JPS6222652B2 - - Google Patents

Info

Publication number
JPS6222652B2
JPS6222652B2 JP53014896A JP1489678A JPS6222652B2 JP S6222652 B2 JPS6222652 B2 JP S6222652B2 JP 53014896 A JP53014896 A JP 53014896A JP 1489678 A JP1489678 A JP 1489678A JP S6222652 B2 JPS6222652 B2 JP S6222652B2
Authority
JP
Japan
Prior art keywords
gas
microwave
waveguide
activated
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53014896A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54107875A (en
Inventor
Tsuneo Muranaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP1489678A priority Critical patent/JPS54107875A/ja
Publication of JPS54107875A publication Critical patent/JPS54107875A/ja
Publication of JPS6222652B2 publication Critical patent/JPS6222652B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP1489678A 1978-02-14 1978-02-14 Producing apparatus for activated gas Granted JPS54107875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1489678A JPS54107875A (en) 1978-02-14 1978-02-14 Producing apparatus for activated gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1489678A JPS54107875A (en) 1978-02-14 1978-02-14 Producing apparatus for activated gas

Publications (2)

Publication Number Publication Date
JPS54107875A JPS54107875A (en) 1979-08-24
JPS6222652B2 true JPS6222652B2 (OSRAM) 1987-05-19

Family

ID=11873748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1489678A Granted JPS54107875A (en) 1978-02-14 1978-02-14 Producing apparatus for activated gas

Country Status (1)

Country Link
JP (1) JPS54107875A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140513U (OSRAM) * 1987-03-06 1988-09-16

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49111873A (OSRAM) * 1973-02-28 1974-10-24
JPS5344795B2 (OSRAM) * 1974-12-18 1978-12-01
JPS52135878A (en) * 1976-05-10 1977-11-14 Agency Of Ind Science & Technol Plasma reaction apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140513U (OSRAM) * 1987-03-06 1988-09-16

Also Published As

Publication number Publication date
JPS54107875A (en) 1979-08-24

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