JPS6227069A - 固体状単分子膜形成装置 - Google Patents
固体状単分子膜形成装置Info
- Publication number
- JPS6227069A JPS6227069A JP60166664A JP16666485A JPS6227069A JP S6227069 A JPS6227069 A JP S6227069A JP 60166664 A JP60166664 A JP 60166664A JP 16666485 A JP16666485 A JP 16666485A JP S6227069 A JPS6227069 A JP S6227069A
- Authority
- JP
- Japan
- Prior art keywords
- liq
- layer
- liquid
- monomolecular
- monomolecular film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60166664A JPS6227069A (ja) | 1985-07-30 | 1985-07-30 | 固体状単分子膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60166664A JPS6227069A (ja) | 1985-07-30 | 1985-07-30 | 固体状単分子膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6227069A true JPS6227069A (ja) | 1987-02-05 |
| JPH0576357B2 JPH0576357B2 (enExample) | 1993-10-22 |
Family
ID=15835442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60166664A Granted JPS6227069A (ja) | 1985-07-30 | 1985-07-30 | 固体状単分子膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6227069A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02111470A (ja) * | 1988-10-19 | 1990-04-24 | Nippon Steel Corp | 有機薄膜製造装置 |
| EP0678345A1 (en) * | 1994-04-22 | 1995-10-25 | Canon Kabushiki Kaisha | Apparatus for producing Langmuir-Blodgett film |
| JP2014524834A (ja) * | 2011-07-13 | 2014-09-25 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 移動している基板上に規則的な粒子の幅調節可能膜を堆積させるための施設及び方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193325A (ja) * | 1984-03-15 | 1985-10-01 | Canon Inc | 成膜装置 |
-
1985
- 1985-07-30 JP JP60166664A patent/JPS6227069A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193325A (ja) * | 1984-03-15 | 1985-10-01 | Canon Inc | 成膜装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02111470A (ja) * | 1988-10-19 | 1990-04-24 | Nippon Steel Corp | 有機薄膜製造装置 |
| EP0678345A1 (en) * | 1994-04-22 | 1995-10-25 | Canon Kabushiki Kaisha | Apparatus for producing Langmuir-Blodgett film |
| JP2014524834A (ja) * | 2011-07-13 | 2014-09-25 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 移動している基板上に規則的な粒子の幅調節可能膜を堆積させるための施設及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0576357B2 (enExample) | 1993-10-22 |
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