JPS62213259A - バツフア装置 - Google Patents

バツフア装置

Info

Publication number
JPS62213259A
JPS62213259A JP5495286A JP5495286A JPS62213259A JP S62213259 A JPS62213259 A JP S62213259A JP 5495286 A JP5495286 A JP 5495286A JP 5495286 A JP5495286 A JP 5495286A JP S62213259 A JPS62213259 A JP S62213259A
Authority
JP
Japan
Prior art keywords
magazine
buffer device
conveyor
plate
buffer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5495286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH042485B2 (enrdf_load_html_response
Inventor
Kazuo Sugiura
一夫 杉浦
Takeshi Hasegawa
猛 長谷川
Mitsuru Kyohara
鏡原　満
Shinichi Kumazawa
熊沢　慎一
Teruhiro Hirayanagi
平柳　彰宏
Morihiro Kada
嘉田　守宏
Hisahiro Morishima
森島　壽洋
Shigeo Takase
高瀬　茂夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Sharp Corp
Original Assignee
Shinkawa Ltd
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd, Sharp Corp filed Critical Shinkawa Ltd
Priority to JP5495286A priority Critical patent/JPS62213259A/ja
Publication of JPS62213259A publication Critical patent/JPS62213259A/ja
Publication of JPH042485B2 publication Critical patent/JPH042485B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP5495286A 1986-03-14 1986-03-14 バツフア装置 Granted JPS62213259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5495286A JPS62213259A (ja) 1986-03-14 1986-03-14 バツフア装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5495286A JPS62213259A (ja) 1986-03-14 1986-03-14 バツフア装置

Publications (2)

Publication Number Publication Date
JPS62213259A true JPS62213259A (ja) 1987-09-19
JPH042485B2 JPH042485B2 (enrdf_load_html_response) 1992-01-17

Family

ID=12985003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5495286A Granted JPS62213259A (ja) 1986-03-14 1986-03-14 バツフア装置

Country Status (1)

Country Link
JP (1) JPS62213259A (enrdf_load_html_response)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108729A (ja) * 1987-10-21 1989-04-26 Mitsubishi Electric Corp 半導体アセンブリ製造装置
JPH0436225U (enrdf_load_html_response) * 1990-07-23 1992-03-26
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products
US5788868A (en) * 1995-09-04 1998-08-04 Dainippon Screen Mfg. Co., Ltd. Substrate transfer method and interface apparatus
EP0843343A3 (en) * 1996-11-19 2000-01-12 Tokyo Electron Limited Processing system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108729A (ja) * 1987-10-21 1989-04-26 Mitsubishi Electric Corp 半導体アセンブリ製造装置
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products
JPH0436225U (enrdf_load_html_response) * 1990-07-23 1992-03-26
US5788868A (en) * 1995-09-04 1998-08-04 Dainippon Screen Mfg. Co., Ltd. Substrate transfer method and interface apparatus
EP0843343A3 (en) * 1996-11-19 2000-01-12 Tokyo Electron Limited Processing system

Also Published As

Publication number Publication date
JPH042485B2 (enrdf_load_html_response) 1992-01-17

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