの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519995B2 (enrdf_load_stackoverflow) | 1993-03-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |