JPS62268140A - 半導体ウエハ−の搬送機構における搬送部材の支持装置 - Google Patents

半導体ウエハ−の搬送機構における搬送部材の支持装置

Info

Publication number
JPS62268140A
JPS62268140A JP61111873A JP11187386A JPS62268140A JP S62268140 A JPS62268140 A JP S62268140A JP 61111873 A JP61111873 A JP 61111873A JP 11187386 A JP11187386 A JP 11187386A JP S62268140 A JPS62268140 A JP S62268140A
Authority
JP
Japan
Prior art keywords
block
support
transport
conveyance path
conveyance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61111873A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0150102B2 (enExample
Inventor
Teruo Nagane
長根　照夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kishimoto Sangyo Co Ltd
Original Assignee
Kishimoto Sangyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kishimoto Sangyo Co Ltd filed Critical Kishimoto Sangyo Co Ltd
Priority to JP61111873A priority Critical patent/JPS62268140A/ja
Publication of JPS62268140A publication Critical patent/JPS62268140A/ja
Publication of JPH0150102B2 publication Critical patent/JPH0150102B2/ja
Granted legal-status Critical Current

Links

JP61111873A 1986-05-16 1986-05-16 半導体ウエハ−の搬送機構における搬送部材の支持装置 Granted JPS62268140A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61111873A JPS62268140A (ja) 1986-05-16 1986-05-16 半導体ウエハ−の搬送機構における搬送部材の支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61111873A JPS62268140A (ja) 1986-05-16 1986-05-16 半導体ウエハ−の搬送機構における搬送部材の支持装置

Publications (2)

Publication Number Publication Date
JPS62268140A true JPS62268140A (ja) 1987-11-20
JPH0150102B2 JPH0150102B2 (enExample) 1989-10-27

Family

ID=14572297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61111873A Granted JPS62268140A (ja) 1986-05-16 1986-05-16 半導体ウエハ−の搬送機構における搬送部材の支持装置

Country Status (1)

Country Link
JP (1) JPS62268140A (enExample)

Also Published As

Publication number Publication date
JPH0150102B2 (enExample) 1989-10-27

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