JPS6225684Y2 - - Google Patents

Info

Publication number
JPS6225684Y2
JPS6225684Y2 JP14774681U JP14774681U JPS6225684Y2 JP S6225684 Y2 JPS6225684 Y2 JP S6225684Y2 JP 14774681 U JP14774681 U JP 14774681U JP 14774681 U JP14774681 U JP 14774681U JP S6225684 Y2 JPS6225684 Y2 JP S6225684Y2
Authority
JP
Japan
Prior art keywords
angular displacement
light
objective lens
prism
detection mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14774681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5857708U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14774681U priority Critical patent/JPS5857708U/ja
Publication of JPS5857708U publication Critical patent/JPS5857708U/ja
Application granted granted Critical
Publication of JPS6225684Y2 publication Critical patent/JPS6225684Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP14774681U 1981-10-06 1981-10-06 角変位検出機構 Granted JPS5857708U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14774681U JPS5857708U (ja) 1981-10-06 1981-10-06 角変位検出機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14774681U JPS5857708U (ja) 1981-10-06 1981-10-06 角変位検出機構

Publications (2)

Publication Number Publication Date
JPS5857708U JPS5857708U (ja) 1983-04-19
JPS6225684Y2 true JPS6225684Y2 (enrdf_load_html_response) 1987-07-01

Family

ID=29940592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14774681U Granted JPS5857708U (ja) 1981-10-06 1981-10-06 角変位検出機構

Country Status (1)

Country Link
JP (1) JPS5857708U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5857708U (ja) 1983-04-19

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