JPS622109A - 光学式粗さ計 - Google Patents

光学式粗さ計

Info

Publication number
JPS622109A
JPS622109A JP14179585A JP14179585A JPS622109A JP S622109 A JPS622109 A JP S622109A JP 14179585 A JP14179585 A JP 14179585A JP 14179585 A JP14179585 A JP 14179585A JP S622109 A JPS622109 A JP S622109A
Authority
JP
Japan
Prior art keywords
receiving element
light
light receiving
lens
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14179585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521404B2 (enrdf_load_stackoverflow
Inventor
Kimiyuki Mitsui
公之 三井
Makoto Sakai
誠 坂井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Tokyo Seimitsu Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP14179585A priority Critical patent/JPS622109A/ja
Publication of JPS622109A publication Critical patent/JPS622109A/ja
Publication of JPH0521404B2 publication Critical patent/JPH0521404B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP14179585A 1985-06-28 1985-06-28 光学式粗さ計 Granted JPS622109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14179585A JPS622109A (ja) 1985-06-28 1985-06-28 光学式粗さ計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14179585A JPS622109A (ja) 1985-06-28 1985-06-28 光学式粗さ計

Publications (2)

Publication Number Publication Date
JPS622109A true JPS622109A (ja) 1987-01-08
JPH0521404B2 JPH0521404B2 (enrdf_load_stackoverflow) 1993-03-24

Family

ID=15300315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14179585A Granted JPS622109A (ja) 1985-06-28 1985-06-28 光学式粗さ計

Country Status (1)

Country Link
JP (1) JPS622109A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0521404B2 (enrdf_load_stackoverflow) 1993-03-24

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