JPS6222272B2 - - Google Patents
Info
- Publication number
- JPS6222272B2 JPS6222272B2 JP52117538A JP11753877A JPS6222272B2 JP S6222272 B2 JPS6222272 B2 JP S6222272B2 JP 52117538 A JP52117538 A JP 52117538A JP 11753877 A JP11753877 A JP 11753877A JP S6222272 B2 JPS6222272 B2 JP S6222272B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diffused
- resistance layer
- semiconductor
- differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002706 hydrostatic effect Effects 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 13
- 238000009792 diffusion process Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 40
- 239000012530 fluid Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 238000009931 pascalization Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11753877A JPS5451489A (en) | 1977-09-30 | 1977-09-30 | Semiconductor pressure converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11753877A JPS5451489A (en) | 1977-09-30 | 1977-09-30 | Semiconductor pressure converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5451489A JPS5451489A (en) | 1979-04-23 |
| JPS6222272B2 true JPS6222272B2 (pt) | 1987-05-16 |
Family
ID=14714266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11753877A Granted JPS5451489A (en) | 1977-09-30 | 1977-09-30 | Semiconductor pressure converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5451489A (pt) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1186163A (en) * | 1982-01-04 | 1985-04-30 | James B. Starr | Semiconductor pressure transducer |
| JPS60138431A (ja) * | 1983-09-28 | 1985-07-23 | シユラムバ−ガ− オ−バ−シ−ズ ソシエテ アノニム | 表面音波センサ |
| JPH0650270B2 (ja) * | 1984-05-21 | 1994-06-29 | 株式会社日本自動車部品総合研究所 | 高圧用圧力検出器 |
| JPS6156465A (ja) * | 1984-08-28 | 1986-03-22 | Toshiba Corp | 半導体圧力変換器 |
| US4672853A (en) * | 1984-10-30 | 1987-06-16 | Burr-Brown Corporation | Apparatus and method for a pressure-sensitive device |
| JP6090742B2 (ja) | 2013-02-28 | 2017-03-08 | 日立オートモティブシステムズ株式会社 | 圧力検出装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4945783A (en) * | 1972-07-07 | 1974-05-01 | Siemens Ag | Zerotengosano hoshokairosochi |
| JPS5016486A (pt) * | 1973-06-11 | 1975-02-21 | ||
| JPS5182680A (pt) * | 1974-11-27 | 1976-07-20 | Itt | |
| JPS5245377A (en) * | 1975-10-08 | 1977-04-09 | Hitachi Ltd | Silicon mechanical-electrical converter |
-
1977
- 1977-09-30 JP JP11753877A patent/JPS5451489A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4945783A (en) * | 1972-07-07 | 1974-05-01 | Siemens Ag | Zerotengosano hoshokairosochi |
| JPS5016486A (pt) * | 1973-06-11 | 1975-02-21 | ||
| JPS5182680A (pt) * | 1974-11-27 | 1976-07-20 | Itt | |
| JPS5245377A (en) * | 1975-10-08 | 1977-04-09 | Hitachi Ltd | Silicon mechanical-electrical converter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5451489A (en) | 1979-04-23 |
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