JPS6221015Y2 - - Google Patents
Info
- Publication number
- JPS6221015Y2 JPS6221015Y2 JP12761682U JP12761682U JPS6221015Y2 JP S6221015 Y2 JPS6221015 Y2 JP S6221015Y2 JP 12761682 U JP12761682 U JP 12761682U JP 12761682 U JP12761682 U JP 12761682U JP S6221015 Y2 JPS6221015 Y2 JP S6221015Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- permanent magnet
- charged particles
- semiconductor substrate
- incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 20
- 239000002245 particle Substances 0.000 description 21
- 230000005855 radiation Effects 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Iron Core Of Rotating Electric Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12761682U JPS5931247U (ja) | 1982-08-24 | 1982-08-24 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12761682U JPS5931247U (ja) | 1982-08-24 | 1982-08-24 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5931247U JPS5931247U (ja) | 1984-02-27 |
| JPS6221015Y2 true JPS6221015Y2 (https=) | 1987-05-28 |
Family
ID=30289781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12761682U Granted JPS5931247U (ja) | 1982-08-24 | 1982-08-24 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5931247U (https=) |
-
1982
- 1982-08-24 JP JP12761682U patent/JPS5931247U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5931247U (ja) | 1984-02-27 |
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