JPS62263404A - パタ−ン検査装置 - Google Patents

パタ−ン検査装置

Info

Publication number
JPS62263404A
JPS62263404A JP61107407A JP10740786A JPS62263404A JP S62263404 A JPS62263404 A JP S62263404A JP 61107407 A JP61107407 A JP 61107407A JP 10740786 A JP10740786 A JP 10740786A JP S62263404 A JPS62263404 A JP S62263404A
Authority
JP
Japan
Prior art keywords
pattern
length
data
circuit
dictionary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61107407A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426684B2 (OSRAM
Inventor
Satoshi Iwata
敏 岩田
Moritoshi Ando
護俊 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61107407A priority Critical patent/JPS62263404A/ja
Priority to DE87401052T priority patent/DE3786699T2/de
Priority to EP87401052A priority patent/EP0246145B1/en
Priority to US07/047,480 priority patent/US4830497A/en
Publication of JPS62263404A publication Critical patent/JPS62263404A/ja
Publication of JPH0426684B2 publication Critical patent/JPH0426684B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP61107407A 1986-05-10 1986-05-10 パタ−ン検査装置 Granted JPS62263404A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61107407A JPS62263404A (ja) 1986-05-10 1986-05-10 パタ−ン検査装置
DE87401052T DE3786699T2 (de) 1986-05-10 1987-05-07 System zur Untersuchung von Mustern.
EP87401052A EP0246145B1 (en) 1986-05-10 1987-05-07 Pattern inspection system
US07/047,480 US4830497A (en) 1986-05-10 1987-05-11 Pattern inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61107407A JPS62263404A (ja) 1986-05-10 1986-05-10 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS62263404A true JPS62263404A (ja) 1987-11-16
JPH0426684B2 JPH0426684B2 (OSRAM) 1992-05-08

Family

ID=14458364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61107407A Granted JPS62263404A (ja) 1986-05-10 1986-05-10 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS62263404A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04194604A (ja) * 1990-11-27 1992-07-14 Dainippon Screen Mfg Co Ltd プリント基板のライン幅検査方法
JPH04194605A (ja) * 1990-11-27 1992-07-14 Dainippon Screen Mfg Co Ltd プリント基板のライン幅検査方法
US5608816A (en) * 1993-12-24 1997-03-04 Matsushita Electric Industrial Co., Ltd. Apparatus for inspecting a wiring pattern according to a micro-inspection and a macro-inspection performed in parallel
CN106225719A (zh) * 2016-08-04 2016-12-14 西安交通大学 一种符号阵列结构光编码图案的生成方法及装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101328487B1 (ko) * 2011-12-27 2013-11-13 한국식품연구원 벼의 수확시기 예측 방법 및 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166857A (OSRAM) * 1974-10-17 1976-06-09 Westinghouse Electric Corp
JPS57143686A (en) * 1981-03-02 1982-09-04 Fuji Electric Co Ltd Recognizing device for plural patterns
JPS5845505A (ja) * 1981-09-12 1983-03-16 Anritsu Corp 形状判別装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166857A (OSRAM) * 1974-10-17 1976-06-09 Westinghouse Electric Corp
JPS57143686A (en) * 1981-03-02 1982-09-04 Fuji Electric Co Ltd Recognizing device for plural patterns
JPS5845505A (ja) * 1981-09-12 1983-03-16 Anritsu Corp 形状判別装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04194604A (ja) * 1990-11-27 1992-07-14 Dainippon Screen Mfg Co Ltd プリント基板のライン幅検査方法
JPH04194605A (ja) * 1990-11-27 1992-07-14 Dainippon Screen Mfg Co Ltd プリント基板のライン幅検査方法
US5608816A (en) * 1993-12-24 1997-03-04 Matsushita Electric Industrial Co., Ltd. Apparatus for inspecting a wiring pattern according to a micro-inspection and a macro-inspection performed in parallel
CN106225719A (zh) * 2016-08-04 2016-12-14 西安交通大学 一种符号阵列结构光编码图案的生成方法及装置

Also Published As

Publication number Publication date
JPH0426684B2 (OSRAM) 1992-05-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees