JPS5344795B2 - - Google Patents

Info

Publication number
JPS5344795B2
JPS5344795B2 JP14452174A JP14452174A JPS5344795B2 JP S5344795 B2 JPS5344795 B2 JP S5344795B2 JP 14452174 A JP14452174 A JP 14452174A JP 14452174 A JP14452174 A JP 14452174A JP S5344795 B2 JPS5344795 B2 JP S5344795B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14452174A
Other languages
Japanese (ja)
Other versions
JPS5171597A (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14452174A priority Critical patent/JPS5344795B2/ja
Publication of JPS5171597A publication Critical patent/JPS5171597A/ja
Publication of JPS5344795B2 publication Critical patent/JPS5344795B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP14452174A 1974-12-18 1974-12-18 Expired JPS5344795B2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14452174A JPS5344795B2 (OSRAM) 1974-12-18 1974-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14452174A JPS5344795B2 (OSRAM) 1974-12-18 1974-12-18

Publications (2)

Publication Number Publication Date
JPS5171597A JPS5171597A (OSRAM) 1976-06-21
JPS5344795B2 true JPS5344795B2 (OSRAM) 1978-12-01

Family

ID=15364262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14452174A Expired JPS5344795B2 (OSRAM) 1974-12-18 1974-12-18

Country Status (1)

Country Link
JP (1) JPS5344795B2 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376758A (en) * 1976-12-20 1978-07-07 Nippon Telegr & Teleph Corp <Ntt> Plasma etching method
JPS54107875A (en) * 1978-02-14 1979-08-24 Toshiba Corp Producing apparatus for activated gas
JPS5553422A (en) * 1978-10-16 1980-04-18 Mitsubishi Electric Corp Plasma reactor
JPS56147438A (en) * 1980-04-16 1981-11-16 Fujitsu Ltd Microplasma treatment apparatus
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma

Also Published As

Publication number Publication date
JPS5171597A (OSRAM) 1976-06-21

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