JPS61156849A - Thick film resistance element - Google Patents

Abstract

PURPOSE:To facilitate the target of characteristics by trimming the titled element, and to improve the strength against power consumption, by a method wherein two resistors with different resistance values are made series via intermediate conductor. CONSTITUTION:This element is provided with a resistor 21 of larger resistance value and a resistor 23 of smaller resistance value formed in series with conductors 24, 25 via intermediate conductor 22. In trimming, in case of large deviation from the target value of characteristics, the resistor 21 is trimmed 26 to the neighborhood of the target value, and the resistor 23 is thereafter trimmed 26 to the center of the target value. This manner enables the sure trimming of even elements of characteristics with narrow target width. Besides, the resistance of the resistor becomes slow in variation, and the remaining width of trimming can be enlarged, resulting in the improvement in strength against power consumption.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a thick film resistor element, and in particular to one used as a funxie trimming resistor in a thick film substrate of a hybrid IC.

[Technical background of the invention and its problems]

Conventionally, a resistor element shown in FIG. 3, for example, has been used in a thick film substrate of a hybrid IC.

1 in the figure is a resistor provided between the first conductor 2 and the second conductor 3. This resistor l is trimmed in the width direction. Note that 4 in the figure indicates a trimming trace.

However, with conventional resistor elements, as trimming progresses, the rate at which the trimming depth and resistance value change (always increases) is not constant, and the rate of increase in resistance increases with respect to the trimming depth, so the desired characteristics cannot be achieved. Changes in sensitivity and makes it difficult to aim. t7't,) Since the remaining width of the resistor l after rimming is completed becomes narrower, it cannot withstand the power consumption.

For this reason, an improved nine-thick film resistive element as shown in FIGS. 4 to 6 has been proposed. FIG. 4 shows the resistor l trimmed at three points in the width direction. Fifth
The figure shows trimming with a narrower trimming width. Figure 6 shows the resistor l for the direction to be trimmed.
The width is partially widened. However, in each case, although some improvement is achieved, the above-mentioned problems cannot be fully resolved.

[Purpose of the invention]

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a thick film resistive element that can easily target the characteristics by trimming, and that can increase the remaining width of the rimming to improve resistance to power consumption. purpose.

[Summary of the invention]

In the present invention, at least a first resistor having a high resistance value and a second resistor having a low resistance value are formed in series between two conductors via an intermediate conductor, and parts of these resistors are trimmed. This feature is intended to make it easier to target the characteristics by trimming, and to improve resistance to power consumption by increasing the remaining width of trimming.

In the present invention, when trimming the resistor when the characteristic is far off from the target value, first trim the first resistor with a large resistance value to just before the target value of the characteristic, then trim the second resistor with a small resistance value. This is done by trimming the resistor so that it is centered.

[Embodiments of the invention] will be explained with reference to [Embodiments of the invention]. Here, FIG. 1 shows a plan view of the thick film resistive element before trimming, and FIG. 2 shows a plan view of the thick film resistive element after trimming.

21 in the figure has a resistance value of, for example, l0KJI? is the first resistor. An intermediate conductor 22 is connected to one end of this resistor 21.
A second resistor 23 with a resistance value of, for example, IKg
is connected. Further, the other end of the first resistor 21 is connected to the first conductor 24, and the other end of the second resistor 23 is connected to the second conductor 25. The resistor 23 is formed in series with the first and second conductors 24 and 25.

In a thick film resistive element having such a structure, trimming is performed when the characteristics deviate significantly from the target value, for example, as shown in FIG. That is, the first resistor 21 is trimmed to just before the target value (coarse U4m>). Next, the second resistor 23 is trimmed to the center of the target value (fine adjustment! 1). From the above, Trimming is completed. Note that 26 in the figure is a trimming trace.

According to the present invention, the resistance value is large (10xg
) The first resistor 21 and the second resistor with a small resistance value (1xg)
Since the resistor 23 is formed in series with the first conductor 24 and the second conductor 25, when trimming, if the characteristic value is far off from the desired value, the first resistor 21 is set to the target value. trim to near the second resistor 23.
If you trim to the center of the target value, you can reliably trim even those with characteristics that have a narrow target range. Incidentally, the relationship between the trimming depth (depth/width) at the time of trimming and the characteristic change situation is as shown in FIG.

In the figure, (a) indicates the area when the first resistor is trimmed, and ←) indicates the area when the second resistor is trimmed.

In addition, the first resistor 21, which has a large resistance value, is trimmed to close to the target value of the characteristic, and subsequent fine adjustments are made by trimming the second resistor 23. Since the resistance of the resistor 2S changes slowly, the remaining width for trimming can be increased, and the resistance to power consumption can be improved.

Furthermore, according to the present invention, since the first resistor 21 and the second resistor 2J are connected via the intermediate conductor 22, a stable resistor can be obtained.

In addition, although the above-mentioned Example described the case where the shape of the 1st and 2nd resistor is substantially the same, it is not limited to this. for example,
As shown in FIG. 7, the second resistor 31 may be formed wide in the trimming direction.

Further, in the above embodiment, the resistance values of the first and second resistors are 10KJ? , IKg has been described, but the present invention is not limited to this and various other cases can be considered. however,
As in the above embodiment, the ratio of the resistance values of the first and second resistors is 1.
When the value is 0, or around this value, it is preferable to finely adjust the second resistor.

Further, in the above embodiment, the case where two resistors are provided is described, but the present invention is not limited to this, and three or more resistors may be provided in series.

〔Effect of the invention〕

As described in detail above, according to the present invention, it is possible to provide a thick film resistive element that can easily target the characteristics by trimming, and can increase the remaining width of trimming to improve resistance to power consumption.

[Brief explanation of drawings]

FIG. 1 is a plan view of a thick film resistance element according to an embodiment of the present invention before trimming, FIG. 2 is a plan view of the same thick film resistance element after trimming, and FIG. 3 is a plan view of a conventional thick film resistance element. 4 to WjG are plan views of a conventional improved thick film resistive element, FIG. 7 is a plan view of a thick film resistive element according to another embodiment of the present invention, and FIG. 8 is a plan view of a thick film resistive element according to another embodiment of the present invention. FIG. 3 is a trimming characteristic diagram of the thick film resistive element according to FIG. 21.23.31...Resistor, 22...Intermediate conductor,
24.25...Conductor, 26...Trimming trace. Applicant's agent Patent attorney Takeshi Suzue Disciple 1
Figure 2 Section 3

Claims (1)

[Claims] A first resistor having a high resistance value and a second resistor having a low resistance value are formed in series between two conductors via an intermediate conductor, and a portion of these resistors is trimmed. Thick film resistive element.