JPS62260143A - Image forming material - Google Patents
Image forming materialInfo
- Publication number
- JPS62260143A JPS62260143A JP10263186A JP10263186A JPS62260143A JP S62260143 A JPS62260143 A JP S62260143A JP 10263186 A JP10263186 A JP 10263186A JP 10263186 A JP10263186 A JP 10263186A JP S62260143 A JPS62260143 A JP S62260143A
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- photopolymerizable composition
- composition layer
- film
- meth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 35
- 229920000642 polymer Polymers 0.000 claims abstract description 55
- 239000000203 mixture Substances 0.000 claims abstract description 50
- 150000001875 compounds Chemical class 0.000 claims abstract description 25
- 239000007864 aqueous solution Substances 0.000 claims abstract description 21
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 10
- 239000003999 initiator Substances 0.000 claims abstract description 8
- -1 polyethylene terephthalate Polymers 0.000 claims description 27
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 10
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 10
- 125000004432 carbon atom Chemical group C* 0.000 claims description 8
- 229910052736 halogen Inorganic materials 0.000 claims description 8
- 150000002367 halogens Chemical class 0.000 claims description 8
- 229920002845 Poly(methacrylic acid) Polymers 0.000 claims description 6
- 125000005907 alkyl ester group Chemical group 0.000 claims description 6
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 claims description 4
- 239000010410 layer Substances 0.000 abstract description 52
- 229910052751 metal Inorganic materials 0.000 abstract description 21
- 239000002184 metal Substances 0.000 abstract description 21
- 239000002344 surface layer Substances 0.000 abstract description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 abstract description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 abstract description 4
- 239000003513 alkali Substances 0.000 abstract description 3
- 230000008859 change Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 239000002585 base Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 description 46
- 206010040844 Skin exfoliation Diseases 0.000 description 14
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 238000003475 lamination Methods 0.000 description 5
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 229920001519 homopolymer Polymers 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 4
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 4
- 229920000193 polymethacrylate Polymers 0.000 description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 4
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical class C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000011976 maleic acid Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 150000002978 peroxides Chemical class 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 150000003440 styrenes Chemical class 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- ARXVXVOLXMVYIT-UHFFFAOYSA-N 3-methylbutyl 2-(dimethylamino)benzoate Chemical compound CC(C)CCOC(=O)C1=CC=CC=C1N(C)C ARXVXVOLXMVYIT-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- GUUVPOWQJOLRAS-UHFFFAOYSA-N Diphenyl disulfide Chemical compound C=1C=CC=CC=1SSC1=CC=CC=C1 GUUVPOWQJOLRAS-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- AUNGANRZJHBGPY-SCRDCRAPSA-N Riboflavin Chemical compound OC[C@@H](O)[C@@H](O)[C@@H](O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-SCRDCRAPSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 150000003926 acrylamides Chemical class 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001728 carbonyl compounds Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 150000008049 diazo compounds Chemical class 0.000 description 2
- GVPWHKZIJBODOX-UHFFFAOYSA-N dibenzyl disulfide Chemical compound C=1C=CC=CC=1CSSCC1=CC=CC=C1 GVPWHKZIJBODOX-UHFFFAOYSA-N 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical class CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 2
- 229920002601 oligoester Polymers 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 2
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 2
- 230000005180 public health Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- 230000002522 swelling effect Effects 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 2
- 229920001567 vinyl ester resin Polymers 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 1
- JOIRQYHDJINFGA-UHFFFAOYSA-N (7-aminophenothiazin-3-ylidene)azanium;acetate Chemical compound CC([O-])=O.C1=CC(=[NH2+])C=C2SC3=CC(N)=CC=C3N=C21 JOIRQYHDJINFGA-UHFFFAOYSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- AROCLDYPZXMJPW-UHFFFAOYSA-N 1-(octyldisulfanyl)octane Chemical compound CCCCCCCCSSCCCCCCCC AROCLDYPZXMJPW-UHFFFAOYSA-N 0.000 description 1
- NSOAQRMLVFRWIT-UHFFFAOYSA-N 1-ethenoxydecane Chemical compound CCCCCCCCCCOC=C NSOAQRMLVFRWIT-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- XXCVIFJHBFNFBO-UHFFFAOYSA-N 1-ethenoxyoctane Chemical compound CCCCCCCCOC=C XXCVIFJHBFNFBO-UHFFFAOYSA-N 0.000 description 1
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2,2'-azo-bis-isobutyronitrile Substances N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- RCSBILYQLVXLJG-UHFFFAOYSA-N 2-Propenyl hexanoate Chemical compound CCCCCC(=O)OCC=C RCSBILYQLVXLJG-UHFFFAOYSA-N 0.000 description 1
- PZGMUSDNQDCNAG-UHFFFAOYSA-N 2-Propenyl octanoate Chemical compound CCCCCCCC(=O)OCC=C PZGMUSDNQDCNAG-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 1
- WFUGQJXVXHBTEM-UHFFFAOYSA-N 2-hydroperoxy-2-(2-hydroperoxybutan-2-ylperoxy)butane Chemical compound CCC(C)(OO)OOC(C)(CC)OO WFUGQJXVXHBTEM-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- POYODSZSSBWJPD-UHFFFAOYSA-N 2-methylprop-2-enoyloxy 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOOC(=O)C(C)=C POYODSZSSBWJPD-UHFFFAOYSA-N 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- HZGJTATYGAJRAL-UHFFFAOYSA-N 3,4,4a,5,6,7,8,8a-octahydro-2h-naphthalene-1,1-diol Chemical compound C1CCCC2C(O)(O)CCCC21 HZGJTATYGAJRAL-UHFFFAOYSA-N 0.000 description 1
- DSSAWHFZNWVJEC-UHFFFAOYSA-N 3-(ethenoxymethyl)heptane Chemical compound CCCCC(CC)COC=C DSSAWHFZNWVJEC-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- IICCLYANAQEHCI-UHFFFAOYSA-N 4,5,6,7-tetrachloro-3',6'-dihydroxy-2',4',5',7'-tetraiodospiro[2-benzofuran-3,9'-xanthene]-1-one Chemical compound O1C(=O)C(C(=C(Cl)C(Cl)=C2Cl)Cl)=C2C21C1=CC(I)=C(O)C(I)=C1OC1=C(I)C(O)=C(I)C=C21 IICCLYANAQEHCI-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- YYROPELSRYBVMQ-UHFFFAOYSA-N 4-toluenesulfonyl chloride Chemical compound CC1=CC=C(S(Cl)(=O)=O)C=C1 YYROPELSRYBVMQ-UHFFFAOYSA-N 0.000 description 1
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004709 Chlorinated polyethylene Substances 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- AUNGANRZJHBGPY-UHFFFAOYSA-N D-Lyxoflavin Natural products OCC(O)C(O)C(O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-UHFFFAOYSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical group CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 1
- CUDSBWGCGSUXDB-UHFFFAOYSA-N Dibutyl disulfide Chemical compound CCCCSSCCCC CUDSBWGCGSUXDB-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- ZFDIRQKJPRINOQ-HWKANZROSA-N Ethyl crotonate Chemical compound CCOC(=O)\C=C\C ZFDIRQKJPRINOQ-HWKANZROSA-N 0.000 description 1
- MZNHUHNWGVUEAT-XBXARRHUSA-N Hexyl crotonate Chemical compound CCCCCCOC(=O)\C=C\C MZNHUHNWGVUEAT-XBXARRHUSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 108010076830 Thionins Proteins 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- PEJLNXHANOHNSU-UHFFFAOYSA-N acridine-3,6-diamine;10-methylacridin-10-ium-3,6-diamine;chloride Chemical compound [Cl-].C1=CC(N)=CC2=NC3=CC(N)=CC=C3C=C21.C1=C(N)C=C2[N+](C)=C(C=C(N)C=C3)C3=CC2=C1 PEJLNXHANOHNSU-UHFFFAOYSA-N 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000005250 alkyl acrylate group Chemical group 0.000 description 1
- 229940072049 amyl acetate Drugs 0.000 description 1
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- MWZGUEWUOKSFNL-UHFFFAOYSA-N benzoic acid;styrene Chemical compound C=CC1=CC=CC=C1.OC(=O)C1=CC=CC=C1 MWZGUEWUOKSFNL-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- SODJJEXAWOSSON-UHFFFAOYSA-N bis(2-hydroxy-4-methoxyphenyl)methanone Chemical group OC1=CC(OC)=CC=C1C(=O)C1=CC=C(OC)C=C1O SODJJEXAWOSSON-UHFFFAOYSA-N 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- 229940105990 diglycerin Drugs 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- YQGOJNYOYNNSMM-UHFFFAOYSA-N eosin Chemical compound [Na+].OC(=O)C1=CC=CC=C1C1=C2C=C(Br)C(=O)C(Br)=C2OC2=C(Br)C(O)=C(Br)C=C21 YQGOJNYOYNNSMM-UHFFFAOYSA-N 0.000 description 1
- IINNWAYUJNWZRM-UHFFFAOYSA-L erythrosin B Chemical compound [Na+].[Na+].[O-]C(=O)C1=CC=CC=C1C1=C2C=C(I)C(=O)C(I)=C2OC2=C(I)C([O-])=C(I)C=C21 IINNWAYUJNWZRM-UHFFFAOYSA-L 0.000 description 1
- YCUBDDIKWLELPD-UHFFFAOYSA-N ethenyl 2,2-dimethylpropanoate Chemical compound CC(C)(C)C(=O)OC=C YCUBDDIKWLELPD-UHFFFAOYSA-N 0.000 description 1
- WNMORWGTPVWAIB-UHFFFAOYSA-N ethenyl 2-methylpropanoate Chemical compound CC(C)C(=O)OC=C WNMORWGTPVWAIB-UHFFFAOYSA-N 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- LZWYWAIOTBEZFN-UHFFFAOYSA-N ethenyl hexanoate Chemical compound CCCCCC(=O)OC=C LZWYWAIOTBEZFN-UHFFFAOYSA-N 0.000 description 1
- BLZSRIYYOIZLJL-UHFFFAOYSA-N ethenyl pentanoate Chemical compound CCCCC(=O)OC=C BLZSRIYYOIZLJL-UHFFFAOYSA-N 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- MHCLJIVVJQQNKQ-UHFFFAOYSA-N ethyl carbamate;2-methylprop-2-enoic acid Chemical compound CCOC(N)=O.CC(=C)C(O)=O MHCLJIVVJQQNKQ-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- MCVVUJPXSBQTRZ-ONEGZZNKSA-N methyl (e)-but-2-enoate Chemical compound COC(=O)\C=C\C MCVVUJPXSBQTRZ-ONEGZZNKSA-N 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- REOJLIXKJWXUGB-UHFFFAOYSA-N mofebutazone Chemical group O=C1C(CCCC)C(=O)NN1C1=CC=CC=C1 REOJLIXKJWXUGB-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229940065472 octyl acrylate Drugs 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
- 150000002898 organic sulfur compounds Chemical class 0.000 description 1
- HVAMZGADVCBITI-UHFFFAOYSA-M pent-4-enoate Chemical compound [O-]C(=O)CCC=C HVAMZGADVCBITI-UHFFFAOYSA-M 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- ULDDEWDFUNBUCM-UHFFFAOYSA-N pentyl prop-2-enoate Chemical compound CCCCCOC(=O)C=C ULDDEWDFUNBUCM-UHFFFAOYSA-N 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- ZQMAPKVSTSACQB-UHFFFAOYSA-N prop-2-enyl dodecanoate Chemical compound CCCCCCCCCCCC(=O)OCC=C ZQMAPKVSTSACQB-UHFFFAOYSA-N 0.000 description 1
- HAFZJTKIBGEQKT-UHFFFAOYSA-N prop-2-enyl hexadecanoate Chemical compound CCCCCCCCCCCCCCCC(=O)OCC=C HAFZJTKIBGEQKT-UHFFFAOYSA-N 0.000 description 1
- AABBHSMFGKYLKE-SNAWJCMRSA-N propan-2-yl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC(C)C AABBHSMFGKYLKE-SNAWJCMRSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- 229960002477 riboflavin Drugs 0.000 description 1
- 235000019192 riboflavin Nutrition 0.000 description 1
- 239000002151 riboflavin Substances 0.000 description 1
- 229930187593 rose bengal Natural products 0.000 description 1
- 229940081623 rose bengal Drugs 0.000 description 1
- STRXNPAVPKGJQR-UHFFFAOYSA-N rose bengal A Natural products O1C(=O)C(C(=CC=C2Cl)Cl)=C2C21C1=CC(I)=C(O)C(I)=C1OC1=C(I)C(O)=C(I)C=C21 STRXNPAVPKGJQR-UHFFFAOYSA-N 0.000 description 1
- KTOYYOQOGAZUHV-UHFFFAOYSA-N s-acetylsulfanyl ethanethioate Chemical compound CC(=O)SSC(C)=O KTOYYOQOGAZUHV-UHFFFAOYSA-N 0.000 description 1
- YYWLHHUMIIIZDH-UHFFFAOYSA-N s-benzoylsulfanyl benzenecarbothioate Chemical compound C=1C=CC=CC=1C(=O)SSC(=O)C1=CC=CC=C1 YYWLHHUMIIIZDH-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- ZFDIRQKJPRINOQ-UHFFFAOYSA-N transbutenic acid ethyl ester Natural products CCOC(=O)C=CC ZFDIRQKJPRINOQ-UHFFFAOYSA-N 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はプリント配線板などの作製の用に供される画
像形成材料に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an image forming material used for manufacturing printed wiring boards and the like.
従来、透明支持体上に光重合性組成物層を設け、回路を
形成すべき金属基板上に光重合性組成物層が当接面とな
るように積層し、パターン状の露光を行ったのちに透明
支持体を剥離することにより、光重合性組成物層の非露
光部分を上記支持体と一緒に剥離するとともに、露光部
分を基板上に残存させて所定のレジストパターンを形成
する、いわゆるドライフィルムレジストからなる画像形
成材料が種々提案されている。Conventionally, a photopolymerizable composition layer is provided on a transparent support, and the photopolymerizable composition layer is laminated on a metal substrate on which a circuit is to be formed so that it becomes the contact surface, and then patterned exposure is performed. By peeling off the transparent support, the unexposed portion of the photopolymerizable composition layer is peeled off together with the support, and the exposed portion remains on the substrate to form a predetermined resist pattern. Various image forming materials made of film resists have been proposed.
このような画像形成材料を用いたプリント回路の形成に
おいて、上記材料を金属基板上に光重合性組成物層が当
接面となるように積層してからパターン状の露光を行う
までの放置時間は必ずしも一定ではない。そして、この
放置時間が長くなると、上記組成物層が金属基板と当接
しているために、この層と活性な金属表面との間になん
らかの相互作用が生じて、上記層の判御1性に支障をき
たすことがある。In forming a printed circuit using such an image-forming material, the standing time from when the material is laminated on a metal substrate with the photopolymerizable composition layer as the contact surface until patterned exposure is performed. is not necessarily constant. If this standing time becomes longer, since the composition layer is in contact with the metal substrate, some kind of interaction will occur between this layer and the active metal surface, which will affect the visibility of the layer. This may cause problems.
特に、上記層の構成成分のひとつである皮膜形成性ポリ
マーとしてアルカリ水溶液に対して水溶性ないし膨潤性
の性質を付与するための極性基を含むポリマーを用いた
ものでは、この種の層が金属表面と上記極性基との相互
作用に伴う二次架橋の影響を受は易いために、この層を
金属基板上に当接させて積層した直後は鮮明なレジスト
パターンが得られるが、積層後パターン状の露光を行う
までの放置時間が長くなる程、金属基板表面と光重合性
組成物層との接着力が重くなり、所望の画像が得られな
くなるという問題があった。In particular, in the case where a film-forming polymer, which is one of the constituent components of the above layer, uses a polymer containing a polar group to impart water solubility or swelling properties to an alkaline aqueous solution, this type of layer may be made of metal. Because this layer is easily affected by secondary crosslinking due to the interaction between the surface and the above polar groups, a clear resist pattern can be obtained immediately after laminating this layer in contact with a metal substrate, but the pattern after lamination is There has been a problem that the longer the exposure time is, the stronger the adhesive force between the metal substrate surface and the photopolymerizable composition layer becomes, making it impossible to obtain a desired image.
したがって、この発明は、金属基板上に光重合性組成物
層が当接面となるように積層してがらパターン状の露光
を行うまでの放置時間になんら左右されることなく、上
記露光後剥離現像することによって上記基板上に鮮明な
レジストパターンを安定して形成することができる、ま
たこれとともに上記レジストを除去するに際して有機溶
媒に比し公衆衛生上の問題やコストアップの問題の少な
いアルカリ水溶液を適用することができる画像形成材料
を提供することを目的としている。Therefore, the present invention is capable of peeling off the photopolymerizable composition layer after exposure without being influenced by the length of time the photopolymerizable composition layer is left on the metal substrate to form a contact surface and then exposing the photopolymerizable composition layer to patterned light. An alkaline aqueous solution that can stably form a clear resist pattern on the substrate by developing it, and also causes fewer public health problems and increased costs than organic solvents when removing the resist. The purpose of the present invention is to provide an imaging material that can be applied.
この発明者らは、上記目的を達成するために鋭意検討し
た結果、透明支持体と光重合性組成物層とから本質的に
なる画像形成材料の上記支持体をポリエチレンテレフタ
レートフィルムで構成する一方、上記の光重合性組成物
層をその構成成分の一つである皮膜形成性ポリマーがア
ルカリ水溶液に可溶性ないし膨潤性のポリマー、ポリ
(メタ)アクリル酸メチル、含ハロゲンポリマーおよび
これらポリマーと非相溶性のアルキル基の炭素数が2〜
8個のポリ (メタ)アクリル酸アルキルエステルを必
須成分として含むような構成としたときには、この材料
を金属基板の表面にその光重合性組成物層が当接面とな
るように積層してからパターン状の露光を行うまでの放
置時間にはほとんど左右されることなく、常に安定した
良好な剥離現像性が得られ、しかも剥離現像によって基
板上に形成されたレジストパターンの最終的な除去をア
ルカリ水溶液により簡単に行うことのできる画像形成材
料が得られることを知り、この発明を完成するに至った
。As a result of intensive studies to achieve the above object, the inventors have determined that the support of an image forming material consisting essentially of a transparent support and a photopolymerizable composition layer is composed of a polyethylene terephthalate film; The above photopolymerizable composition layer is made of a film-forming polymer that is one of the constituent components of the photopolymerizable composition layer, which is a polymer that is soluble or swellable in an alkaline aqueous solution.
Methyl (meth)acrylate, halogen-containing polymers, and alkyl groups incompatible with these polymers have 2 or more carbon atoms.
When a structure containing eight poly(meth)acrylic acid alkyl esters is used as an essential component, this material is laminated on the surface of a metal substrate so that the photopolymerizable composition layer becomes the contact surface. Stable and good peeling development is always obtained, almost unaffected by the standing time before patterned exposure, and the final removal of the resist pattern formed on the substrate by peeling development is possible with alkali. It was discovered that an image forming material that can be easily formed using an aqueous solution was obtained, and this invention was completed.
すなわち、この発明は、透明支持体上に皮膜形成性ポリ
マー、光重合性不飽和化合物および光重合開始剤を含有
する光重合性組成物層を設けてなるII &1を現像型
ドライフィルムレジストからなる画像形成材料において
、上記透明支持体がポリエチレンテレフタレートフィル
ムで構成され、かつ上記の皮膜形成性ポリマーが、a)
アルカリ水溶液に可溶性ないし膨潤性のポリマーと、b
)ポリ(メタ)アクリル酸メチルと、C)含ハロゲンポ
リマーと、d)上記a−c成分のポリマーと非相溶性で
あるアルキル基の炭素数が2〜8個のポリ(メタ)アク
リル酸アルキルエステルとを必須成分として含むことを
特徴とする画像形成材料に係るものである。That is, the present invention provides II & 1, which is a developable dry film resist, in which a photopolymerizable composition layer containing a film-forming polymer, a photopolymerizable unsaturated compound, and a photopolymerization initiator is provided on a transparent support. In the imaging material, the transparent support comprises a polyethylene terephthalate film, and the film-forming polymer comprises a)
a polymer soluble or swellable in an alkaline aqueous solution; b
) methyl poly(meth)acrylate, C) a halogen-containing polymer, and d) an alkyl poly(meth)acrylate whose alkyl group has 2 to 8 carbon atoms and is incompatible with the polymer of components a to c above. The present invention relates to an image forming material characterized by containing an ester as an essential component.
この発明の画像形成材料における光重合性組成物層は、
皮膜形成性ポリマー、光重合性不飽和化合物および光重
合開始剤を含み、上記の皮膜形成性ポリマーが、a)ア
ルカリ水溶液に可溶性ないし膨潤性のポリマーと、b)
ポリ (メタ)アクリル酸メチルと、C)含ハロゲンポ
リマーと、さらにd)アルキル基の炭素数が2〜8個の
ポリ (メタ)アクリル酸アルキルエステルとを必須成
分として含有するものであることを特徴としている。The photopolymerizable composition layer in the image forming material of this invention is
The film-forming polymer contains a film-forming polymer, a photopolymerizable unsaturated compound, and a photopolymerization initiator;
Contains as essential components poly(meth)methyl acrylate, C) halogen-containing polymer, and d) poly(meth)acrylic acid alkyl ester having an alkyl group of 2 to 8 carbon atoms. It is a feature.
すなわち、この発明における光重合性組成物層は、皮膜
形成性ポリマーの一成分として、d成分つまりこれ以外
の必須成分である前記a ”−c成分に対して非相溶性
であるアルキル基の炭素数が2〜8個のポリ (メタ)
アクリル酸アルキルエステルを含むことから、この層を
ポリエチレンテレフタレートフィルムから構成される透
明支持体上に形成したとき、その層表面つまり透明支持
体に接触する面とは反対側の表面に上記d成分単独から
なる薄膜状の表面層が形成され、この表面層が回路形成
に際して金属基板の表面と接触することになる。That is, the photopolymerizable composition layer of the present invention contains, as one component of the film-forming polymer, a carbon alkyl group that is incompatible with the d component, that is, the a''-c components that are essential components other than the d component. Poly (meta) with numbers 2 to 8
Since it contains an acrylic acid alkyl ester, when this layer is formed on a transparent support made of a polyethylene terephthalate film, the above-mentioned component d alone is added to the surface of the layer, that is, the surface opposite to the surface that contacts the transparent support. A thin film-like surface layer is formed, and this surface layer comes into contact with the surface of the metal substrate during circuit formation.
ここで、上記表面層は金属基板との相互作用性の低いd
成分ポリマーからなるため、上記接触状態を長時間保持
しても、光重合性組成物層と透明支持体との間の接着力
にはなんら変化をきたすことはない。しかも、上記の表
面層は、他の皮膜形成性ポリマー、特に分子内にカルボ
キシル基の如き極性基を有するa成分ポリマーと金属基
板とが接触するのを防止するバリヤ一層としても働くた
め、これが上記接着力の維持に好結果をもたらすことに
なる。Here, the surface layer has low interaction with the metal substrate.
Since the photopolymerizable composition layer is made of a component polymer, even if the above-mentioned contact state is maintained for a long time, the adhesive force between the photopolymerizable composition layer and the transparent support does not change at all. Moreover, the above-mentioned surface layer also acts as a barrier layer to prevent the metal substrate from coming into contact with other film-forming polymers, especially the a-component polymer having a polar group such as a carboxyl group in the molecule. This results in good results in maintaining adhesive strength.
このように、この発明においては、皮膜形成性ポリマー
として、剥離現像性や皮膜強度などに好結果を得るため
の前記a ”’−C成分のポリマーとともに、これらと
非相溶性であるd成分としての特定のポリ (メタ)ア
クリル酸アルキルエステルを用いたことにより、金属基
板表面との相互作用に伴う光重合性組成物層と金属基板
表面の接着力の変化を防ぐことができ、プリント回路基
板作製上の作業裕度が広(なって、常に所望の画像忠実
性を得ることができる。しかも、前記a成分としてのア
ルカリ水溶液に可溶性ないし膨潤性のポリマーの使用に
より、パターン状レジストの除去にあたってアルカリ水
溶液を適用できるという利点があり、そのうえ本来の剥
離現像性にすぐれるという特徴をも備えている。As described above, in the present invention, in addition to the above-mentioned a''-C component polymer used as a film-forming polymer to obtain good results in terms of peel developability and film strength, the d component which is incompatible with these components is used as a film-forming polymer. By using a specific poly(meth)acrylic acid alkyl ester, it is possible to prevent changes in the adhesive strength between the photopolymerizable composition layer and the metal substrate surface due to interaction with the metal substrate surface, and to improve printed circuit boards. The manufacturing latitude is wide (so that the desired image fidelity can always be obtained. Furthermore, by using a polymer that is soluble or swellable in an alkaline aqueous solution as the component a, it is easy to remove the patterned resist. It has the advantage of being able to apply an alkaline aqueous solution, and also has the characteristic of having excellent original peeling and developing properties.
この発明に用いるa成分としてのアルカリ水溶液に可溶
性ないし膨潤性のポリマーは、露光硬化後の光重合性組
成物層にアルカリ水溶液に可溶性ないし膨潤性の性質を
付与するための成分として有効に寄与するものであり、
その平均分子量が通常1,000以上、好適には10,
000〜300,000程度のものが用いられる。The alkali aqueous solution-soluble or swellable polymer used as component a in this invention effectively contributes as a component for imparting alkaline aqueous solution-soluble or swellable properties to the photopolymerizable composition layer after exposure and curing. It is a thing,
Its average molecular weight is usually 1,000 or more, preferably 10,
000 to about 300,000 is used.
このようなアルカリ水溶液に可溶性ないし膨潤性のポリ
マーとしては、アクリル酸もしくはメタクリル酸の単独
重合体、またはこれら不飽和中、量体とアクリル酸アル
キルエステル、メタクリル酸アルキルエステル、アクリ
ルアミド、アクリロニトリル、スチレンなどの他の単量
体との共重合体、あるいは無水マレイン酸、マレイン酸
、マレイン酸半エステルなどとスチレン、アクリル酸ア
ルキルエステル、メタクリル酸アルキルエステル、ブタ
ジェンなどの他の単量体との共重合体などがある。Such polymers that are soluble or swellable in alkaline aqueous solutions include homopolymers of acrylic acid or methacrylic acid, or monopolymers of these unsaturated polymers and alkyl acrylates, alkyl methacrylates, acrylamide, acrylonitrile, styrene, etc. copolymers with other monomers, or copolymers of maleic anhydride, maleic acid, maleic acid half esters, etc. with other monomers such as styrene, acrylic acid alkyl esters, methacrylic acid alkyl esters, butadiene, etc. There is such a thing as merging.
b成分としてのポリ (メタ)アクリル酸メチルは、皮
膜形成性ポリマーと光重合性不飽和化合物との相互溶解
性を高めて、上記不飽和化合物の光重合性組成物層内で
の相分離を防ぐことにより、剥離現像性に好結果をもた
らす成分として寄与するほか、露光硬化後の光重合性組
成物層、つまりはレジストパターンの機械的強度を高め
、エツチング液やメッキ液に対する抵抗力を大きくする
成分としても寄与する。このb成分の平均分子量として
は、通常10.000以上、好適には100,000〜
300,000程度であるのがよい。Methyl poly(meth)acrylate as component b increases the mutual solubility of the film-forming polymer and the photopolymerizable unsaturated compound, and prevents phase separation of the unsaturated compound within the photopolymerizable composition layer. By preventing this, it not only contributes as a component that brings good results to peeling and developability, but also increases the mechanical strength of the photopolymerizable composition layer, that is, the resist pattern, after exposure and curing, and greatly increases the resistance to etching solutions and plating solutions. It also contributes as a component. The average molecular weight of component b is usually 10.000 or more, preferably 100,000 to 100,000.
It is preferable that it be about 300,000.
C成分としての含ハロゲンポリマーは、透明支持体であ
るポリエチレンテレフタレートフィルムと光重合性組成
物層との接着力を高め、光重合性組成物層の非露光部分
を透明支持体とともに金属基板表面からパターン状に剥
離するのに効果があり、鮮明なパターン形成に有効であ
る。その例としては、ポリ塩化ビニル、ポリクロロプレ
ン、ポリクロロブタジェンなどのほか、塩素化ポリオレ
フィン、たとえば塩素化ポリエチレン、塩素化ポリプロ
ピレンおよび塩素化ポリイソプレンなどがある。The halogen-containing polymer as component C increases the adhesive strength between the polyethylene terephthalate film, which is a transparent support, and the photopolymerizable composition layer, and removes the unexposed portion of the photopolymerizable composition layer from the surface of the metal substrate together with the transparent support. It is effective in peeling off in a pattern and is effective in forming a clear pattern. Examples include polyvinyl chloride, polychloroprene, polychlorobutadiene, etc., as well as chlorinated polyolefins such as chlorinated polyethylene, chlorinated polypropylene, and chlorinated polyisoprene.
d成分としてのポリ (メタ)アクリル酸アルキルエス
テルは、既述したとおり、上記のa ”−C成分、特に
b成分と非相溶性であることから、光重合性組成物層が
当接面となるように金属基板に積層してからパターン露
光を行うまでの放置時間の影響をうけず、安定して鮮明
な画像を得るのに有効な成分として寄与するものである
。このポリマーの平均分子量は通常1. o o o以
上、好適にはio、 o o o〜30,000程度の
ものが用いられる。As mentioned above, the poly(meth)acrylic acid alkyl ester as the d component is incompatible with the above a''-C component, especially the b component, so that the photopolymerizable composition layer is not compatible with the contact surface. This polymer contributes as an effective component to obtain stable and clear images without being affected by the standing time from when it is laminated to a metal substrate until pattern exposure is performed.The average molecular weight of this polymer is Usually 1.ooo or more, preferably io,ooo to about 30,000 is used.
上記d成分としてのポリマーは、アルキル基の炭素数が
2〜8個のアクリル酸アルキルエステルの単独重合体で
あっても、アルキル基の炭素数が2〜8個のメタクリル
酸アルキルエステルの単独重合体であってもよく、また
両モノ゛マーの共重合体であってもよい。特に、好適に
は前二者の単独重合体が用いられる。その代表的な例と
しては、ポリメタクリル酸n−ブチル、ポリメタクリル
酸n−プロピル、ポリアクリル酸n−ブチル、ポリアク
リル酸n−プロピルなどが挙げられる。Even if the polymer as the above d component is a homopolymer of an alkyl acrylate ester having an alkyl group having 2 to 8 carbon atoms, the polymer may be a homopolymer of an alkyl methacrylate ester having an alkyl group having 2 to 8 carbon atoms. It may be a combination or a copolymer of both monomers. In particular, homopolymers of the former two are preferably used. Typical examples thereof include poly n-butyl methacrylate, poly n-propyl methacrylate, poly n-butyl acrylate, and poly n-propyl acrylate.
皮膜形成性ポリマーを構成するこれら各ポリマーの使用
割合としては、C成分としてのアルカリ水溶液に可溶性
ないし膨潤性のポリマーが20〜80重量%、好適には
30〜60重量%、b成分としてのポリ (メタ)アク
リル酸メチルが20〜80重■%、好適には30〜60
重量%、C成分としての含ハロゲンポリマーが10〜5
0重量%、好適には15〜30重量%、またd成分とし
てのアルキル基の炭素数が2〜8個のポリ (メタ)ア
クリル酸アルキルエステルが0.5〜5重量%、好適に
は1〜3重量%となるようにするのがよい。The ratio of each of these polymers constituting the film-forming polymer is 20 to 80% by weight, preferably 30 to 60% by weight of a polymer soluble or swellable in an alkaline aqueous solution as component C, and preferably 30 to 60% by weight of polymer as component B. Methyl (meth)acrylate is 20 to 80% by weight, preferably 30 to 60%
Weight%, halogen-containing polymer as component C is 10 to 5
0% by weight, preferably 15 to 30% by weight, and 0.5 to 5% by weight, preferably 1% by weight of a poly(meth)acrylic acid alkyl ester whose alkyl group has 2 to 8 carbon atoms as component d. It is preferable to adjust the amount to 3% by weight.
上記に示すような使用割合とすることにより、画像忠実
性、剥離現像性、アルカリ水溶液によるレジストの除去
性に共に好結果を得ることができる。特に、d成分の使
用割合はその他の成分に比し少量とするのがよく、この
d成分が多くなりすぎると光重合性組成物層と金属基板
表面との露光部における密着性が弱くなり、露光部パタ
ーンの剥がれを生じるおそれがあるため、好ましくない
。By using the proportions shown above, good results can be obtained in terms of image fidelity, peeling and developing properties, and resist removability with an alkaline aqueous solution. In particular, it is best to use a small amount of the d component compared to other components; if the d component is too large, the adhesion between the photopolymerizable composition layer and the metal substrate surface in the exposed area will be weakened. This is not preferable because it may cause peeling of the exposed pattern.
なお、皮膜形成性ポリマーとしては、上述のa。In addition, as the film-forming polymer, the above-mentioned a.
b、c、d成分を必須成分とするほか、必要に応じてこ
の発明の特徴を損なわない範囲内で他のポリマーを併用
したものであっても差し支えない。In addition to components b, c, and d as essential components, other polymers may be used in combination as necessary within a range that does not impair the characteristics of the present invention.
この発明において光重合性組成物層を構成する成分のひ
とつである光重合性不飽和化合物としては、エチレン性
不飽和結合を分子内に1個有するモノエチレン性不飽和
化合物と2個以上有するポリエチレン性不飽和化合物と
が含まれる。特に好ましくはポリエチレン性不飽和化合
物を単独でまたはモノエチレン性不飽和化合物との混合
系で用いるのがよい。In this invention, the photopolymerizable unsaturated compound, which is one of the components constituting the photopolymerizable composition layer, includes monoethylenically unsaturated compounds having one ethylenically unsaturated bond in the molecule and polyethylene having two or more ethylenically unsaturated bonds. and sexually unsaturated compounds. Particularly preferably, a polyethylenically unsaturated compound is used alone or in a mixed system with a monoethylenically unsaturated compound.
モノエチレン性不飽和化合物の例としては、アクリル酸
またはそのエステル類、メタクリル酸またはそのエステ
ル類、アクリルアミド類、メタクリルアミド類、アリル
化合物、ビニルエーテル類、ビニルエステル[、N−ビ
ニル化合物、スチレン類、クロトン酸エステル類などが
ある。Examples of monoethylenically unsaturated compounds include acrylic acid or its esters, methacrylic acid or its esters, acrylamides, methacrylamides, allyl compounds, vinyl ethers, vinyl esters, N-vinyl compounds, styrenes, These include crotonic acid esters.
その具体例としては、アクリル酸エステル類ではアクリ
ル酸プロピル、アクリル酸ブチル、アクリル酸アミル、
アクリル酸2−エチルヘキシル、アクリル酸オクチルな
どが、メタクリル酸エステル類ではメタクリル酸メチル
、メタクリル酸エチル、メタクリル酸プロピル、メタク
リル酸イソプロピルなどが、アクリルアミド類ではアク
リルアミドや、N−アルキル基がメチル基、エチル基、
ブチル基、イソプロピル基、tert−ブチル基、2−
エチルヘキシル基などからなるN−アルキルアクリルア
ミドなどが、メタクリルアミド類ではメタクリルアミド
や、N−アルキル基がメチル基、エチル基、イソプロピ
ル基、tert −’7’チ)L4.2−エチルへキシ
ル基などからなるN−アルキルメタクリルアミドなどが
ある。Specific examples of acrylic esters include propyl acrylate, butyl acrylate, amyl acrylate,
2-ethylhexyl acrylate, octyl acrylate, etc.; methacrylate esters include methyl methacrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate, etc.; acrylamides include acrylamide, N-alkyl group is methyl group, ethyl group, etc. basis,
Butyl group, isopropyl group, tert-butyl group, 2-
N-alkylacrylamide, which consists of an ethylhexyl group, etc., and methacrylamide, where the N-alkyl group is a methyl group, ethyl group, isopropyl group, tert-'7'th)L4.2-ethylhexyl group, etc. N-alkyl methacrylamide, etc.
また、アリル化合物では酢酸アリル、カプロン酸アリル
、カプリル酸アリル、ラウリン酸アリル、パルミチン酸
アリルなどのアリルエステル類が、ビニルエーテル類で
はヘキシルビニルエーテル、オクチルビニルエーテル、
デシルビニルエーテル、2−エチルヘキシルビニルエー
テルなどのアルキルビニルエーテルが、ビニルエステル
類ではビニルブチレート、ビニルイソブチレート、ビニ
ルトリメチルアセテート、ビニルジエチルアセテ−1−
、ビニルバレレート、ビニルカプロエートなどが、N−
ビニル化合物ではN−ビニルピロリドンなどが、スチレ
ン類ではスチレン、メチルスチレン、クロルメチルスチ
レン、アルコキシスチレン、ハロゲン化スチレン、安息
香酸スチレンなどが、クロトン酸エステル類ではクロト
ン酸メチル、クロトン酸エチル、クロトン酸ブチル、ク
ロトン酸ヘキシル、クロトン酸イソプロピルなどがある
。In addition, allyl compounds include allyl esters such as allyl acetate, allyl caproate, allyl caprylate, allyl laurate, and allyl palmitate, and the vinyl ethers include hexyl vinyl ether, octyl vinyl ether,
Alkyl vinyl ethers such as decyl vinyl ether and 2-ethylhexyl vinyl ether are used as vinyl esters such as vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate-1-
, vinyl valerate, vinyl caproate, etc.
Vinyl compounds include N-vinylpyrrolidone, styrenes include styrene, methylstyrene, chloromethylstyrene, alkoxystyrene, halogenated styrene, and styrene benzoate, and crotonate esters include methyl crotonate, ethyl crotonate, and crotonate. Examples include butyl, hexyl crotonate, and isopropyl crotonate.
つぎに、ポリエチレン性不飽和化合物の例としては、多
価アルコールのポリアクリレ−t[iおよびポリメタク
リレート類が挙げられる。上記多価アルコールとしては
、ポリエチレングリコール、ポリプロピレンオキシド、
ポリブチレンオキシド、(β−ヒドロキシエトキシ)ベ
ンゼン、グリセリン、ジグリセリン、ネオペンチルグリ
コール、トリメチロールプロパン、トリメチロールプロ
パン、ペンタエリスリトール、ジペンタエリスリトール
、ソルビタン、ソルビトール、l・4−ブタンジオール
、■・2・4−ブタントリオール、2−ブテンート4−
ジオール、2−ブチル−2−エチル−プロパンジオール
、2−ブテンート4−ジオール、1・3−プロパンジオ
ール、トリエタノールアミン、デカリンジオール、3−
クロルート2−プロパンジオールなどがある。Next, examples of polyethylenically unsaturated compounds include polyacrylate-t[i, which is a polyhydric alcohol, and polymethacrylates. The above polyhydric alcohols include polyethylene glycol, polypropylene oxide,
Polybutylene oxide, (β-hydroxyethoxy)benzene, glycerin, diglycerin, neopentyl glycol, trimethylolpropane, trimethylolpropane, pentaerythritol, dipentaerythritol, sorbitan, sorbitol, l・4-butanediol, ■・2・4-butanetriol, 2-buteneto 4-
Diol, 2-butyl-2-ethyl-propanediol, 2-butenoto-4-diol, 1,3-propanediol, triethanolamine, decalindiol, 3-
Examples include chlorate 2-propanediol.
また、ポリエチレン性不飽和化合物の他の例としては、
オリゴエステルアクリレート、オリゴエステルメタクリ
レート、エポキシアクリレート、エポキシメタクリレー
ト、ウレタンアクリレート、ウレタンメタクリレートな
どの名称で市販されている分子内にアクリロイル基また
はメタクリロイル基を2個以上有するアクリレートオリ
ゴマーやメタクリレートオリゴマーなどがある。In addition, other examples of polyethylenically unsaturated compounds include:
There are acrylate oligomers and methacrylate oligomers having two or more acryloyl groups or methacryloyl groups in the molecule, which are commercially available under the names of oligoester acrylate, oligoester methacrylate, epoxy acrylate, epoxy methacrylate, urethane acrylate, urethane methacrylate, etc.
さらに、光重合性不飽和化合物としては、以上の化合物
のほか、コハク酸、マレイン酸、フタル酸、ヘキサヒド
ロフタル酸などのジカルボン酸と2−ヒドロキシエチル
アクリレートないしメタクリレートとのモノエステルの
如き分子内にカルボキシル基を有する不飽和化合物が有
効である。すなわち、この種の化合物を使用すると、硬
化レジストのアルカリ水溶液による溶解除去性により好
結果が得られるため、好ましい。In addition to the above-mentioned compounds, examples of photopolymerizable unsaturated compounds include monoesters of dicarboxylic acids such as succinic acid, maleic acid, phthalic acid, and hexahydrophthalic acid with 2-hydroxyethyl acrylate or methacrylate. An unsaturated compound having a carboxyl group is effective. That is, the use of this type of compound is preferable because good results can be obtained due to the dissolution and removability of the cured resist with an alkaline aqueous solution.
このような光重合性不飽和化合物は、前記の皮膜形成性
ポリマー100重量部に対して通常10〜500重量部
、好ましくは30〜200重雇部の範囲で用いられる。Such photopolymerizable unsaturated compounds are generally used in an amount of 10 to 500 parts by weight, preferably 30 to 200 parts by weight, based on 100 parts by weight of the film-forming polymer.
この量が少なすぎては光重合性、つまり露光硬化性に劣
り、また多くなりすぎると剥離性能に劣り、いずれの場
合もff1ll 1W1f現像性に支障をきたしやすい
。またこの光重合性不飽和化合物が多くなりすぎると、
前述したような分子内にカルボキシル基を有する不飽和
化合物を使用する場合を除いて、露光硬化後のアルカリ
水溶液に対する溶解性ないし膨潤性が低下し、レジスト
除去性に問題をきたす場合がある。If this amount is too small, the photopolymerizability, that is, the exposure curing property will be poor, and if it is too large, the peeling performance will be poor, and in either case, the ff1ll 1W1f developability is likely to be impaired. Also, if this photopolymerizable unsaturated compound becomes too large,
Unless an unsaturated compound having a carboxyl group in the molecule as described above is used, the solubility or swelling property in an alkaline aqueous solution after exposure and curing may decrease, causing problems in resist removability.
この発明において光重合性組成物層を構成するもうひと
つの成分である光重合開始剤には、従来公知のものが広
く包含される。具体的にはカルボニル化合物、有機硫黄
化合物、過酸化物、レドックス系化合物、アゾならびに
ジアゾ化合物、光還元性色素などが挙げられる。In this invention, the photopolymerization initiator, which is another component constituting the photopolymerizable composition layer, includes a wide range of conventionally known initiators. Specific examples include carbonyl compounds, organic sulfur compounds, peroxides, redox compounds, azo and diazo compounds, and photoreducible dyes.
上記のカルボニル化合物としては、ベンゾイン、ベンゾ
フェノン、アントラキノン、2−メチルアントラキノン
、2−tert−ブチルアントラキノン、9・10−フ
ェナントレンキノン、ジアセチル、ベンジル、ミヒラー
ズケトン、4・4′−ビスジエチルアミノベンゾフェノ
ンなどが、有機硫黄化合物としては、ジブチルジスルフ
ィド、ジオクチルジスルフィド、ジベンジルジスルフィ
ド、ジフェニルジスルフィド、ジベンゾイルジスルフィ
ド、ジアセチルジスルフィドなどがある。Examples of the above carbonyl compounds include benzoin, benzophenone, anthraquinone, 2-methylanthraquinone, 2-tert-butylanthraquinone, 9,10-phenanthrenequinone, diacetyl, benzyl, Michler's ketone, 4,4'-bisdiethylaminobenzophenone, etc. Examples of the sulfur compound include dibutyl disulfide, dioctyl disulfide, dibenzyl disulfide, diphenyl disulfide, dibenzoyl disulfide, and diacetyl disulfide.
また、過酸化物としては、過酸化水素、ジーtert−
ブチルペルオキシド、過酸化ベンゾイル、メチルエチル
ケトンペルオキシドなどが、レドックス系化合物として
は、過酸化物と還元剤の組み合わせからなるもの、たと
えば第一鉄イオンと過酸化水素、第一鉄イオンと過硫酸
イオン、第二鉄イオンと過酸化物などが、アブおよびジ
アゾ化合物としては、α・α′−アゾビスイソブチロニ
トリル、2−アゾビス−2−メチルブチロニトリル、l
−アゾビス−シクロヘキサンカルボニトリル、p−アミ
ノジフェニルアミンのジアゾニウム塩などが、光還元性
色素としては、ローズベンガル、エリスロシン、エオシ
ン、アクリフラビン、リボフラビン、チオニンなどがあ
る。In addition, as peroxides, hydrogen peroxide, g-tert-
Butyl peroxide, benzoyl peroxide, methyl ethyl ketone peroxide, etc. are used as redox compounds. Diferric ions and peroxides are used as ab and diazo compounds such as α・α′-azobisisobutyronitrile, 2-azobis-2-methylbutyronitrile, l
Examples of photoreducible dyes include rose bengal, erythrosin, eosin, acriflavin, riboflavin, and thionin.
これら光重合開始剤は1種であっても2種以上を組み合
わせて用いてもよい。その使用量は前記の光重合性不飽
和化合物100重量部に対して通常0.1〜20重量部
の範囲とすればよい。These photopolymerization initiators may be used alone or in combination of two or more. The amount used is usually in the range of 0.1 to 20 parts by weight per 100 parts by weight of the photopolymerizable unsaturated compound.
この発明の光重合性組成物層は、上記したような皮膜形
成性ポリマー、光重合性不飽和化合物および光重合開始
剤を必須成分として含むものであるが、これら成分のほ
かに必要に応じて熱重合防止剤、着色剤、密着性向上剤
、充填剤および可塑剤などの各種添加剤を含有させるよ
うにしてもよい。The photopolymerizable composition layer of the present invention contains the above-mentioned film-forming polymer, photopolymerizable unsaturated compound, and photopolymerization initiator as essential components. Various additives such as inhibitors, colorants, adhesion improvers, fillers, and plasticizers may be included.
この発明においてこのような光重合性組成物層は、上記
の各成分を溶剤に均一に溶解分散させ、これを透明支持
体上に乾燥後の厚みが5〜100μm、好ましくは5〜
50μmとなるように塗布し乾燥することにより、形成
される。In the present invention, such a photopolymerizable composition layer is obtained by uniformly dissolving and dispersing each of the above components in a solvent, and depositing this on a transparent support with a thickness of 5 to 100 μm, preferably 5 to 100 μm after drying.
It is formed by coating to a thickness of 50 μm and drying.
上記の溶剤としてはアセトン、メチルエチルケトン、メ
チルイソブチルケトンなどのケトン類、酢酸エチル、酢
酸ブチル、酢酸アミルなどのエステル類が好適に使用さ
れる。また、トルエン、ベンゼン、キシレンなどの芳香
族炭化水素、四塩化炭素、クロロホルム、トリクロロエ
チレン、塩化メチレンなどのハロゲン化炭化水素、メタ
ノール、エタノール、プロパツール、ブタノールなどの
アルコール類なども混合溶剤などの形で使用できる。As the above-mentioned solvent, ketones such as acetone, methyl ethyl ketone, and methyl isobutyl ketone, and esters such as ethyl acetate, butyl acetate, and amyl acetate are preferably used. In addition, aromatic hydrocarbons such as toluene, benzene, and xylene, halogenated hydrocarbons such as carbon tetrachloride, chloroform, trichloroethylene, and methylene chloride, and alcohols such as methanol, ethanol, propatool, and butanol are also used in the form of mixed solvents. Can be used in
また、上記の透明支持体としては、厚みがlO〜50μ
m程度のポリエチレンテレフタレートフィルムが用いら
れる。このフィルムは、前記特定の皮膜形成性ポリマー
を用いた光重合性組成物層との接着性にすぐれ、光重合
性組成物層を光重合させうる300〜500nmの波長
域の光の透過性が良好であってかつ表面が均一であり、
強度。Moreover, the thickness of the above-mentioned transparent support is 10 to 50 μm.
A polyethylene terephthalate film having a thickness of about 100 m is used. This film has excellent adhesion to the photopolymerizable composition layer using the above-mentioned specific film-forming polymer, and has transparency to light in the wavelength range of 300 to 500 nm that can photopolymerize the photopolymerizable composition layer. Good and uniform surface,
Strength.
寸法安定性、耐熱性および吸湿性などの点でもすぐれる
という特徴を存している。It also has excellent characteristics such as dimensional stability, heat resistance, and moisture absorption.
この発明の画像形成材料は、以上の如くして得られる透
明支持体と光重合性組成物層とを含む剥41現像型ドラ
イフィルムレジストからなるものであり、この材料には
必要に応じて保存中での光重合性組成物層の保護を図る
ため、ポリエチレン、ポリプロピレンあるいは剥離処理
を施した各種プラスチックフィルムなどからなる保護フ
ィルムを上記組成物層の上に設けるようにしてもよい。The image forming material of the present invention is composed of a peelable 41 developable dry film resist containing the transparent support obtained as described above and a photopolymerizable composition layer, and this material may be stored as required. In order to protect the photopolymerizable composition layer therein, a protective film made of polyethylene, polypropylene, or various plastic films subjected to release treatment may be provided on the composition layer.
つぎに、このように構成されるこの発明の画像形成材料
を用いて回路を形成する方法につき説明する。Next, a method for forming a circuit using the image forming material of the present invention constructed as described above will be explained.
この方法は、まず、回路を形成するべき基板、たとえば
プリント配線板を得るための洞張り積層基板などの表面
を清浄化し、この清浄化面に、Ii?f記構成のこの発
明の画像形成材料を、保護フィルムを有している場合は
保護フィルムを剥がしてから、光重合性組成物層側が当
接面となるように基板に圧着させる。このときの圧着温
度は通常20〜80℃程度である。In this method, first, the surface of a board on which a circuit is to be formed, such as a hollow laminated board for obtaining a printed wiring board, is cleaned, and Ii? If the image forming material of the present invention having the structure described in f has a protective film, the protective film is peeled off, and then the image forming material is pressure-bonded to a substrate so that the photopolymerizable composition layer side becomes the contact surface. The pressure bonding temperature at this time is usually about 20 to 80°C.
つぎに、回路パターンを有するたとえば陰画マスクを透
明支持体の上に重ね、300〜500nmの波長の光を
含む光源、たとえば高圧水銀灯、超高圧水銀灯、キセノ
ン灯、カーボンアーク灯などにより露光する。Next, for example, a negative mask having a circuit pattern is placed on the transparent support and exposed to light from a light source containing light with a wavelength of 300 to 500 nm, such as a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a xenon lamp, a carbon arc lamp, or the like.
このように露光したのち、基板を好ましくは20〜40
°Cの温度下に保った状態で、透明支持体を基板から剥
離すると、パターン露光における露光部分の光重合性組
成物層は光硬化して基板上に残り、非露光部分は硬化し
ないまま透明支持体と共に剥離除去され、これにより基
板上に所望のレジストパターンが形成される。ここで、
上記非露光部分の剥離除去は、前記基板上への圧着後パ
ターン露光を行うまでの放置時間に特に左右されること
なく、つまりこの放置時間が非常に長くなったとしても
良好に行わせることができる。After being exposed in this way, the substrate is preferably
When the transparent support is peeled off from the substrate while kept at a temperature of °C, the photopolymerizable composition layer in the exposed areas in pattern exposure is photocured and remains on the substrate, while the unexposed areas remain uncured and transparent. It is peeled off together with the support, thereby forming a desired resist pattern on the substrate. here,
Peeling and removal of the non-exposed portions is not particularly affected by the length of time the product is left to stand after being crimped onto the substrate and before the pattern exposure is performed.In other words, it can be carried out well even if the time for which it is left to stand is extremely long. can.
つき゛に、レジストを有しない基板露出面、プリント配
線基板の場合はレジストを有しない銅面を、塩化第二鉄
液や塩化第二銅液のようなエツチング液によりエツチン
グ処理する。しかるのち、3〜8重量%程度の水酸化ナ
トリウムや水酸化カリウムなどのアルカリ水溶液中に好
ましくは40〜80″Cの温度下で浸漬するか、あるい
はこのようなアルカリ水溶液をスプレーすることにより
、硬化したレジストは溶解ないし膨潤し基板から剥離す
る。その後よく水洗いして乾燥することにより、基板上
にエツチングされた陽画像回路パターンが得られる。Therefore, the exposed surface of the substrate without resist, or in the case of a printed wiring board, the copper surface without resist, is etched using an etching solution such as ferric chloride solution or cupric chloride solution. Then, by immersing it in an alkaline aqueous solution such as sodium hydroxide or potassium hydroxide containing about 3 to 8% by weight, preferably at a temperature of 40 to 80''C, or by spraying such an alkaline aqueous solution, The hardened resist dissolves or swells and is peeled off from the substrate.Then, the resist is thoroughly washed with water and dried to obtain a positive image circuit pattern etched on the substrate.
また、上記の方法において陰画マスクの代わりに陽画マ
スクを用いたときには、上記同様にしてレジストパター
ンを形成したのち、レジストを有しない基板面に対して
エツチング処理の代わりに銅、半田、金などのメッキ処
理を施し、その後−上記同様にしてアルカリ水溶液によ
るレジストの除去を行えば、基板上にメッキされた陽画
像回路パターンを得ることができる。In addition, when a positive mask is used instead of a negative mask in the above method, after forming a resist pattern in the same manner as above, copper, solder, gold, etc. are applied to the substrate surface that does not have a resist instead of etching. By performing plating treatment and then removing the resist using an alkaline aqueous solution in the same manner as described above, a positive image circuit pattern plated on the substrate can be obtained.
以上のように、この発明においては、剥湘現像型ドライ
フィルムレジストにおける透明支持体をポリエチレンテ
レフタレートフィルムで構成する一方、光重合性組成物
層中にアルキル基の炭素数が2〜8個のポリ (メタ)
アクリル酸アルキルエステルを必須成分として含むこと
から、光重合性組成物層を当接面とした金属基板表面へ
の積層後パターン露光を行うまでの放置時間に関係なく
、積層直後から長時間放置したものまで安定した剥離現
像を行うことができ、つまりすぐれた画像忠実性を得る
ことができ、また皮膜形成性ポリマーのひとつにアルカ
リ水溶液に溶解性ないし膨潤性のものを使用しているこ
とから、所要の回路形成処理を施したのちの硬化レジス
トの除去を有機溶媒に比し安価でかつ公衆衛生上の問題
の少ないアルカリ水溶液によって行えるという利点が得
られる。As described above, in this invention, the transparent support in the peel-and-developable dry film resist is composed of a polyethylene terephthalate film, while the photopolymerizable composition layer contains a polyethylene terephthalate film having an alkyl group of 2 to 8 carbon atoms. (meta)
Because it contains an acrylic acid alkyl ester as an essential component, the photopolymerizable composition layer was left to stand for a long time immediately after lamination, regardless of the time it was left before pattern exposure after lamination on the metal substrate surface as the contact surface. It is possible to carry out stable peeling development, which means that excellent image fidelity can be obtained, and because one of the film-forming polymers used is one that is soluble or swellable in alkaline aqueous solutions, An advantage can be obtained that the hardened resist can be removed after the necessary circuit formation processing using an alkaline aqueous solution, which is cheaper and less of a public health problem than organic solvents.
以下に、この発明の実施例を記載してより具体的に説明
する。なお、以下において部とあるは重量部を意味する
ものとする。EXAMPLES Below, examples of the present invention will be described in more detail. In addition, in the following, parts shall mean parts by weight.
実施例1
ポリメタクリル酸n−ブチル 2部ベンゾフェ
ノン 6部4・4′−ビスジエチ
ルアミノヘンゾ 1 部フェノン
トリブロモメチルフェニルスルホン 1部バラメトキ
シフェノール 0.1部ビクトリアピュアブ
ルー 0.2部エチルアセテート
300部上記材料を均一に溶解混合することによ
り、光重合性組成物の溶液を調製した。この液を厚さ2
5μmのポリエチレンテレフタレートフィルム上に乾燥
後の厚みが25μmとなるように塗布したのち、80℃
で5分間乾燥処理を行うことにより、剥離現像型ドライ
フィルムレジストからなる画像形成材料を得た。Example 1 Polymer n-butyl methacrylate 2 parts Benzophenone 6 parts 4,4'-bisdiethylaminohenzo 1 part Phenone tribromomethyl phenyl sulfone 1 part Paramethoxyphenol 0.1 part Victoria Pure Blue 0.2 part Ethyl acetate
A solution of the photopolymerizable composition was prepared by uniformly dissolving and mixing 300 parts of the above materials. Spread this liquid to a thickness of 2
It was coated on a 5 μm polyethylene terephthalate film to a dry thickness of 25 μm, and then heated at 80°C.
By carrying out a drying treatment for 5 minutes, an image forming material consisting of a peelable and developable dry film resist was obtained.
この画像形成材料を、表面を清浄にしたA、 82枚の
銅張りガラスエポキシ積N基板の銅張面に、それぞれ光
重合性組成物層側が当接面となるように、50℃の温度
下で加圧積層し、そのうちの1枚Aは、その直後に上記
材料の透明支持体上に回路パターンを有する陰画原稿を
密着させ、3KWの超高圧水銀灯で60cmの距離より
10秒間の露光を行った。また別のもう1枚Bは、室温
で1時間放置したのち、上記方法により露光を行った。This image forming material was applied to the copper-clad surface of 82 copper-clad glass-epoxy laminated N substrates with clean surfaces at a temperature of 50°C, with the photopolymerizable composition layer side facing each other. Immediately after that, a negative manuscript with a circuit pattern was brought into close contact with a transparent support made of the above material, and one sheet A was exposed to light for 10 seconds from a distance of 60 cm using a 3KW ultra-high pressure mercury lamp. Ta. Another sheet B was left at room temperature for 1 hour and then exposed to light using the above method.
つぎに、A、Bそれぞれの基板温度を30℃に設定して
画像形成材料の透明支持体であるポリエチレンテレフタ
レートフィルムを基板から引き剥がすと、A、B共に非
露光部分は基板上から剥離除去され、露光部分のみが基
板上に残存して良好な陽画回路を構成するレジストパタ
ーンが形成された。Next, when the substrate temperature of each of A and B is set to 30°C and the polyethylene terephthalate film, which is the transparent support of the image forming material, is peeled off from the substrate, the non-exposed portions of both A and B are peeled off and removed from the substrate. A resist pattern was formed in which only the exposed portion remained on the substrate and constituted a good positive circuit.
ついで、このようにして得られたA、Bのレジストパタ
ーンを有する銅張り基板を40度ボーメの塩化第二鉄水
溶液によりエツチング処理して露出した銅箔をエツチン
グ除去した。その後、濃度3重量%の水酸化ナトリウム
水?g液(液温50”C)に5分間浸漬したところ、A
、B共に硬化したレジストは膨潤して基板より剥離した
。これら基板を水洗、乾燥することにより所望のプリン
ト配線板が得られた。Next, the copper-clad substrate having the resist patterns A and B thus obtained was etched with a ferric chloride aqueous solution at 40 degrees Baumé to remove the exposed copper foil. After that, sodium hydroxide solution with a concentration of 3% by weight? When immersed in liquid g (liquid temperature 50"C) for 5 minutes, A
The cured resists in both cases swelled and peeled off from the substrate. A desired printed wiring board was obtained by washing these substrates with water and drying them.
実施例2
実施例1に示した光重合性組成物の中で、スチレンとマ
レイン酸n−ブチルセロソルブ半エステルとの共重合物
を45部に、ポリメタクリル酸メチルを38部に、含ハ
ロゲンポリマーを15部に、それぞれ変更した以外は、
実施例1と同様にして画像形成材料を作製した。つぎに
、この材料を用いて実施例1と同様にしてA、82枚の
基板上に回路形成を行ったところ、実施例1と同様2枚
共、所望の回路パターンを有するプリント配線板を得る
ことができた。なお回路形成工程におけるアルカリ水溶
液によるパターン状レジストの除去は実施例1と同様に
容易であった。Example 2 In the photopolymerizable composition shown in Example 1, 45 parts of a copolymer of styrene and n-butyl cellosolve maleate half ester, 38 parts of polymethyl methacrylate, and a halogen-containing polymer were added. Except for changing each to 15 parts,
An image forming material was produced in the same manner as in Example 1. Next, using this material, circuits were formed on 82 boards A in the same manner as in Example 1, and as in Example 1, printed wiring boards having the desired circuit pattern were obtained on both boards. I was able to do that. Note that removal of the patterned resist using an alkaline aqueous solution in the circuit forming process was easy as in Example 1.
なお、上記の光重合性組成物の中で、ポリメタクリル酸
メチルを30部に、ポリメタクリル酸n−ブチルを10
部に、それぞれ変更して上記同様にして画像形成材料を
得、これより上記同様にして回路形成を試みたところ、
A、B2枚の基板共に、剥離現像時に非露光部分ととも
に露光部分までもが基板表面より剥離され、基板上にパ
ターン状レジストを形成することができなかった。In addition, in the above photopolymerizable composition, 30 parts of polymethyl methacrylate and 10 parts of polyn-butyl methacrylate were used.
An image-forming material was obtained in the same manner as above, with the respective changes made, and circuit formation was attempted from this in the same manner as above.
For both substrates A and B, both the unexposed portion and the exposed portion were peeled off from the surface of the substrate during peeling and development, making it impossible to form a patterned resist on the substrate.
比較例1
実施例1に示した光重合性組成物の中で、含ハロゲンポ
リマーを20部に変更するとともに、ポリメタクリル酸
n−ブチルを用いなかった以外は、実−施例1と同様に
して画像形成材料を作製した。Comparative Example 1 The same procedure as in Example 1 was carried out except that in the photopolymerizable composition shown in Example 1, the halogen-containing polymer was changed to 20 parts, and polyn-butyl methacrylate was not used. An image forming material was prepared.
つぎに、この材料を用いて実施例1と同様にしてA、8
2枚の基板上に回路形成を行ったところ、積層直後にパ
ターン露光を行ったAは良好な陽画回路を形成できたの
に対し、放置後にパターン露光を行ったBは非露光部分
が剥離現像時に支持体より基板上に転写され、画像性が
著しく低下した。Next, A and 8 were prepared in the same manner as in Example 1 using this material.
When circuits were formed on two substrates, A, in which pattern exposure was performed immediately after lamination, was able to form a good positive circuit, whereas in B, in which pattern exposure was performed after standing, the non-exposed portions peeled off and developed. At times, the image was transferred from the support onto the substrate, resulting in a significant decrease in image quality.
実施例3
ポリメタクリル酸イソプロピル 2部ジエチルチ
オキサントン 3部ジメチルアミノ安息香
酸イソアミル 2部パラトルエンスルホニルクロライ
ド 1部ハイドロキノン 0.
1部クリスタルバイオレット 0.3部メチ
ルエチルケトン 300部上記の光重合性
組成物の溶液を用いて実施例1と同様にして画像形成材
料を作製し、この材料を用いて以下実施例1と同様にし
てA、82枚の基板に回路形成を行ったところ、A、B
共に実施例1と同様の所望の回路パターンを有するプリ
ント配線板を得ることができた。Example 3 Polyisopropyl methacrylate 2 parts diethylthioxanthone 3 parts isoamyl dimethylaminobenzoate 2 parts para-toluenesulfonyl chloride 1 part hydroquinone 0.
1 part Crystal violet 0.3 parts Methyl ethyl ketone 300 parts An image forming material was prepared in the same manner as in Example 1 using the solution of the above photopolymerizable composition. A. After forming circuits on 82 boards, A.B
In both cases, a printed wiring board having the same desired circuit pattern as in Example 1 could be obtained.
実施例4
ポリアクリル酸n−ブチル 5部レート
ジエチルチオキサントン 3部ジメチルア
ミノ安息香酸イソアミル 2部トリブロモメチルフェ
ニルスルホン 1部バラメトキシフェノール
0.1部クリスタルバイオレット 0.
3部メチルエチルケトン 300部上記の
光重合性組成物の溶液を用いて実施例1と同様にして画
像形成材料を作製し、この材料を用いて以下実施例1と
同様にしてA、I32枚の基板に回路形成を行ったとこ
ろ、A、B共に実施例1と同様の所望の回路パターンを
有するプリント配線板を得ることができた。Example 4 n-butyl polyacrylate 5 parts diethylthioxanthone 3 parts isoamyl dimethylaminobenzoate 2 parts tribromomethylphenylsulfone 1 part paramethoxyphenol
0.1 part crystal violet 0.
3 parts Methyl ethyl ketone 300 parts An image forming material was prepared in the same manner as in Example 1 using the solution of the above photopolymerizable composition, and using this material, 32 substrates A and I were prepared in the same manner as in Example 1. When circuit formation was carried out, printed wiring boards having the same desired circuit patterns as in Example 1 were obtained for both A and B.
比較例2
一ブチルとメタクリル酸メチルとの共重合体(モル比5
:5)5部に変更した以外は、実施例4と同様にして画
像形成材料を得、これを用いて実施例4と同様にしてA
、32枚の基板上に回路形成を行ったところ、積層直後
にパターン露光を行ったAは所望の陽画回路を形成でき
たのに対し、放置後にパターン露光を行ったBは剥離現
像時に非露光部分が支持体より基板上にわずかに転写さ
れ、鮮明な画像性が得られなかった。Comparative Example 2 Copolymer of monobutyl and methyl methacrylate (molar ratio 5
:5) An image forming material was obtained in the same manner as in Example 4 except that the amount was changed to 5 parts, and A was prepared in the same manner as in Example 4 using this material.
When circuits were formed on 32 substrates, A, in which pattern exposure was performed immediately after lamination, was able to form the desired positive image circuit, whereas B, in which pattern exposure was performed after standing, was not exposed during peeling and development. A portion was slightly transferred onto the substrate from the support, and a clear image could not be obtained.
Claims (1)
飽和化合物および光重合開始剤を含有する光重合性組成
物層を設けてなる剥離現像型ドライフィルムレジストか
らなる画像形成材料において、上記透明支持体がポリエ
チレンテレフタレートフィルムで構成され、かつ上記の
皮膜形成性ポリマーが、a)アルカリ水溶液に可溶性な
いし膨潤性のポリマーと、b)ポリ(メタ)アクリル酸
メチルと、c)含ハロゲンポリマーと、d)上記a〜c
成分のポリマーと非相溶性であるアルキル基の炭素数が
2〜8個のポリ(メタ)アクリル酸アルキルエステルと
を必須成分として含むことを特徴とする画像形成材料。(1) In an image forming material consisting of a peelable and developable dry film resist, which is formed by providing a photopolymerizable composition layer containing a film-forming polymer, a photopolymerizable unsaturated compound, and a photopolymerization initiator on a transparent support, The transparent support is composed of a polyethylene terephthalate film, and the film-forming polymer is a) a polymer soluble or swellable in an alkaline aqueous solution, b) poly(meth)methylacrylate, and c) a halogen-containing polymer. and d) above a to c
An image forming material comprising as an essential component a poly(meth)acrylic acid alkyl ester having an alkyl group having 2 to 8 carbon atoms, which is incompatible with the component polymer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10263186A JPS62260143A (en) | 1986-05-02 | 1986-05-02 | Image forming material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10263186A JPS62260143A (en) | 1986-05-02 | 1986-05-02 | Image forming material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62260143A true JPS62260143A (en) | 1987-11-12 |
Family
ID=14332585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10263186A Pending JPS62260143A (en) | 1986-05-02 | 1986-05-02 | Image forming material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62260143A (en) |
-
1986
- 1986-05-02 JP JP10263186A patent/JPS62260143A/en active Pending
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