JPS62219612A - エツチング装置 - Google Patents
エツチング装置Info
- Publication number
- JPS62219612A JPS62219612A JP61062400A JP6240086A JPS62219612A JP S62219612 A JPS62219612 A JP S62219612A JP 61062400 A JP61062400 A JP 61062400A JP 6240086 A JP6240086 A JP 6240086A JP S62219612 A JPS62219612 A JP S62219612A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- current
- carbon electrodes
- aluminum foil
- leakage current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 49
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 36
- 239000011888 foil Substances 0.000 claims description 26
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 25
- 229910052782 aluminium Inorganic materials 0.000 claims description 25
- 239000012212 insulator Substances 0.000 claims description 11
- 239000008151 electrolyte solution Substances 0.000 claims description 5
- 239000003792 electrolyte Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000007788 roughening Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- FLDCSPABIQBYKP-UHFFFAOYSA-N 5-chloro-1,2-dimethylbenzimidazole Chemical compound ClC1=CC=C2N(C)C(C)=NC2=C1 FLDCSPABIQBYKP-UHFFFAOYSA-N 0.000 description 1
- 239000001741 Ammonium adipate Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 235000019293 ammonium adipate Nutrition 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000011149 sulphuric acid Nutrition 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062400A JPS62219612A (ja) | 1986-03-20 | 1986-03-20 | エツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062400A JPS62219612A (ja) | 1986-03-20 | 1986-03-20 | エツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62219612A true JPS62219612A (ja) | 1987-09-26 |
| JPH0240759B2 JPH0240759B2 (nl) | 1990-09-13 |
Family
ID=13199046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61062400A Granted JPS62219612A (ja) | 1986-03-20 | 1986-03-20 | エツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62219612A (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS648299A (en) * | 1987-07-01 | 1989-01-12 | Matsushita Electric Ind Co Ltd | Device for etching aluminum foil for electrolytic capacitor |
| JPS648300A (en) * | 1987-07-01 | 1989-01-12 | Matsushita Electric Ind Co Ltd | Etching device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4428074B2 (ja) * | 2004-02-06 | 2010-03-10 | パナソニック株式会社 | アルミ電解コンデンサ用電極箔の製造方法及びその製造装置 |
-
1986
- 1986-03-20 JP JP61062400A patent/JPS62219612A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS648299A (en) * | 1987-07-01 | 1989-01-12 | Matsushita Electric Ind Co Ltd | Device for etching aluminum foil for electrolytic capacitor |
| JPS648300A (en) * | 1987-07-01 | 1989-01-12 | Matsushita Electric Ind Co Ltd | Etching device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0240759B2 (nl) | 1990-09-13 |
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