JPS62209335A - 薄膜分解装置 - Google Patents
薄膜分解装置Info
- Publication number
- JPS62209335A JPS62209335A JP5286486A JP5286486A JPS62209335A JP S62209335 A JPS62209335 A JP S62209335A JP 5286486 A JP5286486 A JP 5286486A JP 5286486 A JP5286486 A JP 5286486A JP S62209335 A JPS62209335 A JP S62209335A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- vapor
- decomposer
- decomposing
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 54
- 238000000354 decomposition reaction Methods 0.000 claims abstract description 27
- 239000007921 spray Substances 0.000 claims abstract description 5
- 239000000126 substance Substances 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 abstract description 19
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 238000002347 injection Methods 0.000 abstract 2
- 239000007924 injection Substances 0.000 abstract 2
- 238000007664 blowing Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 description 7
- 239000011550 stock solution Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286486A JPS62209335A (ja) | 1986-03-10 | 1986-03-10 | 薄膜分解装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286486A JPS62209335A (ja) | 1986-03-10 | 1986-03-10 | 薄膜分解装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62209335A true JPS62209335A (ja) | 1987-09-14 |
| JPH0546895B2 JPH0546895B2 (enrdf_load_stackoverflow) | 1993-07-15 |
Family
ID=12926733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5286486A Granted JPS62209335A (ja) | 1986-03-10 | 1986-03-10 | 薄膜分解装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62209335A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015182670A1 (ja) * | 2014-05-30 | 2015-12-03 | 株式会社住化分析センター | 分析用サンプルの回収方法およびその利用 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH066398U (ja) * | 1992-02-05 | 1994-01-25 | 東洋運搬機株式会社 | サイドクランプ装置 |
-
1986
- 1986-03-10 JP JP5286486A patent/JPS62209335A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015182670A1 (ja) * | 2014-05-30 | 2015-12-03 | 株式会社住化分析センター | 分析用サンプルの回収方法およびその利用 |
| KR20170012414A (ko) * | 2014-05-30 | 2017-02-02 | 가부시키가이샤 스미카 분세키 센터 | 분석용 샘플의 회수 방법 및 그 이용 |
| JPWO2015182670A1 (ja) * | 2014-05-30 | 2017-04-20 | 株式会社住化分析センター | 分析用サンプルの回収方法およびその利用 |
| TWI711823B (zh) * | 2014-05-30 | 2020-12-01 | 日商住化分析中心股份有限公司 | 分析用樣品之回收方法、分析方法、品質管理方法、製造方法及分析用樣品之回收裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546895B2 (enrdf_load_stackoverflow) | 1993-07-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100343866B1 (ko) | 증기혼합물을이용한반도체처리 | |
| JP2906006B2 (ja) | 処理方法及びその装置 | |
| US5431736A (en) | Method for transforming a liquid flow into a gas flow and a device for implementing the method | |
| KR950004433A (ko) | 약액 공급장치 및 그 방법 | |
| EP3260839A1 (en) | Method of and apparatus for preparing samples for imaging or diffraction experiments under cryogenic conditions | |
| JPH0626206B2 (ja) | 基板より気相法で膜除去する方法及び装置 | |
| JPS5811625A (ja) | 槽形容器の殺菌方法および装置 | |
| KR20060061827A (ko) | 기판 처리 방법 및 기판 처리 장치 | |
| ATE275002T1 (de) | Vernebler und steuersystem für die vernebelung | |
| JPS62209335A (ja) | 薄膜分解装置 | |
| KR101531437B1 (ko) | 기판 처리 장치 | |
| JP2000517111A (ja) | アルコール蒸気乾燥機 | |
| JP2893148B2 (ja) | 処理装置 | |
| US4113511A (en) | Liquid additions to fused chemical baths | |
| DE3374988D1 (en) | A process for conditioning a gas stream charged with solid particles and/or vapours | |
| JP2004092969A (ja) | 噴霧乾燥装置 | |
| JP2000146096A (ja) | 極高真空チャンバへの微量ガス導入機構 | |
| DE69733686T2 (de) | Verfahren und vorrichtung zur trocknung und reinigung von gegenständen mittels aerosolen | |
| US5279926A (en) | Method and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuits | |
| JP5198426B2 (ja) | 洗浄装置及びオゾン水生成装置 | |
| JP4830091B2 (ja) | 気液混合洗浄装置及び気液混合洗浄方法 | |
| JPH06300674A (ja) | 微量物質抽出装置 | |
| US6722056B2 (en) | Drying vapor generation | |
| NO152759B (no) | Fremgangsmaate for etterbehandling av strikket stoff av bomull eller annet naturlig eller regenerert cellulosemateriale | |
| JPS5765324A (en) | Method and apparatus for preparing ultrafine particle membrane |