JPS622250U - - Google Patents

Info

Publication number
JPS622250U
JPS622250U JP9232085U JP9232085U JPS622250U JP S622250 U JPS622250 U JP S622250U JP 9232085 U JP9232085 U JP 9232085U JP 9232085 U JP9232085 U JP 9232085U JP S622250 U JPS622250 U JP S622250U
Authority
JP
Japan
Prior art keywords
probe card
chassis
stage
semiconductor wafer
wafer inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9232085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9232085U priority Critical patent/JPS622250U/ja
Publication of JPS622250U publication Critical patent/JPS622250U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9232085U 1985-06-20 1985-06-20 Pending JPS622250U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9232085U JPS622250U (it) 1985-06-20 1985-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9232085U JPS622250U (it) 1985-06-20 1985-06-20

Publications (1)

Publication Number Publication Date
JPS622250U true JPS622250U (it) 1987-01-08

Family

ID=30649013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9232085U Pending JPS622250U (it) 1985-06-20 1985-06-20

Country Status (1)

Country Link
JP (1) JPS622250U (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161174A (ja) * 1987-12-17 1989-06-23 Tokyo Electron Ltd プローブ装置
JPH07110364A (ja) * 1994-03-28 1995-04-25 Tokyo Electron Ltd プローブ装置及びプロービング方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541630A (en) * 1977-06-06 1979-01-08 Canon Inc Image bearing material
JPS58111335A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd 光素子用ウエハプロ−バ
JPS5917260A (ja) * 1982-07-20 1984-01-28 Mitsubishi Electric Corp 半導体ウエハの試験方法
JPS6018929A (ja) * 1983-07-12 1985-01-31 Nec Corp 探針位置検査装置
JPS60213040A (ja) * 1984-04-09 1985-10-25 Hitachi Ltd ウエ−ハプロ−バ装置
JPS6119143A (ja) * 1984-07-06 1986-01-28 Nec Corp 半導体装置の検査装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541630A (en) * 1977-06-06 1979-01-08 Canon Inc Image bearing material
JPS58111335A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd 光素子用ウエハプロ−バ
JPS5917260A (ja) * 1982-07-20 1984-01-28 Mitsubishi Electric Corp 半導体ウエハの試験方法
JPS6018929A (ja) * 1983-07-12 1985-01-31 Nec Corp 探針位置検査装置
JPS60213040A (ja) * 1984-04-09 1985-10-25 Hitachi Ltd ウエ−ハプロ−バ装置
JPS6119143A (ja) * 1984-07-06 1986-01-28 Nec Corp 半導体装置の検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161174A (ja) * 1987-12-17 1989-06-23 Tokyo Electron Ltd プローブ装置
JPH07110364A (ja) * 1994-03-28 1995-04-25 Tokyo Electron Ltd プローブ装置及びプロービング方法

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