JPS62226451A - Photomagnetic recording medium - Google Patents

Photomagnetic recording medium

Info

Publication number
JPS62226451A
JPS62226451A JP7015386A JP7015386A JPS62226451A JP S62226451 A JPS62226451 A JP S62226451A JP 7015386 A JP7015386 A JP 7015386A JP 7015386 A JP7015386 A JP 7015386A JP S62226451 A JPS62226451 A JP S62226451A
Authority
JP
Japan
Prior art keywords
layer
substrate
magneto
optical recording
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7015386A
Other languages
Japanese (ja)
Inventor
Mitsuya Okada
満哉 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7015386A priority Critical patent/JPS62226451A/en
Publication of JPS62226451A publication Critical patent/JPS62226451A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To remarkably improve a noise characteristic and to improve reproduction C/N by forming a photosetting resin to be formed on a substrate thicker than the focal depth of a condensed beam so that the nonuniformity possessed by a substrate is eliminated. CONSTITUTION:There is the photosetting resin layer 5 on the flat substrate 1 and grooves 11 for tracking laser light are circularly or spirally formed on the resin layer. A spacer 2 is further formed on the layer 2 and a photomagnetic recording layer 3 is formed on the spacer 2. A protective layer 4 is formed on the layer 3. A polycarbonate molded on a disk is used for the substrate 1 and the grooves 11 are formed by the transfer from a stamper die to the layer 5. The resin layer is coated by a spin coating method on the substrate 1. A transparent material such as SiO2 or ZrO2 which is optically homogeneous and has no anisotropy is used for the spacer 2. The film thickness of the layer 5 is set larger than the focal depth length of the condensed beam of the laser light to be used.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、レーザ光を用いて情報の記録再生消去をおこ
なう光磁気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magneto-optical recording medium that records, reproduces and erases information using laser light.

(従来の技術) 光デイスクメモリは高密度、大容量・高速アクセスが可
能であるということから、現在の磁気ディスクメモリに
代わる新規なメモリとして考えられている。中でも光磁
気記録媒体を用いた光磁気ディスクは書き替え性を有し
ていることから最も注目され、近年活発に研究開発がお
こなわれている。
(Prior Art) Optical disk memory is considered as a new memory to replace the current magnetic disk memory because it is capable of high density, large capacity, and high speed access. Among them, magneto-optical disks using magneto-optical recording media have attracted the most attention because they are rewritable, and research and development have been actively conducted in recent years.

従来より知られている光磁気記録媒体の構成は第2図に
示したように円板状の支持基板1としてガラスあるいは
透明樹脂を用い、基板1上に基板に対して垂直方向に磁
化を有する垂直磁化膜から成る光磁気記録層3を形成し
たものである。光磁気記録層としてはMnB1.MnC
uB1.MnTiB1.MnAlGe、PtCo、など
の結晶体磁性薄膜、あるいはGd、Tb、Dy、Ho、
Sm。
As shown in FIG. 2, a conventionally known magneto-optical recording medium uses glass or transparent resin as a disk-shaped supporting substrate 1, and has magnetization on the substrate 1 in a direction perpendicular to the substrate. A magneto-optical recording layer 3 made of a perpendicularly magnetized film is formed. As the magneto-optical recording layer, MnB1. MnC
uB1. MnTiB1. Crystalline magnetic thin films such as MnAlGe, PtCo, or Gd, Tb, Dy, Ho,
Sm.

Ndなどの希土類とFe、Co、Niなどの遷移金属と
の合金として得られるアモルファス磁性薄膜が知られて
いる。また、第3図に示したように、基板1に深さ60
0〜1000人、周期1.6〜2.5¥1mの溝11を
うす巻き状もしくは同じ円状に形成し、前記基板1上に
光磁気記録層3を形成した媒体構成も知られている。こ
こで形成されている溝11は、記録媒体への情報の記録
、あるいは再生・消去に用いるレーザ集光ビームのトラ
ッキングアクセスに用いる。
Amorphous magnetic thin films obtained as alloys of rare earth elements such as Nd and transition metals such as Fe, Co, and Ni are known. Further, as shown in FIG.
A medium configuration is also known in which grooves 11 with a pitch of 1.6 to 2.5 yen are formed in a thin spiral shape or the same circular shape, and a magneto-optical recording layer 3 is formed on the substrate 1. . The groove 11 formed here is used for tracking access of a focused laser beam used for recording information on a recording medium or for reproducing/erasing information.

また、従来より知られている光磁気記録媒体として第4
図に示したように光磁気記録層3をスペーサ2と保護層
4ではさみ込んだ形のものがある。この構成はたとえば
特開昭59−110052号公報に見られる。スペーサ
2と保護層4によって光磁気記録層3をはさみ込んでい
るので、基板側及び膜面側から光磁気記録層3への水分
の浸透及び酸素の侵入を防ぎ、光磁気記録層3の経時変
化、劣化を阻止することができる。この構成の媒体にお
いても第5図のように第3図と同様うす巻き状もしくは
同心円状の溝11を持つ基板1を用いた媒体が知られて
いる。
In addition, the fourth type of conventionally known magneto-optical recording medium is
As shown in the figure, there is a type in which a magneto-optical recording layer 3 is sandwiched between a spacer 2 and a protective layer 4. This configuration can be found, for example, in Japanese Patent Application Laid-Open No. 110052/1983. Since the magneto-optical recording layer 3 is sandwiched between the spacer 2 and the protective layer 4, moisture and oxygen are prevented from penetrating into the magneto-optical recording layer 3 from the substrate side and the film side, and the aging of the magneto-optical recording layer 3 is prevented. Change and deterioration can be prevented. Also known is a medium having this structure, as shown in FIG. 5, which uses a substrate 1 having thinly wound or concentric grooves 11 similar to that in FIG. 3.

(発明が解決しようとする問題点) 基板1として使用される透明樹脂としてはポリメチルメ
タクリレート、ポリカーボネートなどがある。中でも、
基板自体の変形性、吸湿性に優れたポリカーボネートが
光デイスク用基板として使用されている。しかしながら
、ポリカーボネートは複屈折が大きいので、偏光面の変
化を信号とじて検出する光磁気ディスクにおいてはポリ
カーボネートを基板に用いると偏光面が乱されてノイズ
が増加するという欠点があった。
(Problems to be Solved by the Invention) Transparent resins used as the substrate 1 include polymethyl methacrylate, polycarbonate, and the like. Among them,
Polycarbonate, which has excellent deformability and hygroscopicity, is used as a substrate for optical disks. However, since polycarbonate has a large birefringence, when polycarbonate is used as a substrate in a magneto-optical disk that detects changes in the plane of polarization as a signal, it has the disadvantage that the plane of polarization is disturbed and noise increases.

本発明の目的は前記従来の光磁気記録媒体の欠点を解決
し、簡単な媒体構成により、低ノイズでかつ良好な記録
再生消去特性を持つ新規な光磁気記録媒体を提供するこ
とにある。
An object of the present invention is to solve the drawbacks of the conventional magneto-optical recording medium, and to provide a new magneto-optical recording medium with a simple medium configuration, low noise, and good recording/reproducing/erasing characteristics.

(問題点を解決するための手段) 本発明によれば、レーザ光を用いて情報の記録再生消去
をおこなう光磁気記録媒体において、ポリカーボネート
樹脂平坦基板と、前記基板上に形成されたレーザ光トラ
ッキング用同心円状もしくはうず巻き状の溝を有する光
硬化型樹脂層と、この樹脂層上に形成されたスペーサと
、このスペーサ上に形成された光磁気記録層と、この光
磁気記録層上に形成された保護層から成り、前記(封脂
層の膜厚を前記レーザ光の集光ビームの焦点深度距離よ
りも厚くしたことを特徴とする光磁気記録媒体が得られ
る。
(Means for Solving the Problems) According to the present invention, in a magneto-optical recording medium that records, reproduces and erases information using a laser beam, a polycarbonate resin flat substrate and a laser beam tracking formed on the substrate are provided. A photocurable resin layer having concentric or spiral grooves, a spacer formed on this resin layer, a magneto-optical recording layer formed on the spacer, and a magneto-optical recording layer formed on the magneto-optical recording layer. A magneto-optical recording medium is obtained, characterized in that the thickness of the sealing layer is greater than the depth of focus of the condensed beam of the laser beam.

第1図は本発明にかがる光磁気記録媒体の断面図である
。平坦基板1上に光硬化型樹脂R5があり、前記樹脂層
にはレーザ光トラッキング用の溝11が同心円状もしく
はうず巻き状に形成されている。
FIG. 1 is a sectional view of a magneto-optical recording medium according to the present invention. A photocurable resin R5 is placed on a flat substrate 1, and a groove 11 for laser beam tracking is formed in the resin layer in a concentric or spiral shape.

さらに前記樹脂層5上にスペーサ2が形成され、さらに
前記スペーサ2上に光磁気記録層3が形成され、さらに
前記光磁気記録層3の上に保護層4が形成されている。
Further, a spacer 2 is formed on the resin layer 5, a magneto-optical recording layer 3 is further formed on the spacer 2, and a protective layer 4 is further formed on the magneto-optical recording layer 3.

基板1としては円板上に成型されたポリカーボネートが
使用される。光硬化型樹脂層5にはトラッキング用溝1
1がスタンパ金型からの転写によって形成されている。
As the substrate 1, polycarbonate molded into a disc is used. A tracking groove 1 is provided in the photocurable resin layer 5.
1 is formed by transfer from a stamper mold.

溝形状は通常ピッチ1゜6〜2.5pm、溝幅0.6〜
0.8pm、溝深さ500〜1000人である。光硬化
型樹脂としては透明性が良好でスタンパはく離が容易で
あり、基板樹脂すなわちポリカーボネートとの密着性に
優れた樹脂が選択される。樹脂層は基板上にスピンコー
ド法により塗布される。スペーサ2としては、光学的に
均質であり、異方性を持たない透明材料が用いられる。
The groove shape usually has a pitch of 1°6~2.5pm and a groove width of 0.6~
0.8 pm, groove depth 500-1000 people. As the photocurable resin, a resin is selected that has good transparency, is easy to peel off from the stamper, and has excellent adhesion to the substrate resin, that is, polycarbonate. The resin layer is applied onto the substrate by a spin code method. As the spacer 2, a transparent material that is optically homogeneous and has no anisotropy is used.

たとえばSiO,5i02.CeO2,ZrO2,Ti
O2,Bi2O3,WO3,5n02゜5b203.A
lO3,MgO,Th02.La2O3,In2O3,
Nd2O3などの酸化物、AIN、Si3N4 ’! 
トノM化物、ZnS、Sb2S3゜CdSなどの酸化物
、ThF4.MgF2.LaF3.NdF3.CeF3
゜PbF2などのフッ化物、Si、Geなとの半導体が
使用される。光磁気記録層3としてはGd、Tb、Dy
、Hoなどの希土°類金属と、Fe、Co、Niなとの
遷移金属との合金がら成るアモルファス磁性薄膜が用い
られる。
For example, SiO,5i02. CeO2, ZrO2, Ti
O2, Bi2O3, WO3, 5n02°5b203. A
lO3, MgO, Th02. La2O3, In2O3,
Oxides such as Nd2O3, AIN, Si3N4'!
TonoMide, ZnS, oxides such as Sb2S3°CdS, ThF4. MgF2. LaF3. NdF3. CeF3
Fluorides such as PbF2, and semiconductors such as Si and Ge are used. As the magneto-optical recording layer 3, Gd, Tb, Dy
An amorphous magnetic thin film made of an alloy of rare earth metals such as , Ho, and transition metals such as Fe, Co, and Ni is used.

たとえば、GdCo、GdTbCo、GdTbFeCo
、TbFe、TbFeCo。
For example, GdCo, GdTbCo, GdTbFeCo
, TbFe, TbFeCo.

TbDyFeCo、GdTbFe、GdTbDyFe、
TbCo、TbDyCo。
TbDyFeCo, GdTbFe, GdTbDyFe,
TbCo, TbDyCo.

TbFeNiなどである。保護層4としては前記スペー
サ2に用いた材料と同じものが使用できる。
For example, TbFeNi. As the protective layer 4, the same material as used for the spacer 2 can be used.

(作用) 第1図において光硬化型樹脂層5の膜厚は使用されるレ
ーザ光の集光ビームの焦点深度距離よりも厚く設定され
る。集光ビームの焦点深度はレーザ光の波長をλ、集光
レンズの開口数をN、A、とすると、 焦点深度=后(N、A、)2 で求められる。たとえば、λ=830nm、N、A、=
0.55 ノとき、焦点深度は2.711mである。集
光されたレーザ光はその焦点近傍では焦点深度の範囲内
で一定のスポット径を有する。従来問題となったポリカ
ーボネート基板の複屈折に起因するノイズ増加は、レー
ザ光の焦点近傍、すなわち基板とスペーサ及び光磁気記
録層近傍での基板の偏光面の乱れによるところが大きい
(Function) In FIG. 1, the thickness of the photocurable resin layer 5 is set to be thicker than the depth of focus of the condensed beam of the laser light used. The depth of focus of the focused beam can be found as follows: Depth of focus = (N, A,) 2 where λ is the wavelength of the laser beam, and N and A are the numerical apertures of the focusing lens. For example, λ=830nm, N,A,=
At 0.55 m, the depth of focus is 2.711 m. The focused laser beam has a constant spot diameter within the depth of focus near its focal point. The increase in noise caused by the birefringence of polycarbonate substrates, which has been a problem in the past, is largely due to the disturbance of the plane of polarization of the substrate near the focal point of the laser beam, that is, near the substrate, the spacer, and the magneto-optical recording layer.

つまり、偏光面を乱す原因となるポリカーボネート基板
が、レーザ光の焦点付近、焦点深度内にあるためにレー
ザ光の偏光面が乱れ、ノイズが増加する。
In other words, the polycarbonate substrate, which causes the plane of polarization to be disturbed, is located near the focal point of the laser beam and within the depth of focus, which disturbs the plane of polarization of the laser beam and increases noise.

そこで本発明のごとく、レーザ光の焦点付近にポリカー
ボネート以外の樹脂層を厚く形成し、焦点深度距離内に
ポリカーボネート基板が存在しない媒体構成を採用する
ことによって、ノイズを大幅に低減できる。
Therefore, as in the present invention, noise can be significantly reduced by forming a thick resin layer other than polycarbonate near the focal point of the laser beam and adopting a medium configuration in which no polycarbonate substrate exists within the focal depth distance.

(実施例) 本発明の実施例としてポリカーボネート平坦基板(13
0mm直径、厚さ1.2mm)上に光硬化性樹脂を3μ
m厚にスピンコードし、光硬化性樹脂にスタンパ金型か
らの転写により、深さ700人、幅0.8pm、ピッチ
1.6pmのうす巻き状の溝を形成した。次に、マグネ
トロンスパッタ法により、スペーサとして5i3N41
漠を1000人、光磁気記録層としてTbFeConN
を1000人、さらにSi3N4膜から成る保護層を1
000人順次真空を破らずに連続成膜した。
(Example) As an example of the present invention, a polycarbonate flat substrate (13
0mm diameter, 1.2mm thickness) with 3μ of photocurable resin.
A thinly wound groove having a depth of 700 mm, a width of 0.8 pm, and a pitch of 1.6 pm was formed on the photocurable resin by spin-coding to a thickness of m, and by transferring from a stamper mold. Next, 5i3N41 was used as a spacer by magnetron sputtering.
1000 people in the desert, TbFeConN as magneto-optical recording layer
1000 people, and 1 protective layer made of Si3N4 film.
000 people successively formed films without breaking the vacuum.

次に比較例として、射出成型法により深さ700人、幅
0.8pm、ピッチ1.6pmのうす巻き状の溝が形成
されたポリカーボネート基板(130mm直径、厚さ1
.2”m)上にマグネトロンスパッタ法により、スペー
サとしてSi3N4膜を1000人、光磁気記録層とし
てTbFeCo膜を1000人、さらにSi3N4膜か
ら成る保護層を1000人順次真空を破らずに連続成膜
した。光源として波長8300mの半導体レーザを用い
、集光レンズのN、A、が0.55である光磁気用ヘッ
ドにより、作製した前記2枚のディスクのノイズレベル
をポリカーボネート基板をとおして測定した。集光ビー
ムの焦点はTbFeCo膜而に合わせ面。ディスクを線
速10m/seeにて回転させてIMHzでのノイズレ
ベルをスペクトラムアナライザにより測定した。本発明
にかかる光硬化型樹脂層を有するディスクのノイズは、
比較例として作製したディスクのノイズに比べて7dB
低かった。
Next, as a comparative example, we used a polycarbonate substrate (130 mm diameter, 1.6 mm thick) on which thinly wound grooves with a depth of 700 mm, a width of 0.8 pm, and a pitch of 1.6 pm were formed using an injection molding method.
.. 2"m) by magnetron sputtering, 1000 Si3N4 films were deposited as spacers, 1000 TbFeCo films were used as magneto-optical recording layers, and 1000 protective layers made of Si3N4 films were sequentially deposited without breaking the vacuum. Using a semiconductor laser with a wavelength of 8300 m as a light source and a magneto-optical head with a condenser lens having N and A of 0.55, the noise level of the two disks produced was measured through the polycarbonate substrate. The focus of the focused beam is on the surface aligned with the TbFeCo film.The disk was rotated at a linear speed of 10 m/see and the noise level at IMHz was measured using a spectrum analyzer. The noise is
7dB compared to the noise of the disc made as a comparative example
It was low.

つづいて両ディスクのIMHzの信号を記録したところ
、両ディスクにおいてキャリアレベルに差はなく、再生
CINは本発明にがかる光硬化型樹脂層を有するディス
クのほうが7dB良い値を示した。
Subsequently, when IMHz signals were recorded on both disks, there was no difference in carrier level between the two disks, and the disk having the photocurable resin layer according to the present invention showed a 7 dB better value in terms of reproduction CIN.

(発明の効果) このように本発明にかかる光磁気記録媒体は、従来の媒
体に比べてノイズ特性が大幅に改善され、さらに再生C
INが向上している。
(Effects of the Invention) As described above, the magneto-optical recording medium according to the present invention has significantly improved noise characteristics compared to conventional media, and also has a reproduction C.
IN is improving.

この発明は基板上に形成する光硬化型樹脂を集光ビーム
の焦点深度よりも厚く形成することにより、基板の有す
る光学的な不均一性を解消しようというものである。本
発明の媒体構成では偏光面の乱れに限らず、基板表面に
傷などの荒れがあっても樹脂の塗布によって光磁気記録
層面の平滑性を向上させることができるので、基板表面
荒れなどによる光強度変動に伴うノイズの低減にも効果
を発揮する。
This invention aims to eliminate the optical non-uniformity of the substrate by forming the photocurable resin on the substrate to be thicker than the depth of focus of the condensed beam. With the media structure of the present invention, even if there is not only disturbance in the polarization plane but also roughness such as scratches on the substrate surface, the smoothness of the magneto-optical recording layer surface can be improved by coating the resin. It is also effective in reducing noise associated with intensity fluctuations.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の適用された光磁気記録媒体の構成例を
示す断面図、第2図、第3図、第4図及び第5図は従来
の光磁気記録媒体の構成を示す断面図である。 図において、 1・・・基板、2・・・スペーサ、3・・・光磁気記録
層、430.保護層、5・・・光硬化型樹脂層、11・
・・溝である。 、′;゛ Ui;、’1 、I1浬人弁理士 内U’、’責 躬 l 図 /二 基しri            i八;[二、
?ニスへζ−プ 3 〕 九肩炙り1曾こ公」Aイ 4 :  イ呆官f1ツで奇 汐 :  ノミ不1e化1ジオ〃士n≦A丹翁Z(支) づ /:巷木瓦 3:  i石伎気言こf看(屓 第3 図 l:基を久 3:光穏轄、記鉾屑 /7 五 第 4 図 y:$sネ刀( 一:j°二 :;シ(;へ−プ 3:光楢気配引冴 4 :  イコを言そ1層
FIG. 1 is a sectional view showing an example of the structure of a magneto-optical recording medium to which the present invention is applied, and FIGS. 2, 3, 4 and 5 are sectional views showing the structure of a conventional magneto-optical recording medium. It is. In the figure, 1...Substrate, 2...Spacer, 3...Magneto-optical recording layer, 430. Protective layer, 5... Photocurable resin layer, 11.
...It's a groove. ,';゛Ui;,'1 ,I1Personal Patent Attorney 内U','Responsibility l Figure/2 Based ri i8;[2,
? To the varnish ζ-pu 3 ] Nine shoulders roasted 1 Zengko ``Ai 4: I dumb official f 1 Tsu de Kishio: Nomi F 1 e conversion 1 Geo〃shi n ≦ A Dano Z (branch) zu/: Haki Kawara 3: Ishiki ki konko f kan (屓 3rd figure 1: Motowo kyū 3: Mitsutoshiri, Kiboko Kuzu / 7 5th 4th figure y: $s net sword (1: j° 2:; shi(;Heap 3: Kounara Qiikisae 4: Say Iko 1st layer

Claims (1)

【特許請求の範囲】[Claims] レーザ光を用いて情報の記録再生消去をおこなう光磁気
記録媒体において、ポリカーボネート樹脂基板と、前記
基板上に形成されたレーザ光トラッキング用同心円状も
しくはうず巻き状の溝を有する光硬化型樹脂層と、この
樹脂層上に形成されたスペーサと、このスペーサ上に形
成された光磁気記録層と、この光磁気記録層上に形成さ
れた保護層から成り、前記樹脂層の膜厚を前記レーザ光
の集光ビームの焦点深度距離よりも厚くしたことを特徴
とする光磁気記録媒体。
A magneto-optical recording medium for recording, reproducing and erasing information using a laser beam, comprising: a polycarbonate resin substrate; a photocurable resin layer having concentric or spiral grooves for laser beam tracking formed on the substrate; It consists of a spacer formed on this resin layer, a magneto-optical recording layer formed on this spacer, and a protective layer formed on this magneto-optical recording layer. A magneto-optical recording medium characterized by being thicker than the depth of focus of a focused beam.
JP7015386A 1986-03-27 1986-03-27 Photomagnetic recording medium Pending JPS62226451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7015386A JPS62226451A (en) 1986-03-27 1986-03-27 Photomagnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7015386A JPS62226451A (en) 1986-03-27 1986-03-27 Photomagnetic recording medium

Publications (1)

Publication Number Publication Date
JPS62226451A true JPS62226451A (en) 1987-10-05

Family

ID=13423346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7015386A Pending JPS62226451A (en) 1986-03-27 1986-03-27 Photomagnetic recording medium

Country Status (1)

Country Link
JP (1) JPS62226451A (en)

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