JPS6226731Y2 - - Google Patents
Info
- Publication number
- JPS6226731Y2 JPS6226731Y2 JP1981131483U JP13148381U JPS6226731Y2 JP S6226731 Y2 JPS6226731 Y2 JP S6226731Y2 JP 1981131483 U JP1981131483 U JP 1981131483U JP 13148381 U JP13148381 U JP 13148381U JP S6226731 Y2 JPS6226731 Y2 JP S6226731Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- mounting
- semiconductor wafer
- slider
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 description 24
- 235000012431 wafers Nutrition 0.000 description 24
- 238000007689 inspection Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 6
- 230000005856 abnormality Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13148381U JPS5836711U (ja) | 1981-09-03 | 1981-09-03 | 顕微鏡の載物台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13148381U JPS5836711U (ja) | 1981-09-03 | 1981-09-03 | 顕微鏡の載物台 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5836711U JPS5836711U (ja) | 1983-03-10 |
JPS6226731Y2 true JPS6226731Y2 (zh) | 1987-07-09 |
Family
ID=29925058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13148381U Granted JPS5836711U (ja) | 1981-09-03 | 1981-09-03 | 顕微鏡の載物台 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5836711U (zh) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5539021A (en) * | 1978-09-14 | 1980-03-18 | Hitachi Electronics Eng Co Ltd | Automatic plate tester |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS507055U (zh) * | 1973-05-18 | 1975-01-24 |
-
1981
- 1981-09-03 JP JP13148381U patent/JPS5836711U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5539021A (en) * | 1978-09-14 | 1980-03-18 | Hitachi Electronics Eng Co Ltd | Automatic plate tester |
Also Published As
Publication number | Publication date |
---|---|
JPS5836711U (ja) | 1983-03-10 |
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