JPS6220998Y2 - - Google Patents

Info

Publication number
JPS6220998Y2
JPS6220998Y2 JP1980094379U JP9437980U JPS6220998Y2 JP S6220998 Y2 JPS6220998 Y2 JP S6220998Y2 JP 1980094379 U JP1980094379 U JP 1980094379U JP 9437980 U JP9437980 U JP 9437980U JP S6220998 Y2 JPS6220998 Y2 JP S6220998Y2
Authority
JP
Japan
Prior art keywords
substrate
support
liquid phase
epitaxial growth
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980094379U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5720144U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980094379U priority Critical patent/JPS6220998Y2/ja
Publication of JPS5720144U publication Critical patent/JPS5720144U/ja
Application granted granted Critical
Publication of JPS6220998Y2 publication Critical patent/JPS6220998Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1980094379U 1980-07-04 1980-07-04 Expired JPS6220998Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980094379U JPS6220998Y2 (enExample) 1980-07-04 1980-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980094379U JPS6220998Y2 (enExample) 1980-07-04 1980-07-04

Publications (2)

Publication Number Publication Date
JPS5720144U JPS5720144U (enExample) 1982-02-02
JPS6220998Y2 true JPS6220998Y2 (enExample) 1987-05-28

Family

ID=29456307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980094379U Expired JPS6220998Y2 (enExample) 1980-07-04 1980-07-04

Country Status (1)

Country Link
JP (1) JPS6220998Y2 (enExample)

Also Published As

Publication number Publication date
JPS5720144U (enExample) 1982-02-02

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