JPS62264623A - マイクロ波プラズマ処理装置 - Google Patents

マイクロ波プラズマ処理装置

Info

Publication number
JPS62264623A
JPS62264623A JP10890386A JP10890386A JPS62264623A JP S62264623 A JPS62264623 A JP S62264623A JP 10890386 A JP10890386 A JP 10890386A JP 10890386 A JP10890386 A JP 10890386A JP S62264623 A JPS62264623 A JP S62264623A
Authority
JP
Japan
Prior art keywords
microwave
window
waveguide
transmission window
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10890386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053736B2 (enExample
Inventor
Shuzo Fujimura
藤村　修三
Yasunari Motoki
本木　保成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10890386A priority Critical patent/JPS62264623A/ja
Publication of JPS62264623A publication Critical patent/JPS62264623A/ja
Publication of JPH053736B2 publication Critical patent/JPH053736B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10890386A 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置 Granted JPS62264623A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10890386A JPS62264623A (ja) 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10890386A JPS62264623A (ja) 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62264623A true JPS62264623A (ja) 1987-11-17
JPH053736B2 JPH053736B2 (enExample) 1993-01-18

Family

ID=14496552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10890386A Granted JPS62264623A (ja) 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62264623A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006294422A (ja) * 2005-04-11 2006-10-26 Tokyo Electron Ltd プラズマ処理装置およびスロットアンテナおよびプラズマ処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177931A (ja) * 1983-03-28 1984-10-08 Fujitsu Ltd マイクロ波処理装置
JPS6025234A (ja) * 1983-07-21 1985-02-08 Fujitsu Ltd マイクロ波プラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177931A (ja) * 1983-03-28 1984-10-08 Fujitsu Ltd マイクロ波処理装置
JPS6025234A (ja) * 1983-07-21 1985-02-08 Fujitsu Ltd マイクロ波プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006294422A (ja) * 2005-04-11 2006-10-26 Tokyo Electron Ltd プラズマ処理装置およびスロットアンテナおよびプラズマ処理方法

Also Published As

Publication number Publication date
JPH053736B2 (enExample) 1993-01-18

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees