JPS6225227A - 多重成分力およびトルクセンサ - Google Patents
多重成分力およびトルクセンサInfo
- Publication number
- JPS6225227A JPS6225227A JP61100801A JP10080186A JPS6225227A JP S6225227 A JPS6225227 A JP S6225227A JP 61100801 A JP61100801 A JP 61100801A JP 10080186 A JP10080186 A JP 10080186A JP S6225227 A JPS6225227 A JP S6225227A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- sensor
- force
- signals
- torque
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims description 30
- 230000008054 signal transmission Effects 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 22
- 239000011230 binding agent Substances 0.000 claims description 14
- 238000002604 ultrasonography Methods 0.000 claims description 14
- 230000004044 response Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 6
- 239000013536 elastomeric material Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 description 11
- 229910001369 Brass Inorganic materials 0.000 description 7
- 239000002033 PVDF binder Substances 0.000 description 7
- 239000010951 brass Substances 0.000 description 7
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 229920002379 silicone rubber Polymers 0.000 description 5
- 239000004945 silicone rubber Substances 0.000 description 5
- YVIMHTIMVIIXBQ-UHFFFAOYSA-N [SnH3][Al] Chemical compound [SnH3][Al] YVIMHTIMVIIXBQ-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012636 effector Substances 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- DPPFTYBYPWHNRM-UHFFFAOYSA-N 1-(2-methoxy-4-methyl-5-methylsulfanylphenyl)propan-2-amine Chemical compound COC1=CC(C)=C(SC)C=C1CC(C)N DPPFTYBYPWHNRM-UHFFFAOYSA-N 0.000 description 1
- CROYZNIEESCKGY-UHFFFAOYSA-N 1-(5-methoxy-4-methyl-2-methylsulfanylphenyl)propan-2-amine Chemical group COC1=CC(CC(C)N)=C(SC)C=C1C CROYZNIEESCKGY-UHFFFAOYSA-N 0.000 description 1
- 101100001675 Emericella variicolor andJ gene Proteins 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 101150073669 NCAN gene Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920000131 polyvinylidene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/25—Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons
- G01L1/255—Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons using acoustic waves, or acoustic emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/166—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using photoelectric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S73/00—Measuring and testing
- Y10S73/04—Piezoelectric
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/757,360 US4704909A (en) | 1985-07-22 | 1985-07-22 | Multicomponent force-torque sensor |
| US757360 | 1985-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6225227A true JPS6225227A (ja) | 1987-02-03 |
| JPH0580971B2 JPH0580971B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-11 |
Family
ID=25047517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61100801A Granted JPS6225227A (ja) | 1985-07-22 | 1986-04-30 | 多重成分力およびトルクセンサ |
Country Status (6)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005315891A (ja) * | 2004-04-28 | 2005-11-10 | Senstronic Deutschland Gmbh | 光学式測定装置 |
| JP2017102012A (ja) * | 2015-12-01 | 2017-06-08 | 日本精工株式会社 | 力覚センサ |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0262437A3 (de) * | 1986-09-30 | 1988-10-05 | Siemens Aktiengesellschaft | Ultraschall-Echoprofilsensor als taktiler Sensor |
| US4855923A (en) * | 1988-01-06 | 1989-08-08 | Xerox Corporation | Parts assembly using signature analysis |
| DE3836003A1 (de) * | 1988-10-21 | 1990-04-26 | Wolfgang Prof Dr Ing Ziegler | Verfahren und vorrichtung zur durchfuehrung einer kraftgeregelten bewegung |
| US5209126A (en) * | 1991-01-04 | 1993-05-11 | Bonneville Scientific | Force sensor |
| BE1004980A3 (fr) * | 1991-06-18 | 1993-03-09 | Univ Bruxelles | Capteur de force et utilisation de celui-ci sur un robot. |
| US5335557A (en) * | 1991-11-26 | 1994-08-09 | Taizo Yasutake | Touch sensitive input control device |
| USRE40891E1 (en) | 1991-11-26 | 2009-09-01 | Sandio Technology Corp. | Methods and apparatus for providing touch-sensitive input in multiple degrees of freedom |
| US6597347B1 (en) | 1991-11-26 | 2003-07-22 | Itu Research Inc. | Methods and apparatus for providing touch-sensitive input in multiple degrees of freedom |
| US5734373A (en) * | 1993-07-16 | 1998-03-31 | Immersion Human Interface Corporation | Method and apparatus for controlling force feedback interface systems utilizing a host computer |
| US5721566A (en) * | 1995-01-18 | 1998-02-24 | Immersion Human Interface Corp. | Method and apparatus for providing damping force feedback |
| US6437771B1 (en) | 1995-01-18 | 2002-08-20 | Immersion Corporation | Force feedback device including flexure member between actuator and user object |
| US5805140A (en) | 1993-07-16 | 1998-09-08 | Immersion Corporation | High bandwidth force feedback interface using voice coils and flexures |
| US5739811A (en) * | 1993-07-16 | 1998-04-14 | Immersion Human Interface Corporation | Method and apparatus for controlling human-computer interface systems providing force feedback |
| US5724264A (en) * | 1993-07-16 | 1998-03-03 | Immersion Human Interface Corp. | Method and apparatus for tracking the position and orientation of a stylus and for digitizing a 3-D object |
| US5731804A (en) | 1995-01-18 | 1998-03-24 | Immersion Human Interface Corp. | Method and apparatus for providing high bandwidth, low noise mechanical I/O for computer systems |
| US5767839A (en) * | 1995-01-18 | 1998-06-16 | Immersion Human Interface Corporation | Method and apparatus for providing passive force feedback to human-computer interface systems |
| US5553500A (en) * | 1994-10-26 | 1996-09-10 | Bonneville Scientific Incorporated | Triaxial normal and shear force sensor |
| US5604314A (en) * | 1994-10-26 | 1997-02-18 | Bonneville Scientific Incorporated | Triaxial normal and shear force sensor |
| US6850222B1 (en) | 1995-01-18 | 2005-02-01 | Immersion Corporation | Passive force feedback for computer interface devices |
| US5691898A (en) | 1995-09-27 | 1997-11-25 | Immersion Human Interface Corp. | Safe and low cost computer peripherals with force feedback for consumer applications |
| US7113166B1 (en) | 1995-06-09 | 2006-09-26 | Immersion Corporation | Force feedback devices using fluid braking |
| US6697748B1 (en) | 1995-08-07 | 2004-02-24 | Immersion Corporation | Digitizing system and rotary table for determining 3-D geometry of an object |
| US5959613A (en) | 1995-12-01 | 1999-09-28 | Immersion Corporation | Method and apparatus for shaping force signals for a force feedback device |
| US6704001B1 (en) | 1995-11-17 | 2004-03-09 | Immersion Corporation | Force feedback device including actuator with moving magnet |
| US6147674A (en) | 1995-12-01 | 2000-11-14 | Immersion Corporation | Method and apparatus for designing force sensations in force feedback computer applications |
| US6028593A (en) | 1995-12-01 | 2000-02-22 | Immersion Corporation | Method and apparatus for providing simulated physical interactions within computer generated environments |
| US7027032B2 (en) | 1995-12-01 | 2006-04-11 | Immersion Corporation | Designing force sensations for force feedback computer applications |
| US8508469B1 (en) | 1995-12-01 | 2013-08-13 | Immersion Corporation | Networked applications including haptic feedback |
| US6219032B1 (en) | 1995-12-01 | 2001-04-17 | Immersion Corporation | Method for providing force feedback to a user of an interface device based on interactions of a controlled cursor with graphical elements in a graphical user interface |
| US6078308A (en) | 1995-12-13 | 2000-06-20 | Immersion Corporation | Graphical click surfaces for force feedback applications to provide user selection using cursor interaction with a trigger position within a boundary of a graphical object |
| US6859819B1 (en) | 1995-12-13 | 2005-02-22 | Immersion Corporation | Force feedback enabled over a computer network |
| US6064753A (en) * | 1997-06-10 | 2000-05-16 | International Business Machines Corporation | System and method for distortion control in live-scan inkless fingerprint images |
| US7084854B1 (en) | 2000-09-28 | 2006-08-01 | Immersion Corporation | Actuator for providing tactile sensations and device for directional tactile sensations |
| US6937033B2 (en) | 2001-06-27 | 2005-08-30 | Immersion Corporation | Position sensor with resistive element |
| DE10143489C2 (de) | 2001-09-05 | 2003-07-17 | Deutsch Zentr Luft & Raumfahrt | Anordnung zum Erfassen von Relativbewegungen zweier Objekte |
| US7312615B2 (en) * | 2003-06-27 | 2007-12-25 | Ati Industrial Automation, Inc. | System and method for communicating calibration data |
| DE102004020745A1 (de) * | 2004-04-27 | 2005-11-24 | Werner & Pfleiderer Lebensmitteltechnik Gmbh | Backofen |
| US7825903B2 (en) | 2005-05-12 | 2010-11-02 | Immersion Corporation | Method and apparatus for providing haptic effects to a touch panel |
| EP1987406B1 (en) * | 2006-02-23 | 2010-08-04 | Abb Ab | A system for controlling the position and orientation of an object in dependence on received forces and torques from a user |
| US8006570B2 (en) * | 2006-03-29 | 2011-08-30 | Alcon, Inc. | Non-invasive flow measurement |
| US8251944B2 (en) * | 2006-03-29 | 2012-08-28 | Novartis Ag | Surgical system having a cassette with an acoustic coupling |
| US8343100B2 (en) * | 2006-03-29 | 2013-01-01 | Novartis Ag | Surgical system having a non-invasive flow sensor |
| US10274386B2 (en) * | 2016-06-20 | 2019-04-30 | X Development Llc | Retroreflective multi-axis force torque sensor |
| US10732061B2 (en) * | 2017-09-07 | 2020-08-04 | X Development Llc | Unibody flexure design for displacement-based force/torque sensing |
| US10732060B2 (en) | 2018-08-15 | 2020-08-04 | X Development Llc | Force/torque sensor with hardstops to limit overloading a flexure |
| US12214488B2 (en) * | 2019-09-03 | 2025-02-04 | Shanghai Flexiv Robotics Technology Co., Ltd. | Robotic arm and robot |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2985018A (en) * | 1956-10-22 | 1961-05-23 | North American Aviation Inc | Vibration wave distance measuring device |
| US3140612A (en) * | 1961-09-08 | 1964-07-14 | Electro Sonic Systems Inc | Ultrasonic sensor device |
| US3303694A (en) * | 1964-03-19 | 1967-02-14 | Fairbanks Morse Inc | Load measuring system |
| FR1514156A (fr) * | 1966-11-08 | 1968-02-23 | Realisations Ultrasoniques Sa | Appareil de mesure de niveaux par réflexion d'impulsions ultrasonores |
| US3428139A (en) * | 1968-06-10 | 1969-02-18 | Earl C Nolan | Ultrasonic type net weight load indicator for vehicles |
| US3921445A (en) * | 1973-10-15 | 1975-11-25 | Stanford Research Inst | Force and torque sensing method and means for manipulators and the like |
| DE3245453A1 (de) * | 1982-12-08 | 1984-09-27 | Károly Dr.-Ing. Budapest Bretz | Messplattform fuer differentielle kraftanalyse |
-
1985
- 1985-07-22 US US06/757,360 patent/US4704909A/en not_active Expired - Lifetime
-
1986
- 1986-04-07 DE DE8686302566T patent/DE3684194D1/de not_active Expired - Lifetime
- 1986-04-07 EP EP86302566A patent/EP0210717B1/en not_active Expired
- 1986-04-30 JP JP61100801A patent/JPS6225227A/ja active Granted
-
1992
- 1992-10-07 SG SG1032/92A patent/SG103292G/en unknown
-
1993
- 1993-08-12 HK HK833/93A patent/HK83393A/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005315891A (ja) * | 2004-04-28 | 2005-11-10 | Senstronic Deutschland Gmbh | 光学式測定装置 |
| JP2017102012A (ja) * | 2015-12-01 | 2017-06-08 | 日本精工株式会社 | 力覚センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0210717A3 (en) | 1988-10-12 |
| DE3684194D1 (de) | 1992-04-16 |
| EP0210717B1 (en) | 1992-03-11 |
| SG103292G (en) | 1992-12-24 |
| JPH0580971B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-11 |
| EP0210717A2 (en) | 1987-02-04 |
| HK83393A (en) | 1993-08-20 |
| US4704909A (en) | 1987-11-10 |
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