JPS6221065U - - Google Patents
Info
- Publication number
- JPS6221065U JPS6221065U JP11208785U JP11208785U JPS6221065U JP S6221065 U JPS6221065 U JP S6221065U JP 11208785 U JP11208785 U JP 11208785U JP 11208785 U JP11208785 U JP 11208785U JP S6221065 U JPS6221065 U JP S6221065U
- Authority
- JP
- Japan
- Prior art keywords
- thin films
- housings
- pair
- target
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は考案の一実施例であるスパツタリング
装置の概略を説明する構成図である。第２図は第
１図における回転板の底面図である。
１０……ガラス基板（基板）、１４……第一ハ
ウジング（ハウジング）、１８……第二ハウジン
グ（ハウジング）、２４，８２……真空室、３２
……回転板（ターゲット保持部材）、３８，４０
……ターゲツト、４６，４８……カソード電極、
６０，６２……モータ（ターゲツト駆動手段）、
７６……電源装置、８４……アノード電極。
FIG. 1 is a schematic diagram illustrating a sputtering apparatus as an embodiment of the invention. FIG. 2 is a bottom view of the rotating plate in FIG. 1. 10... Glass substrate (substrate), 14... First housing (housing), 18... Second housing (housing), 24, 82... Vacuum chamber, 32
... Rotating plate (target holding member), 38, 40
...Target, 46, 48...Cathode electrode,
60, 62...Motor (target driving means),
76...Power supply device, 84...Anode electrode.
Claims (1)
ツタリング装置であつて、 前記基板の一部を挾んで相対向する状態で配設
され、それぞれ該基板と共に真空室を形成する一
対のハウジングと、 それら一対のハウジングのうち、前記薄膜を形
成すべき側に設けられた一方のハウジングの内部
に配設され、前記複数の薄膜を構成すべき複数の
ターゲツトを保持するターゲツト保持部材と、 該複数のターゲツトが前記基板の一部に対して
択一的に対向させられるように前記ターゲツト保
持部材を移動させるターゲツト駆動手段と、 前記ターゲツトの裏側に配設されたカソード電
極と前記一対のハウジングの他方の内部に配設さ
れたアノード電極との間に高電圧を印加する電源
装置と を有することを特徴とするスパッタリング装置。[Claims for Utility Model Registration] A sputtering device for forming a plurality of thin films in multiple layers on a part of a substrate; a pair of housings that form a plurality of thin films, and one housing of the pair of housings that is provided on the side where the thin films are to be formed is disposed inside the housing and holds a plurality of targets that are to form the plurality of thin films. a target holding member; a target driving means for moving the target holding member so that the plurality of targets are selectively opposed to a part of the substrate; and a cathode electrode disposed on the back side of the target. and a power supply device that applies a high voltage between the anode electrode disposed inside the other of the pair of housings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11208785U JPS6221065U (en) | 1985-07-22 | 1985-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11208785U JPS6221065U (en) | 1985-07-22 | 1985-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221065U true JPS6221065U (en) | 1987-02-07 |
Family
ID=30992624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11208785U Pending JPS6221065U (en) | 1985-07-22 | 1985-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221065U (en) |
-
1985
- 1985-07-22 JP JP11208785U patent/JPS6221065U/ja active Pending