JPS6225259B2 - - Google Patents

Info

Publication number
JPS6225259B2
JPS6225259B2 JP11029978A JP11029978A JPS6225259B2 JP S6225259 B2 JPS6225259 B2 JP S6225259B2 JP 11029978 A JP11029978 A JP 11029978A JP 11029978 A JP11029978 A JP 11029978A JP S6225259 B2 JPS6225259 B2 JP S6225259B2
Authority
JP
Japan
Prior art keywords
substrate
gas
reaction tube
growth
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11029978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5538013A (en
Inventor
Masayuki Chifuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11029978A priority Critical patent/JPS5538013A/ja
Publication of JPS5538013A publication Critical patent/JPS5538013A/ja
Publication of JPS6225259B2 publication Critical patent/JPS6225259B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Formation Of Insulating Films (AREA)
JP11029978A 1978-09-08 1978-09-08 Mthoe of and device for single crystal alumina growth Granted JPS5538013A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11029978A JPS5538013A (en) 1978-09-08 1978-09-08 Mthoe of and device for single crystal alumina growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11029978A JPS5538013A (en) 1978-09-08 1978-09-08 Mthoe of and device for single crystal alumina growth

Publications (2)

Publication Number Publication Date
JPS5538013A JPS5538013A (en) 1980-03-17
JPS6225259B2 true JPS6225259B2 (enExample) 1987-06-02

Family

ID=14532171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11029978A Granted JPS5538013A (en) 1978-09-08 1978-09-08 Mthoe of and device for single crystal alumina growth

Country Status (1)

Country Link
JP (1) JPS5538013A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60109222A (ja) * 1983-11-18 1985-06-14 Nec Corp ３−ｖ族化合物半導体の気相成長装置

Also Published As

Publication number Publication date
JPS5538013A (en) 1980-03-17

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