JPS6225977B2 - - Google Patents

Info

Publication number
JPS6225977B2
JPS6225977B2 JP56080602A JP8060281A JPS6225977B2 JP S6225977 B2 JPS6225977 B2 JP S6225977B2 JP 56080602 A JP56080602 A JP 56080602A JP 8060281 A JP8060281 A JP 8060281A JP S6225977 B2 JPS6225977 B2 JP S6225977B2
Authority
JP
Japan
Prior art keywords
resistor
metal layer
pattern
temperature
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56080602A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57196124A (en
Inventor
Shozo Takeno
Koichiro Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Original Assignee
Tokyo Sanyo Electric Co Ltd
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Toshiba Corp filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP8060281A priority Critical patent/JPS57196124A/ja
Priority to EP81109813A priority patent/EP0053337B1/en
Priority to DE8181109813T priority patent/DE3176209D1/de
Priority to US06/323,726 priority patent/US4432247A/en
Priority to AU77880/81A priority patent/AU528989B2/en
Priority to DK524881A priority patent/DK161215C/da
Priority to CA000391106A priority patent/CA1176075A/en
Publication of JPS57196124A publication Critical patent/JPS57196124A/ja
Publication of JPS6225977B2 publication Critical patent/JPS6225977B2/ja
Priority to HK988/88A priority patent/HK98888A/en
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2243—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being parallelogram-shaped
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Force In General (AREA)
JP8060281A 1980-11-29 1981-05-27 Load cell Granted JPS57196124A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP8060281A JPS57196124A (en) 1981-05-27 1981-05-27 Load cell
EP81109813A EP0053337B1 (en) 1980-11-29 1981-11-21 Load cell and method of manufacturing the same
DE8181109813T DE3176209D1 (en) 1980-11-29 1981-11-21 Load cell and method of manufacturing the same
US06/323,726 US4432247A (en) 1980-11-29 1981-11-23 Load cell having thin film strain gauges
AU77880/81A AU528989B2 (en) 1980-11-29 1981-11-25 Load cell and method of manufacturing
DK524881A DK161215C (da) 1980-11-29 1981-11-26 Belastningscelle og fremgangsmaade til fremstilling heraf
CA000391106A CA1176075A (en) 1980-11-29 1981-11-27 Load cell and method of manufacturing the same
HK988/88A HK98888A (en) 1980-11-29 1988-12-08 Load cell and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8060281A JPS57196124A (en) 1981-05-27 1981-05-27 Load cell

Publications (2)

Publication Number Publication Date
JPS57196124A JPS57196124A (en) 1982-12-02
JPS6225977B2 true JPS6225977B2 (enrdf_load_stackoverflow) 1987-06-05

Family

ID=13722873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8060281A Granted JPS57196124A (en) 1980-11-29 1981-05-27 Load cell

Country Status (1)

Country Link
JP (1) JPS57196124A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000515623A (ja) * 1995-12-04 2000-11-21 ソシエテ・ナシオナル・デテユード・エ・ドウ・コンストリユクシオン・ドウ・モトール・ダヴイアシオン、“エス．エヌ．ウ．セ．エム．アー．” ブリッジの主抵抗間の温度勾配を補正するホイーストンブリッジ及びひずみゲージを有する圧力センサにおけるその適用

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230131A (ja) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd ロ−ドセル
JPS60179943U (ja) * 1984-05-10 1985-11-29 東芝テック株式会社 ロ−ドセル
US9797789B2 (en) * 2013-01-03 2017-10-24 Vishay Measurements Group, Inc. Strain gages with discrete electrical resistance trimming
JP7053215B2 (ja) * 2017-10-17 2022-04-12 ミネベアミツミ株式会社 ひずみゲージ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797420A (en) * 1980-11-26 1982-06-17 Gould Inc Thin film strain gauge having temperature compensation resistance not subjected to pressure deformation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000515623A (ja) * 1995-12-04 2000-11-21 ソシエテ・ナシオナル・デテユード・エ・ドウ・コンストリユクシオン・ドウ・モトール・ダヴイアシオン、“エス．エヌ．ウ．セ．エム．アー．” ブリッジの主抵抗間の温度勾配を補正するホイーストンブリッジ及びひずみゲージを有する圧力センサにおけるその適用

Also Published As

Publication number Publication date
JPS57196124A (en) 1982-12-02

Similar Documents

Publication Publication Date Title
US4432247A (en) Load cell having thin film strain gauges
US4333349A (en) Binary balancing apparatus for semiconductor transducer structures
JPS62226029A (ja) ロ−ドセルの温度補正方法
JPH0565807B2 (enrdf_load_stackoverflow)
GB2181298A (en) Platinum resistance thermometer and manufacture thereof
JPS63165725A (ja) 圧力センサ−用歪ゲ−ジ
US4160969A (en) Transducer and method of making
KR101193501B1 (ko) 이에스피용 자동차 압력센서 제조방법 및 그 방법에 의해 제조된 압력센서
JPS6225977B2 (enrdf_load_stackoverflow)
JP2585681B2 (ja) 金属薄膜抵抗ひずみゲ―ジ
JPS6239927B2 (enrdf_load_stackoverflow)
JPS6334414B2 (enrdf_load_stackoverflow)
JPS5942402A (ja) 歪センサの製造方法
JPS59230101A (ja) 歪センサ
KR860000047B1 (ko) 로오드셀 및 그 제조방법
JP2001110602A (ja) 薄膜抵抗体形成方法及びセンサ
JP2717812B2 (ja) ロードセル
JPH0129249B2 (enrdf_load_stackoverflow)
JPS61209332A (ja) 歪センサ−
JPH0327857B2 (enrdf_load_stackoverflow)
JPH033882B2 (enrdf_load_stackoverflow)
JPH0285702A (ja) フリーフィラメントひずみゲージとその製造方法
JPS5979103A (ja) 歪センサ
JPS621206B2 (enrdf_load_stackoverflow)
JPH0740497A (ja) 膜構造