JPS622537U - - Google Patents
Info
- Publication number
- JPS622537U JPS622537U JP9281885U JP9281885U JPS622537U JP S622537 U JPS622537 U JP S622537U JP 9281885 U JP9281885 U JP 9281885U JP 9281885 U JP9281885 U JP 9281885U JP S622537 U JPS622537 U JP S622537U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- advancing
- wafer
- retracting mechanism
- retreating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 21
- 238000000926 separation method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9281885U JPH0344754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-06-19 | 1985-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9281885U JPH0344754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-06-19 | 1985-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622537U true JPS622537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-01-09 |
| JPH0344754Y2 JPH0344754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-20 |
Family
ID=30649951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9281885U Expired JPH0344754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-06-19 | 1985-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017080862A (ja) * | 2015-10-30 | 2017-05-18 | 日本電気硝子株式会社 | 板ガラスの製造方法及び製造装置 |
-
1985
- 1985-06-19 JP JP9281885U patent/JPH0344754Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017080862A (ja) * | 2015-10-30 | 2017-05-18 | 日本電気硝子株式会社 | 板ガラスの製造方法及び製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0344754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-20 |
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