JPS62238333A - Manufacture of ultrathin austenitic stainless steel sheet for water slicer - Google Patents
Manufacture of ultrathin austenitic stainless steel sheet for water slicerInfo
- Publication number
- JPS62238333A JPS62238333A JP7914986A JP7914986A JPS62238333A JP S62238333 A JPS62238333 A JP S62238333A JP 7914986 A JP7914986 A JP 7914986A JP 7914986 A JP7914986 A JP 7914986A JP S62238333 A JPS62238333 A JP S62238333A
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- cold rolling
- austenitic stainless
- annealing
- strength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000963 austenitic stainless steel Inorganic materials 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title abstract 2
- 238000005097 cold rolling Methods 0.000 claims abstract description 24
- 238000005096 rolling process Methods 0.000 claims abstract description 19
- 238000000137 annealing Methods 0.000 claims abstract description 14
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 3
- 239000012535 impurity Substances 0.000 claims abstract description 3
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 3
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 10
- 229910000831 Steel Inorganic materials 0.000 abstract description 6
- 239000010959 steel Substances 0.000 abstract description 6
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 25
- 229910000734 martensite Inorganic materials 0.000 description 10
- 229910001566 austenite Inorganic materials 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000012733 comparative method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 238000009864 tensile test Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000003483 aging Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009749 continuous casting Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000003389 potentiating effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
Landscapes
- Heat Treatment Of Steel (AREA)
- Heat Treatment Of Sheet Steel (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、高強度でかつ強度の面内異方性が小さいウェ
ハスライサ用極薄オーステナイト・系ステンレス鋼板、
特にＳｉ ウェハスライサ用素材に適したステンレス鋼
板の製造方法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention provides an ultra-thin austenitic stainless steel sheet for wafer slicers that has high strength and small in-plane anisotropy of strength;
In particular, the present invention relates to a method of manufacturing a stainless steel plate suitable as a material for a Si wafer slicer.
Ｓｉ ウェハスライサ用素材としては、高強度かつ高耐
錆性の点から準安定オーステナイト系ステンレス鋼の橿
薄板が使用されている。Ｓｉ ウェハスライサは、第１
図に示すように固定ボルト１によって固定されバネのつ
いた張り上げボルト２によって張力を加え張り上げられ
、ステンレス鋼板３の内側に粒状のダイヤモンドを接着
した内周刃４でＳｉインゴット５をスライスしてウェハ
にする（以下、これをウェハ切断と言う）。このウェハ
スライサは強度が低いとウェハ切断中に内周刃が変形し
ウェハにそりを生じさせる。また、強度の面内異方性が
大きいと張り上げ時に平坦度が悪くなり、精度の高いウ
ェハ切断が行えない。そのため高強度でかつ強度の面内
異方性が小さいＳｉウェハスライサ用素材の開発が強く
要望されていた。As the material for the Si wafer slicer, a thin plate of metastable austenitic stainless steel is used because of its high strength and high rust resistance. The Si wafer slicer
As shown in the figure, the Si ingot 5 is fixed by a fixing bolt 1 and tensioned by a spring-loaded tensioning bolt 2, and the Si ingot 5 is sliced with an inner blade 4 having granular diamonds adhered to the inside of a stainless steel plate 3. (hereinafter referred to as wafer cutting). If the strength of this wafer slicer is low, the inner peripheral blade will deform while cutting the wafer, causing the wafer to warp. Furthermore, if the in-plane anisotropy of the strength is large, the flatness will be poor during tensioning, making it impossible to cut the wafer with high precision. Therefore, there has been a strong demand for the development of a material for Si wafer slicers that has high strength and low in-plane anisotropy of strength.
従来の準安定オーステナイト系ステンレス鋼板を高強度
化する方法としては、焼鈍板に調質圧延等の冷間加工を
施して加工硬化させるとともに加工誘起マルテンサイト
を生成させる方法（例えば、鉄と鋼−６７（１９８１）
Ｓ６１９）、調質圧延後に更にマルテンサイトが消滅し
ない低温（例えば、２００℃から５５０℃）で熱処理し
て時効硬化させる方法〔例えば、日本金属学会誌２１
（１９５Ｂ）５８３〕が知られている。しかし、これ
らの方法はいずれも高強度化後の強度の面内異方性につ
いては考慮されていない。Conventional methods for increasing the strength of metastable austenitic stainless steel sheets include cold working such as temper rolling on annealed sheets to work harden them and generate work-induced martensite (for example, iron-to-steel steel). 67 (1981)
S619), a method of aging hardening by heat treatment at a low temperature (e.g., 200°C to 550°C) where martensite does not disappear after temper rolling [e.g., Journal of the Japan Institute of Metals 21
(195B)583] is known. However, none of these methods takes into account the in-plane anisotropy of strength after increasing the strength.
準安定オーステナイト系ステンレス鋼の焼鈍板を調質圧
延により強化し、または、調質圧延条件に時効硬化させ
ると高強度は得られるが、これをＳｉ等のウニハスライ
ザとして用いると強度の面内異方性が大きい場合には、
張り」二げ時の平坦度が悪くなるため、精度の高いウェ
ハ切断が行えないという問題があった。High strength can be obtained by strengthening an annealed plate of metastable austenitic stainless steel by temper rolling or age-hardening it under temper rolling conditions, but when used as a unifacial riser made of Si, etc., the in-plane anisotropy of strength occurs. If the gender is large,
There is a problem in that highly accurate wafer cutting cannot be performed because the flatness during tensioning and cutting becomes poor.
本発明者は、以上の問題点を解決した高強度でかつ強度
の面内異方性が小さいスライサ用極薄オーステナイト系
ステンレス鋼板の製造方法を提供することを目的とする
。The present inventor aims to provide a method for manufacturing an ultra-thin austenitic stainless steel plate for slicers that has high strength and small in-plane anisotropy of strength, which solves the above problems.
〔問題点を解決するための手段および作用〕本発明は、
この目的のために製造条件を種々検討した結果、冷延お
よび焼鈍回数、最終焼鈍前の２回の冷延における圧下配
分と調質圧延条件を適切に組み合わせることによりこれ
を達成した。[Means and effects for solving the problems] The present invention has the following features:
As a result of examining various manufacturing conditions for this purpose, this was achieved by appropriately combining the number of cold rolling and annealing, the reduction distribution in the two cold rollings before the final annealing, and the temper rolling conditions.
本発明の要旨は、重量％にて、Ｃ； ０．０１〜０．２
％、Ｓｉ；０．１〜２％、Ｍｎ：０．１〜４％、Ｎｉ；
５〜ｌ１％、Ｃｒ；１５〜２０％、Ｍｏ ；０．０５〜
２．５％、Ｎ ； ０．０１〜０．３％を含有し残部ｆ
ｅｅおよび不可避的不純物からなり、かつ（１）式に示
すＭｄ、。が０〜＋８０℃の範囲の組成にある準安定オ
ーステナイト系ステンレス鋼の熱延板または熱延焼鈍板
に冷延および焼鈍を２回以上繰り返して施し、最終焼鈍
前の２回の冷延における冷延率の比Ｒ（１回目冷延率／
２回目冷延率）を０．８以上とし、ついで冷延率が４０
％以上の調質圧延を行うことを特徴とするウェハスライ
サ用極薄オーステナイト系ステンレス鋼板の製造方法で
ある。The gist of the present invention is that in weight %, C: 0.01-0.2
%, Si; 0.1-2%, Mn: 0.1-4%, Ni;
5-11%, Cr; 15-20%, Mo; 0.05-
2.5%, N; Contains 0.01-0.3%, balance f
Md consisting of ee and inevitable impurities and represented by formula (1). A hot-rolled or hot-rolled annealed sheet of metastable austenitic stainless steel with a composition in the range of 0 to +80°C is subjected to cold rolling and annealing two or more times, and Rolling ratio ratio R (first cold rolling ratio/
The second cold rolling rate) is set to 0.8 or more, and then the cold rolling rate is set to 40.
This is a method for manufacturing an ultra-thin austenitic stainless steel plate for wafer slicer, which is characterized by performing temper rolling of 10% or more.
Ｍａ ：Ｉ Ｏ＝ ５５１−４６２ （ｃχ十Ｎχ）−
９，２Ｓｉχ−８，ＩＭｎχ−２９Ｎ ｉχ−１３，７
Ｃｒχ−１８，５ＭｏＸ −（１１以
下、本発明の構成要件の限定理由について説明する。尚
、本発明において鋼板とはストリップとシートの双方を
意味する。Ma :I O= 551-462 (cχ 1 Nχ)-
9,2Siχ-8,IMnχ-29N iχ-13,7
Crχ-18,5MoX - (11 Below, the reasons for limiting the constituent elements of the present invention will be explained. In the present invention, the steel plate means both a strip and a sheet.
Ｃは、準安定オーステナイト系ステンレス鋼板において
加工により誘起されたマルテンサイトの強力な固溶硬化
元素であるが、この効果は０．０１％未満では十分でな
く、また０、 ２％を超えるとオーステナイトが安定化
しすぎるため加工誘起マルテンサイトが十分生成されな
い。従って、Ｃを０．０１〜０．２％とした。C is a strong solid solution hardening element for martensite induced by processing in metastable austenitic stainless steel sheets, but this effect is not sufficient if it is less than 0.01%, and if it exceeds 0.2%, it will harden austenite. is too stabilized, and deformation-induced martensite is not sufficiently generated. Therefore, C was set at 0.01 to 0.2%.
Ｓｉ は、０，１％未満では脱酸が不十分であり、２％
を超えるとフェライ）ｌｆが増加し熱間加工性を劣化さ
せる。従って、Ｓｉを０．１〜２％とした。If Si is less than 0.1%, deoxidation is insufficient, and if Si is less than 2%
If it exceeds 10%, the ferrite) lf increases and hot workability deteriorates. Therefore, Si was set at 0.1 to 2%.
Ｍｎは、０．１％未満では脱酸が不十分であり、４％を
超えるとオーステナイトが安定化しすぎるため加工誘起
マルテンサイトが十分生成されない。When Mn is less than 0.1%, deoxidation is insufficient, and when it exceeds 4%, austenite is too stabilized and deformation-induced martensite is not sufficiently produced.
従って、Ｍｎを０．１〜４％とした。Therefore, Mn was set at 0.1 to 4%.
Ｎｉは、有力なオーステナイト安定化元素であり、５％
未満では焼鈍後に完全なオーステナイト組織が得られず
、ｌ１％を超えるとオーステナイトが安定化しすぎるた
め加工誘起マルテンサイトが十分生成されない。従って
、Ｎｉを５〜１１％とし、望ましくは６〜８％未満とし
た。Ni is a potent austenite stabilizing element, with 5%
If it is less than 1%, a complete austenite structure cannot be obtained after annealing, and if it exceeds 11%, austenite becomes too stable and deformation-induced martensite is not sufficiently generated. Therefore, the Ni content is 5 to 11%, preferably less than 6 to 8%.
Ｃｒは、ステンレス鋼としてその耐錆性の点から１５％
未満では不十分であり、また２０％を超えるとフェライ
トｉが増加し熱間加工性を劣化させる。従って、Ｃｒを
１５〜２０％とした。Cr is 15% for stainless steel due to its rust resistance.
If it is less than 20%, it is insufficient, and if it exceeds 20%, ferrite i increases and hot workability deteriorates. Therefore, Cr was set at 15 to 20%.
Ｍｏは、耐錆性を向上させる元素であるが、その効果は
０．０５％未満では不十分である。また、Ｍｏは高価な
元素であり多量に添加するとコストが高くなる。従って
、Ｍｏを０，０５〜２．５％とした。Mo is an element that improves rust resistance, but its effect is insufficient if it is less than 0.05%. Further, Mo is an expensive element, and adding a large amount increases the cost. Therefore, Mo was set at 0.05 to 2.5%.
Ｎは、準安定オーステナイト系ステンレス鋼板において
加工により誘起されノこマルテンサイトの強力な固溶硬
化元素であるが、この効果は０．０１％未満では十分で
なく、また０、 ３％を超えると溶鋼中のブローホール
が多くなり製造上困難をきたす。従って、Ｎを０．０１
〜０．３％とした。N is a strong solid solution hardening element of martensite induced by processing in metastable austenitic stainless steel sheets, but this effect is not sufficient when it is less than 0.01%, and when it exceeds 0.3% There are many blowholes in the molten steel, which causes manufacturing difficulties. Therefore, N is 0.01
~0.3%.
Ｍ ｄ ３０は、本発明法の対象とするオーステナイ（
−系ステンレス鋼板のオーステナイト安定度を示す指標
となり、本ステンレス鋼板が加工誘起マルテンサイトを
利用して高強度を得るための重要な因子である。Ｍｄ３
゜が０℃未満ではオーステナイトが安定化しすぎるため
加工によるマルテンサイト組織が得難く高強度が得られ
ない。また、Ｍｄ３゜が＋８０°Ｃを超えるとオーステ
ナイトが不安定化しすぎるため加工によるマルテンサイ
トが過度に発生し急激に硬化するため目的の硬さと板厚
を保持した状態で精度の高い圧延加工が行えない。従っ
て、Ｍ ｄ ３゜の範囲をＯ〜＋８０℃とし、望ましく
は＋１５〜＋６０℃とした。M d 30 is the austenite (
It serves as an indicator of the austenite stability of the −-based stainless steel sheet, and is an important factor for this stainless steel sheet to obtain high strength by utilizing deformation-induced martensite. Md3
If the temperature is less than 0°C, austenite becomes too stable, making it difficult to obtain a martensitic structure through processing, making it impossible to obtain high strength. In addition, if Md3° exceeds +80°C, austenite becomes too unstable and martensite is generated excessively during processing and hardens rapidly, making it impossible to perform highly accurate rolling while maintaining the desired hardness and thickness. do not have. Therefore, the range of M d 3° is O to +80°C, preferably +15 to +60°C.
熱延板の冷延は、熱延ままあるいは焼鈍した後に行う。Cold rolling of the hot-rolled sheet is carried out either as hot-rolled or after annealing.
調質圧延前の冷延と焼鈍回数は、１回だけに比べ２回収
」二の方が集合組織がランダム化し機械的性質の面内異
方性が小さくなるが、本発明者は更に最終焼鈍前の２回
の冷延における冷延率の比Ｒ（１回目冷延率／２回目冷
延率）を０，８以上とすることにより集合組織がいっそ
う顕著にランダム化し面内異方性が小さくなり、その結
果調質圧延後の強度の面内異方性が著しく小さい鋼板が
得られることを見出しまた。従って、冷延の圧下配分を
このように限定した。The number of times of cold rolling and annealing before temper rolling is 2 times compared to just 1 time.The texture is more randomized and the in-plane anisotropy of mechanical properties is smaller. By setting the ratio R of the cold rolling rates in the previous two cold rollings (first cold rolling rate/second cold rolling rate) to 0.8 or more, the texture becomes even more prominently randomized and the in-plane anisotropy is reduced. They also discovered that as a result, a steel plate with significantly small in-plane anisotropy of strength after temper rolling could be obtained. Therefore, the cold rolling reduction distribution was limited in this way.
調質圧延率は、４０％未満ではウェハスライサに要求さ
れる１ ３０ ｋｇ／ ＩＩＩ”以上の引張強度が得ら
れず、ウェハ切断中に内周刃が変形しウェハにそりを生
じさせる。従って、調質圧延率を４０％以上とした。尚
、調質圧延後の板厚は−、０゜１龍未満では高強度であ
ってもウェハ切断中に内周刃が変形しウェハにそりを生
じさせ易い。０．３關を超えるとウェハ切断でスライサ
自体による切断代が多く歩留が悪い。従って、調質圧延
後の板厚ば０、１〜０．３ ＋ｎが望ましい。If the temper rolling rate is less than 40%, the tensile strength of 130 kg/III" or more required for a wafer slicer cannot be obtained, and the inner peripheral blade deforms during wafer cutting, causing warpage on the wafer. Therefore, The temper rolling ratio was set to 40% or more.If the plate thickness after temper rolling is less than -0.1 mm, the inner peripheral blade will deform during wafer cutting even if the strength is high, and the wafer will warp. If the thickness exceeds 0.3, the cutting allowance by the slicer itself will be large during wafer cutting, resulting in poor yield.Therefore, it is desirable that the plate thickness after temper rolling be 0.1 to 0.3+n.
かくして、上記のような条件で準安定オーステナイト系
ステンレス鋼板を製造すれば、高強度でかつ強度の面内
異方性の著しく小さいウェハスライサ用極薄オーステナ
イト系ステンレス鋼板が得られる。Thus, if a metastable austenitic stainless steel plate is produced under the above conditions, an ultrathin austenitic stainless steel plate for a wafer slicer that has high strength and extremely small in-plane anisotropy of strength can be obtained.
第１表に示すようなオーステナイト系ステンレス鋼を電
気炉で溶製しＡＯＤ炉で精錬し、連続鋳造によってスラ
ブとした後、熱間圧延により板厚３龍の熱延コイルとし
た。ついで、熱延板の酸洗または熱延板の焼鈍・酸洗を
行った後、冷延および焼鈍を１〜３回繰り返し、１０５
０〜１１００℃の最終焼鈍を施し、続いて調質圧延を行
い、ウェハスライサ用素材とした。Austenitic stainless steel as shown in Table 1 was melted in an electric furnace, refined in an AOD furnace, made into a slab by continuous casting, and then made into a hot-rolled coil with a plate thickness of 3 mm by hot rolling. Then, after pickling the hot-rolled sheet or annealing and pickling the hot-rolled sheet, cold rolling and annealing are repeated 1 to 3 times, and 105
Final annealing was performed at 0 to 1100°C, followed by skin pass rolling to obtain a material for a wafer slicer.
本発明法および比較法による製造条件と引張強さ、およ
び強度の面内異方性を第２表に示す。引張強さは、圧延
方向と平行な方向より引張試験片を採取し、ＪＩＳＺ２
２４１に従い測定した。強度の面内異方性は、圧延方向
に対して平行・４５゜・直角方向より引張試験片を採取
し、各試験片の０．２％耐力をＪＩＳＺ２２４１に従い
測定した後、これらの３方向の内、０．２％耐力の最も
大きい値から最も小さい値を引いた値として評価した。Table 2 shows the manufacturing conditions, tensile strength, and in-plane anisotropy of strength according to the method of the present invention and the comparative method. Tensile strength was determined by taking a tensile test piece from a direction parallel to the rolling direction and using JIS Z2
Measured according to 241. The in-plane anisotropy of strength is determined by taking tensile test pieces from parallel, 45°, and perpendicular directions to the rolling direction, measuring the 0.2% yield strength of each test piece according to JIS Z2241, and then measuring the 0.2% yield strength of each test piece in accordance with JIS Z2241. It was evaluated as the value obtained by subtracting the smallest value from the largest value of 0.2% proof stress.
第２表より、本発明法は比較法に比べ高強度でかつ強度
の面内異方性が小さくウェハスライサ用素材として非常
に優れていることがわかる。From Table 2, it can be seen that the method of the present invention has higher strength and smaller in-plane anisotropy of strength than the comparative method, and is very excellent as a material for wafer slicers.
以上のことから明らかな如く、本発明法により極薄オー
ステナイト系ステンレス鋼板を製造すれば、高強度でか
つ強度の面内異方性が小さく、ウニハスライナに張力を
加えて張り上げても平坦度が非常に優れたウェハスライ
サ用素材が得られる。As is clear from the above, if an ultra-thin austenitic stainless steel sheet is produced by the method of the present invention, it will have high strength and small in-plane anisotropy of strength, and will have extremely flatness even when tension is applied to the sea urchin liner. A material for a wafer slicer with excellent properties can be obtained.
従って、ＳｉやＧａＡｓインゴットの精度の高いウェハ
切断が可能となり、ウェハの歩留が著しく改善され生産
性も飛躍的に向上する。Therefore, highly accurate wafer cutting of Si or GaAs ingots is possible, and the yield of wafers is significantly improved and productivity is also dramatically improved.
第１図はウェハスライサの構造および使用の説明図であ
る。FIG. 1 is an explanatory diagram of the structure and use of a wafer slicer.
Claims (1)
２％、Ｍｎ：０．１〜４％、Ｎｉ；５〜１１％、Ｃｒ；
１５〜２０％、Ｍｏ；０．０５〜２．５％、Ｎ；０．０
１〜０．３％を含有し残部Ｆｅおよび不可避的不純物か
らなり、かつ（１）式に示すＭｄ＿３＿０が０〜＋８０
℃の範囲の組成にある準安定オーステナイト系ステンレ
ス鋼の熱延板または熱延焼鈍板に冷延および焼鈍を２回
以上繰り返して施し、最終焼鈍前の２回の冷延における
冷延率の比Ｒ（１回目冷延率／２回目冷延率）を０．８
以上とし、ついで冷延率が４０％以上の調質圧延を行う
ことを特徴とするウェハスライサ用極薄オーステナイト
系ステンレス鋼板の製造方法。 Ｍｄ＿３＿０＝５５１−４６２（Ｃ％＋Ｎ％）−９．２
Ｓｉ％−８．１Ｍｎ％−２９Ｎｉ％−１３．７Ｃｒ％−
１８．５Ｍｏ％…（１）[Claims] In weight %, C; 0.01 to 0.2%, Si; 0.1 to 0.2%.
2%, Mn: 0.1-4%, Ni; 5-11%, Cr;
15-20%, Mo; 0.05-2.5%, N; 0.0
1 to 0.3%, the balance consists of Fe and unavoidable impurities, and Md_3_0 shown in formula (1) is 0 to +80
Cold rolling and annealing are repeated two or more times on a hot-rolled or hot-rolled annealed sheet of metastable austenitic stainless steel having a composition in the range of °C, and the ratio of the cold rolling rate in the two cold rollings before the final annealing is calculated. R (1st cold rolling rate/2nd cold rolling rate) is 0.8
A method for producing an ultra-thin austenitic stainless steel sheet for a wafer slicer, which is characterized in that the above is followed by temper rolling at a cold rolling rate of 40% or more. Md_3_0=551-462(C%+N%)-9.2
Si%-8.1Mn%-29Ni%-13.7Cr%-
18.5Mo%...(1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7914986A JPS62238333A (en) | 1986-04-08 | 1986-04-08 | Manufacture of ultrathin austenitic stainless steel sheet for water slicer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7914986A JPS62238333A (en) | 1986-04-08 | 1986-04-08 | Manufacture of ultrathin austenitic stainless steel sheet for water slicer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62238333A true JPS62238333A (en) | 1987-10-19 |
| JPH0244891B2 JPH0244891B2 (en) | 1990-10-05 |
Family
ID=13681899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7914986A Granted JPS62238333A (en) | 1986-04-08 | 1986-04-08 | Manufacture of ultrathin austenitic stainless steel sheet for water slicer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62238333A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03240934A (en) * | 1990-02-16 | 1991-10-28 | Nippon Stainless Steel Co Ltd | High-ductility hard stainless steel |
| CN103547695A (en) * | 2011-04-18 | 2014-01-29 | 奥托库姆普联合股份公司 | Method for manufacturing and utilizing ferritic-austenitic stainless steel |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5314549A (en) * | 1993-03-08 | 1994-05-24 | Nkk Corporation | High strength and high toughness stainless steel sheet and method for producing thereof |
| DE4406052A1 (en) * | 1993-11-30 | 1995-06-01 | Nippon Kokan Kk | Stainless steel sheet and process for its manufacture |
| KR100219146B1 (en) * | 1996-06-11 | 1999-09-01 | 윤종용 | Ultrasonic motor with piezoelectric element for press |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52104416A (en) * | 1976-03-01 | 1977-09-01 | Kawasaki Steel Co | Production of austenitic stainless steel sheets |
| JPS5346421A (en) * | 1976-10-08 | 1978-04-26 | Sumitomo Electric Ind Ltd | Seawater resistant stainless steel |
| JPS5418648A (en) * | 1977-07-13 | 1979-02-10 | Hitachi Denshi Ltd | Digital differential analyzer |
| JPS55115927A (en) * | 1979-02-28 | 1980-09-06 | Nippon Steel Corp | Production of austenite-base stainless steel plate which does not cause earing |
| JPS5728740A (en) * | 1980-07-19 | 1982-02-16 | Hiroshi Inaba | Foaming polystyrene vessel |
-
1986
- 1986-04-08 JP JP7914986A patent/JPS62238333A/en active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52104416A (en) * | 1976-03-01 | 1977-09-01 | Kawasaki Steel Co | Production of austenitic stainless steel sheets |
| JPS5346421A (en) * | 1976-10-08 | 1978-04-26 | Sumitomo Electric Ind Ltd | Seawater resistant stainless steel |
| JPS5418648A (en) * | 1977-07-13 | 1979-02-10 | Hitachi Denshi Ltd | Digital differential analyzer |
| JPS55115927A (en) * | 1979-02-28 | 1980-09-06 | Nippon Steel Corp | Production of austenite-base stainless steel plate which does not cause earing |
| JPS5728740A (en) * | 1980-07-19 | 1982-02-16 | Hiroshi Inaba | Foaming polystyrene vessel |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03240934A (en) * | 1990-02-16 | 1991-10-28 | Nippon Stainless Steel Co Ltd | High-ductility hard stainless steel |
| CN103547695A (en) * | 2011-04-18 | 2014-01-29 | 奥托库姆普联合股份公司 | Method for manufacturing and utilizing ferritic-austenitic stainless steel |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0244891B2 (en) | 1990-10-05 |
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