JPS62232953A - Resistor for hybrid integrated circuit - Google Patents

Resistor for hybrid integrated circuit

Info

Publication number
JPS62232953A
JPS62232953A JP7698386A JP7698386A JPS62232953A JP S62232953 A JPS62232953 A JP S62232953A JP 7698386 A JP7698386 A JP 7698386A JP 7698386 A JP7698386 A JP 7698386A JP S62232953 A JPS62232953 A JP S62232953A
Authority
JP
Japan
Prior art keywords
resistor
resistance
resistance value
resistors
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7698386A
Other languages
Japanese (ja)
Inventor
Kenichi Ono
大野 兼一
Yoshitaka Masumoto
桝元 義孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7698386A priority Critical patent/JPS62232953A/en
Publication of JPS62232953A publication Critical patent/JPS62232953A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To easily obtain a resistor having the desired resistance value by a method wherein two kinds of resistors, consisting of the resistor material having different coefficient of resistance temperature, are compounded in series and the resistance value of each resistor is adjusted. CONSTITUTION:The two kinds of resistors 1a and 1b, consisting of the resistance materials having different resistance temperature coefficients, are compounded in series. The resistance values of said resistors 1a and 1b are adjusted by performing a laser trimming and the like. As a result, the resistor having the desired combined resistance temperature coefficient and the combined resistance can be obtained. Accordingly, the resistor having the desired resistance value can be obtained easily.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、混成集積回路用抵抗体に関し、特に、その抵
抗温度係数が調整された抵抗体に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a resistor for a hybrid integrated circuit, and particularly to a resistor whose temperature coefficient of resistance is adjusted.

〔従来の技術〕[Conventional technology]

従来、混成集積回路用抵抗体は、その抵抗温度係数(以
後TCRと記す)は抵抗体材料の物理的特性に依存して
一義的に決定されていた。すなわち、第2図は従来の混
成集積回路用抵抗体の一例を示す平面図であり、図にお
いて、Ta′!たは几hOなどの抵抗体材料を、絶縁基
板(紙面)の上に所定の形に形成した抵抗体1の両端に
、電極2a 、 2bをそれぞれ設け、所望の抵抗値を
得るために、レーザ光の照射またはサンドプラスト法な
どにより抵抗体1の1部分3を切削除去していた。
Conventionally, the temperature coefficient of resistance (hereinafter referred to as TCR) of a resistor for a hybrid integrated circuit has been uniquely determined depending on the physical properties of the resistor material. That is, FIG. 2 is a plan view showing an example of a conventional resistor for a hybrid integrated circuit, and in the figure, Ta'! Electrodes 2a and 2b are respectively provided at both ends of a resistor 1 made of a resistor material such as HO or HO formed in a predetermined shape on an insulating substrate (on the paper), and a laser beam is applied to obtain a desired resistance value. One portion 3 of the resistor 1 was removed by irradiation with light or sand blasting.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上述のようにして、所望の抵抗値の抵抗体を得ることは
できるが、抵抗温度係数(TC几)は、抵抗体の材料の
物理的特性により一義的に決定してしまうので、所望の
TCI(を得ようとする場合、そのT CRを有する抵
抗体材料を選択しなければならないという欠点がある。
Although it is possible to obtain a resistor with a desired resistance value as described above, the temperature coefficient of resistance (TC) is uniquely determined by the physical characteristics of the material of the resistor. (If you try to obtain (), there is a drawback that you have to select a resistor material that has that T CR.

しかして、た゛またま所望のTCルをもつ抵抗体材料を
見出すことができたとしても、それによる所望の抵抗値
の抵抗体を得るには、形が大き過ぎるとか、または、電
力耐量がもたない、安定性に欠けるなどの問題が発生す
るという欠点があった。
Even if it were possible to find a resistor material with the desired TCL, the shape would be too large or the power capacity would be insufficient to obtain a resistor with the desired resistance value. However, there were disadvantages such as poor performance and lack of stability.

〔問題点を解決するための手段〕[Means for solving problems]

上記問題点に対し本発明では、’r c kLの異なる
2種類の抵抗体材料からなる抵抗体を直列に組合せ、そ
れぞれの抵抗体をレーザトリミングなどにより抵抗値調
整を行うと共に、組合せ全体として所望の抵抗値および
T CRを得るようにしている。
In order to solve the above problems, the present invention combines resistors made of two types of resistor materials with different 'r c kL in series, adjusts the resistance value of each resistor by laser trimming, etc. The resistance value and TCR are obtained.

〔実施例〕〔Example〕

次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例の平面図である。第1図にお
いて、la、lbはTCRの異なる抵抗体材料から作ら
れた抵抗体を示し、2a、2b、2cは抵抗体1a、l
bの両端に設けた電極を示す。3a。
FIG. 1 is a plan view of one embodiment of the present invention. In FIG. 1, la and lb indicate resistors made from different resistor materials of TCR, and 2a, 2b, and 2c represent resistors 1a and l.
The electrodes provided at both ends of b are shown. 3a.

3bはla、lbに設けた抵抗値調整用の切削部である
3b is a cutting portion provided at la and lb for resistance value adjustment.

抵抗体1a、lbおよびこれらの直列合成抵抗の抵抗温
度係数、さらに抵抗値調節後の抵抗値をαa。
αa is the resistance temperature coefficient of resistors 1a, lb and their series combined resistance, and the resistance value after resistance value adjustment.

αbおよび几a、凡すとし、抵抗調節時の温度(常温)
からΔT(”O)の温度変化があった場合の合成抵抗値
をRTとすれば、 R,7=几ar+Rb丁=Ra(1+αaΔT)−1b
(1+αbΔT)所望の合成抵抗値A1合成の抵抗温度
係数をBとすれば、 A=kLa十凡す となり、上の2式からRa、几すはつぎのように表わす
ことができる。
αb and 几a are assumed to be the temperature at the time of resistance adjustment (normal temperature)
If the combined resistance value when there is a temperature change of ΔT ("O) from , is RT, then R, 7 = 几ar + Rb ding = Ra (1 + αaΔT) - 1b
(1+αbΔT) Desired combined resistance value A1 If the combined resistance temperature coefficient is B, then A=kLa, and from the above two equations, Ra and L can be expressed as follows.

よって、上式から得られるkLa、Rbの値に第1図の
抵抗体1a、lbを調節することによシ、所望の合成抵
抗温度係数Bおよび所望の合成抵抗Aを有する抵抗体を
得ることができる。
Therefore, by adjusting the resistors 1a and lb in FIG. 1 to the values of kLa and Rb obtained from the above equation, a resistor having a desired composite resistance temperature coefficient B and a desired composite resistance A can be obtained. I can do it.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明によれば抵抗温度係数(’r
ca)の異なる抵抗体材料からなる2種類の抵抗体を直
列に合成することによシ、該2種類のTCRの中間のT
CR,の範囲内の所望のTC几をもち、かつ、所望の抵
抗値を有する抵抗体が容易に得られる。
As described above, according to the present invention, the temperature coefficient of resistance ('r
By combining two types of resistors made of different resistor materials in series, T
A resistor having a desired TC value within the range of CR and a desired resistance value can be easily obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の平面図、第2図は従来の混
成集積回路用抵抗体の一例を示す平面図である。 Lla、Ib””−−・抵抗体、2a、2b、2cm−
−−−一電極、3 、3a 、 3b・・・・・・抵抗
体切削部。
FIG. 1 is a plan view of an embodiment of the present invention, and FIG. 2 is a plan view showing an example of a conventional resistor for a hybrid integrated circuit. Lla, Ib””--Resistor, 2a, 2b, 2cm-
---One electrode, 3, 3a, 3b... Resistor cutting part.

Claims (1)

【特許請求の範囲】[Claims]  抵抗温度係数の異なる抵抗体材料からなる抵抗体を直
列に組合せて、レーザ光照射、サンドプラスト等の方法
により抵抗値調整が行われて所望の抵抗値とされると共
に、所望の抵抗温度係数を具備せしめられていることを
特徴とする混成集積回路用抵抗体。
Resistors made of resistor materials with different resistance temperature coefficients are combined in series, and the resistance value is adjusted by methods such as laser beam irradiation and sand blasting to obtain the desired resistance value. A resistor for a hybrid integrated circuit, characterized by comprising:
JP7698386A 1986-04-02 1986-04-02 Resistor for hybrid integrated circuit Pending JPS62232953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7698386A JPS62232953A (en) 1986-04-02 1986-04-02 Resistor for hybrid integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7698386A JPS62232953A (en) 1986-04-02 1986-04-02 Resistor for hybrid integrated circuit

Publications (1)

Publication Number Publication Date
JPS62232953A true JPS62232953A (en) 1987-10-13

Family

ID=13621012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7698386A Pending JPS62232953A (en) 1986-04-02 1986-04-02 Resistor for hybrid integrated circuit

Country Status (1)

Country Link
JP (1) JPS62232953A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266529A (en) * 1991-10-21 1993-11-30 Trw Inc. Focused ion beam for thin film resistor trim on aluminum nitride substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266529A (en) * 1991-10-21 1993-11-30 Trw Inc. Focused ion beam for thin film resistor trim on aluminum nitride substrates

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