JPS62244631A - 複合積層セラミツク部品の製造方法 - Google Patents

Info

Publication number

JPS62244631A

JPS62244631A JP61089319A JP8931986A JPS62244631A JP S62244631 A JPS62244631 A JP S62244631A JP 61089319 A JP61089319 A JP 61089319A JP 8931986 A JP8931986 A JP 8931986A JP S62244631 A JPS62244631 A JP S62244631A

Authority

JP

Japan

Prior art keywords

sheet

raw

dielectric

insulator

forming

Prior art date

1986-04-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 239000000919 ceramic Substances 0.000 title claims description 29
• 239000002131 composite material Substances 0.000 title claims description 26
• 238000004519 manufacturing process Methods 0.000 title claims description 10
• 239000012212 insulator Substances 0.000 claims description 35
• 229910052751 metal Inorganic materials 0.000 claims description 27
• 239000002184 metal Substances 0.000 claims description 27
• 239000004020 conductor Substances 0.000 claims description 16
• 238000000034 method Methods 0.000 claims description 11
• 238000010304 firing Methods 0.000 claims description 3
• 239000000126 substance Substances 0.000 claims description 2
• 239000003990 capacitor Substances 0.000 description 23
• 239000000463 material Substances 0.000 description 13
• 239000003989 dielectric material Substances 0.000 description 8
• 239000000758 substrate Substances 0.000 description 6
• 238000005245 sintering Methods 0.000 description 5
• 239000011230 binding agent Substances 0.000 description 3
• 230000015572 biosynthetic process Effects 0.000 description 3
• 238000006243 chemical reaction Methods 0.000 description 3
• 239000000203 mixture Substances 0.000 description 3
• 239000003960 organic solvent Substances 0.000 description 3
• 239000004014 plasticizer Substances 0.000 description 3
• 239000000843 powder Substances 0.000 description 3
• 238000007639 printing Methods 0.000 description 3
• 239000002002 slurry Substances 0.000 description 3
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
• 239000010953 base metal Substances 0.000 description 2
• 150000001875 compounds Chemical class 0.000 description 2
• 238000005336 cracking Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 229910052737 gold Inorganic materials 0.000 description 2
• 230000010354 integration Effects 0.000 description 2
• 239000007769 metal material Substances 0.000 description 2
• ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
• 229910052763 palladium Inorganic materials 0.000 description 2
• 229910052697 platinum Inorganic materials 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• 229910052709 silver Inorganic materials 0.000 description 2
• 239000000956 alloy Substances 0.000 description 1
• 229910045601 alloy Inorganic materials 0.000 description 1
• CNLWCVNCHLKFHK-UHFFFAOYSA-N aluminum;lithium;dioxido(oxo)silane Chemical compound [Li+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O CNLWCVNCHLKFHK-UHFFFAOYSA-N 0.000 description 1
• 229910052661 anorthite Inorganic materials 0.000 description 1
• 238000001354 calcination Methods 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 229910052878 cordierite Inorganic materials 0.000 description 1
• 238000002788 crimping Methods 0.000 description 1
• 238000005520 cutting process Methods 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• GWWPLLOVYSCJIO-UHFFFAOYSA-N dialuminum;calcium;disilicate Chemical compound [Al+3].[Al+3].[Ca+2].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] GWWPLLOVYSCJIO-UHFFFAOYSA-N 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
• KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
• 238000007606 doctor blade method Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 229910000174 eucryptite Inorganic materials 0.000 description 1
• 229910052839 forsterite Inorganic materials 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000010030 laminating Methods 0.000 description 1
• 238000003475 lamination Methods 0.000 description 1
• YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
• HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
• 239000011656 manganese carbonate Substances 0.000 description 1
• 235000006748 manganese carbonate Nutrition 0.000 description 1
• 229910000016 manganese(II) carbonate Inorganic materials 0.000 description 1
• 239000011812 mixed powder Substances 0.000 description 1
• 229910052863 mullite Inorganic materials 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
• 229920006267 polyester film Polymers 0.000 description 1
• 238000003825 pressing Methods 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• 238000007650 screen-printing Methods 0.000 description 1
• 238000007569 slipcasting Methods 0.000 description 1
• 229910052642 spodumene Inorganic materials 0.000 description 1

Cited By (6)