JPS62199322A - Part packaging apparatus - Google Patents

Part packaging apparatus

Info

Publication number
JPS62199322A
JPS62199322A JP61040268A JP4026886A JPS62199322A JP S62199322 A JPS62199322 A JP S62199322A JP 61040268 A JP61040268 A JP 61040268A JP 4026886 A JP4026886 A JP 4026886A JP S62199322 A JPS62199322 A JP S62199322A
Authority
JP
Japan
Prior art keywords
chuck
component
parts
head
packaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61040268A
Other languages
Japanese (ja)
Inventor
Tanemasa Harada
種真 原田
Hideo Tsushima
対馬 秀男
Mineaki Iida
飯田 峰昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61040268A priority Critical patent/JPS62199322A/en
Publication of JPS62199322A publication Critical patent/JPS62199322A/en
Pending legal-status Critical Current

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  • Automatic Assembly (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

PURPOSE:To obtain positive detection of mischuck free from restrictions such as shape and size of parts in a part packaging apparatus for packaging small electronic parts by providing a vision recognition unit including an image pick-up camera and an arithmetic and control unit. CONSTITUTION:According to a command from a CPU 51, a head body 21 is moved, and a chuck member 22 is lowered on a magazine 13 to hold a part 12 by suction, with three parts in total sucked sequentially. Then, the chuck member 22 is moved to a position above an ITV camera 46 in directly opposite relation to the same, and according to the positional information of each part, a processing circuit 47 calculates a correction value at packaging and discriminates whether or not any mischuck exists. Then, the part 12 is selected by a command from a control unit, and is packaged, after corrected in correspondence to the positional error and attitude error. This apparatus, which performs packaging by vision recognition and not by mechanical positioning of parts, is free from restrictions such as marring, size and shape of parts.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は小形の電子部品の実装に好適な部品装着装置の
改良に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to an improvement of a component mounting device suitable for mounting small electronic components.

(従来の技術) 近時、各種の電気的装置の生産においては、回路基板に
多数の電子部品を装着することが行なわれている。この
ような作業は部品装着装置により、人手をわずられすこ
となく必処理されている。
(Prior Art) Recently, in the production of various electrical devices, a large number of electronic components are mounted on a circuit board. This type of work is carried out by the component mounting device without any manual intervention.

この装置は所定の部品を収容した所から部品を例えば真
空チャックなどにより吸着し、XYテーブルなどで大空
チャックを移動して、回路基板上の所定の位置に部品を
装着するようになっている。
This device uses, for example, a vacuum chuck to pick up parts from a place where predetermined parts are stored, and then moves the large chuck using an XY table or the like to mount the parts at a predetermined position on a circuit board.

この部品供給には1個ずつ取扱う装置とか、複数個の部
品を同時に吸着してこれらの部品を同時に装着する装置
とか、複数個のチャックを具えた回転テーブルを設けて
、所定の位置で、順次部品を供給し、他の所定の位置で
順次回路基板に部品を装着して行く回転装置など種々な
形式のものが用いられている。
For this part supply, there is a device that handles parts one by one, a device that picks up multiple parts at the same time and mounts these parts at the same time, and a rotary table equipped with multiple chucks that sequentially picks up multiple parts at predetermined positions. Various types of devices are used, such as a rotating device that supplies components and sequentially mounts the components on the circuit board at other predetermined positions.

しかるに、このような従来の装置は部品の位置決めは機
械的な動作により行なわれているため部品の形状や大き
さは限られており、また部品を正規の姿勢に吸着しない
チャックミスなどのときは部品を損傷してしまうなどの
不都合があった。このような点を解決するため、例えば
リードの間隔の狭いICの装着に視覚認識装置を用いて
位置決めを行なう装置もあるが、1個当94〜6秒の時
間がかかり、生産性が著しく低い不都合があった。
However, in such conventional devices, the positioning of parts is done by mechanical movement, so the shapes and sizes of parts are limited, and if there is a chuck error in which the parts are not picked up in the correct position, etc. There were inconveniences such as damage to parts. To solve this problem, for example, some devices use visual recognition devices to position ICs with narrow lead spacing, but this takes 94 to 6 seconds per lead, resulting in extremely low productivity. There was an inconvenience.

さらにまた、部品のチャックミスの検出は、部品吸着後
の真空圧によシその良品を判定しているが部品の被吸着
面の形状に制約が生じ、チップボリウムなどのようにね
じ溝のある部品の検出が困難であるという不都合があっ
た。
Furthermore, parts chuck errors are detected by relying on the vacuum pressure after the parts are picked up to determine whether the parts are good or not, but there are restrictions on the shape of the part to be picked up. There was an inconvenience that it was difficult to detect the parts.

(発明が解決しようとする問題点) 上記したように、従来の部品装着装置は位置決めを機械
的動作により行なうので、部品の形状大きさに限界があ
υ、品種の切換えも容易ではない不都合がちシ、またチ
ャックミスの検出には部品の形状による制限があるなど
の不都合があった。
(Problems to be Solved by the Invention) As mentioned above, conventional component mounting devices perform positioning by mechanical operation, which has the disadvantage that there is a limit to the shape and size of components, and it is not easy to change product types. Furthermore, there are disadvantages in that detection of chuck errors is limited by the shape of the parts.

本発明は上述の不都合を除去するためになされたもので
、部品の形状・寸法などに制限されることなく、しかも
チャックミスも確実に検出できる部品装着装置を提供す
ることを目的とする。
The present invention has been made to eliminate the above-mentioned disadvantages, and an object of the present invention is to provide a component mounting device that is not limited by the shape and size of components and can also reliably detect chuck errors.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段と作用)本発明は、部品
を収容した部品収容部と、部品を保持する複数個のチャ
ック体および回転自在に支持されてかつチャック体を支
持したヘッド体を有するヘッド部と、ヘッド体を回転駆
動し、かつチャック体を前後、左右、上下方向に移動さ
せるヘッド駆動部と、被装着体を装着位置に搬送する搬
送部と所定の位置に設けられた撮像カメラを有し所定位
置にある部品の位置および姿勢を検出する視覚認識部と
、この視覚認識部からの検出信号によシチャック体の位
置補正およびチャックミスを検出する演算制御部とを具
備した部品装着装置である。そして視覚認識装置により
位置決め、チャックミスの検出を行なうので、部品の形
状、大きさの変化に対し容易に対応できるようぺしたも
のである。
(Means and Effects for Solving the Problems) The present invention includes a component storage section that accommodates components, a plurality of chuck bodies that hold the components, and a head body that is rotatably supported and supports the chuck bodies. a head drive unit that rotates the head body and moves the chuck body in the front-rear, left-right, and up-down directions; a transport unit that transports the object to be mounted to the mounting position; and an imaging device provided at a predetermined position. A component equipped with a visual recognition section that has a camera and detects the position and orientation of a component at a predetermined position, and an arithmetic control section that corrects the position of the chuck body and detects chuck mistakes based on the detection signal from the visual recognition section. It is a mounting device. Since the visual recognition device performs positioning and detects chuck errors, it is possible to easily respond to changes in the shape and size of parts.

(実施例) 以ド、本発明の詳細を図示の一実施例により説明する。(Example) Hereinafter, details of the present invention will be explained with reference to an illustrated embodiment.

本実施例は、基台(1)と、部品収容部(2)と、ヘッ
ド部(3)と、・\ラド駆動部(4)と、搬送部(5)
と、視覚認識部(6)と演算制御部(7)とから構成さ
れている。基台(1)は上面を取付は面俣υとした箱状
に形成されていて、各部はこの上に載置取付けられてい
る。部品収容部(2)は小形な直方体状のチップ部品α
2を整列収容したマガジン叫を複数個併設して構成され
ている。−ラド部(3)は後述するヘッド駆動部(4)
に回転自在に支持されたヘッド体121)と、これに上
下動自在に取付けられた3個のチャック体(社)と、こ
れを常時下方に付勢するばね体+23)と、図示しない
カム機構により上下動されてチャック体@に係合した昇
降体(至)などから構成されている。
This embodiment includes a base (1), a component storage section (2), a head section (3), a \rad drive section (4), and a transport section (5).
, a visual recognition section (6), and an arithmetic control section (7). The base (1) is formed in the shape of a box with an upper surface having a mounting surface υ, and each part is mounted and mounted on this. The component housing part (2) is a small rectangular parallelepiped chip component α.
It is constructed by installing a plurality of magazines in which the number 2 is arranged and housed. - Rad section (3) is a head drive section (4) which will be described later.
A head body 121) rotatably supported by a head body 121), three chuck bodies attached to the head body 121 to be able to move up and down, a spring body +23) that always urges this downward, and a cam mechanism (not shown). It consists of an elevating body (to) that is moved up and down by the chuck body and engaged with the chuck body.

そしてチャック体@は下端は開口されて真空チャックと
なり、上端は真空源に連通していて、昇降体ご4が図示
しないカム機構により下降すると、ばね体(ハ)によシ
下方に下シ、チップ部品しυを吸着、釈放する。次にヘ
ッド駆動部(4)は取付は面ση上に支持された横着案
内体の1)と、これに支持された縦鉾案内体C2とθ駆
動体(至)と、図示しないが横案内体l31)の中に収
容された横送シ機構、縦曵案内体曽に収容された縦送り
機構などからなっている。そして上述のヘッド体Qυは
θ駆動体ωにより所望角度回転制御される。チャック体
四は横案内体131)に沿って矢印c3!9で示す左右
方向に搬送され、縦案内体国により矢印(至)で示す前
後方向に搬送される。
The lower end of the chuck body @ is opened to serve as a vacuum chuck, and the upper end is connected to a vacuum source. When the elevating body 4 is lowered by a cam mechanism (not shown), it is pushed downward by the spring body (C). Chip parts absorb and release υ. Next, the head drive unit (4) is attached to the horizontal guide body 1) supported on the plane ση, the vertical hoist guide C2 and the θ drive body (toward) supported by this, and the horizontal guide body (not shown). It consists of a horizontal feed mechanism housed in the body 131), a vertical feed mechanism housed in the vertical strap guide body, etc. The above-mentioned head body Qυ is controlled to rotate at a desired angle by the θ driving member ω. The chuck body 4 is conveyed in the left-right direction indicated by the arrow c3!9 along the horizontal guide body 131), and is conveyed in the front-rear direction indicated by the arrow (to) by the vertical guide body 131).

すなわちチャフ゛り体(22は前後方向、左右方向、上
下方向に駆動されるとともにヘッド体(21Jとともに
回転駆動される。次に搬送部(5)は離間対向して横方
向に延在する一対の案内体(41) 、 +411とこ
れらに沼って設ケた一対のベルトコンベアt4s5 、
 n3と、図示しない位置決めストッパなどからなって
いる。そして被装着体としての回路基板A4がベルトコ
ンベア(4邊、(ハ)上に乗せられて所定の位置に来て
位置決めストッパによυ停止し、部品α2の装着が終る
とコンベアt421 、 +43により次工程へ送られ
る。次に視覚認識部(6)は、ベルトコンベア(4a 
、 (43の外側近傍に取付けられた1、TVカメラI
AQと、これと演算制御部(7)との間に設けられた処
理回路(4つ(専用の図うになっている。次に演算制御
部(7)はCPU51)。
That is, the chaff body (22 is driven in the front-rear direction, left-right direction, and up-down direction, and is rotationally driven together with the head body (21J).Next, the conveyance section (5) has a pair of spaced-apart, opposing, extending laterally. Guide body (41), +411 and a pair of belt conveyors t4s5 installed next to these,
n3, and a positioning stopper (not shown). Then, the circuit board A4 as the object to be mounted is placed on the belt conveyor (4 corners, (c)) and is stopped at a predetermined position by the positioning stopper. When the mounting of the component α2 is completed, the circuit board A4 is placed on the belt conveyor (4 sides, (c)) and stopped by the positioning stopper. The visual recognition unit (6) then passes the belt conveyor (4a
, (1, TV camera I installed near the outside of 43
AQ and processing circuits (four (dedicated) are provided between this and the arithmetic control section (7). Next, the arithmetic control section (7) is the CPU 51).

メモリ6つ、チャックミス判定の判定回路(至)、演算
回路(財)およびヘッド駆動部(4)を駆動する駆動回
路□□□などから構成されている。これらの詳細は作用
の説明とともに述べる。
It consists of six memories, a judgment circuit for chuck error judgment, an arithmetic circuit, and a drive circuit for driving the head drive section (4). These details will be described together with the explanation of their operation.

次に上述の実施例の作用につき一説明する。まずCPU
の指令によりヘッド本体Qυは移動し、マガジン(3)
上に至り、チャック体(社)は下降し部品(13を1個
我着保持し、隣りの部品α2に至り同様にして位置にチ
ャック体(2)が移動し、吸着している各部品の位置情
報を得て、これは直に基準位置との比較がなされ、装着
の際の補正値が処理回路(47)内の演算回路で算出さ
れる。またその補正値がCPU61)を介して判定回路
に入力されチャックミスかどうかの判定がなされる。3
個の部品O3の位置情報が得られたら直ちに制御装置間
の指令により装着すべき位置へ部品(13が運ばれ、位
置誤差、姿勢誤差に応じて補正がなされて部品α2の装
着がなされる。本実施例においては前工程※装着すべき
位置に予め接着剤が塗布してあり、ここに部品0りを載
置して押圧するだけである。このようにして全部品の装
着が終れば制御装置(7)からの指令により次工程に回
路基板(旬は送られる。
Next, the operation of the above embodiment will be explained. First, the CPU
The head body Qυ moves according to the command, and the magazine (3)
Once it reaches the top, the chuck body (2) descends and holds one part (13), and reaches the adjacent part α2, and the chuck body (2) moves to the same position to hold each part (13). Once the position information is obtained, it is directly compared with the reference position, and a correction value for mounting is calculated by an arithmetic circuit in the processing circuit (47).The correction value is also determined via the CPU 61). It is input to the circuit and it is determined whether there is a chuck error or not. 3
Immediately after the position information of each component O3 is obtained, the component (13) is transported to the position where it should be installed in accordance with a command between the control devices, correction is made according to the position error and orientation error, and the component α2 is installed. In this example, adhesive is applied in advance to the position where it should be installed in the previous process*, and all that is required is to place the parts there and press them.Once all the parts have been installed in this way, the control The circuit board is sent to the next process according to the command from the device (7).

なお本実施例においてはチップ部品につき説明したが、
異形部品でもよく、またヘッド本体およびヘッド、駆動
部の各機構はこれに限定されr、他の機構を用贋てもよ
い。
Note that in this example, explanation was given regarding chip components, but
It may be an irregularly shaped part, and the mechanisms of the head body, head, and drive section are limited to these, and other mechanisms may be used.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように、本発明の部品装着装置は機械的な
部品の位置決めを行なわずに、視覚認識によってその位
置を認識して演算し、補正を行なって装着するため、部
品の損傷、大きさ形状に制約がない。またヘッド本体が
回転するので前後左右とθ方向の回転角度の演算により
部品の装着方向に制約がない。さらにまた複数個のチャ
ック体を用いるので1個当υの装着速度は1〜2秒穆度
と高速になり、大きさの異なるチャック体を用いること
により様々な大きさの部品が装着できる。
As described in detail above, the component mounting device of the present invention does not mechanically position the component, but uses visual recognition to recognize and calculate the position, corrects it, and then mounts the component. There are no restrictions on the shape. Furthermore, since the head body rotates, there are no restrictions on the mounting direction of the parts by calculating the rotation angles in the front, back, left, right, and θ directions. Furthermore, since a plurality of chuck bodies are used, the mounting speed for one piece is as fast as 1 to 2 seconds, and parts of various sizes can be mounted by using chuck bodies of different sizes.

部品のチャックミスの検出も視覚認識により行なうので
異形チップ部品の装着が可能である。
Detection of component chuck errors is also performed by visual recognition, making it possible to mount irregularly shaped chip components.

【図面の簡単な説明】[Brief explanation of drawings]

(2)・・・部品収容部、 (3)・・・ヘッド部、(
4)・・・ヘッド駆動部、(5)・・・搬送部、(6)
・・・視覚認識部、 (力・・・演算制御部、a3・・
・部品、  tall・・・ヘッド体、@・・・チャッ
ク体、144・・・被装着体、(4e・・・撮像カメラ
。 代理人 弁理士  則 近 憲 佑 同     竹 花 喜久男
(2)...Component storage section, (3)...Head section, (
4)...Head drive section, (5)...Transportation section, (6)
... visual recognition section, (force... calculation control section, a3...
・Parts, tall...head body, @...chuck body, 144...mounted body, (4e...imaging camera. Agent: Patent attorney Yudo Noriyuki Chika Kikuo Takehana

Claims (3)

【特許請求の範囲】[Claims] (1)複数個の部品を整列収容した部品収容部と、上記
部品を保持する複数個のチャック体および上下方向に延
びる軸線を中心に回転自在に支持されかつ上記軸線を中
心とする円周上に上記チャック体を等配に上下動自在に
保持したヘッド体を有するヘッド部と、上記ヘッド体を
回転駆動しかつ上記チャック体を前後、左右、上下方向
に移動させるヘッド駆動部と、上記部品が装着される被
装着体を所定位置に搬送する搬送部と、所定位置に設け
られた撮像カメラを有し上記所定位置において上方から
正対した上記チャック体に支持された部品に関する位置
および姿勢を認識しこれを検出信号として送出する視覚
認識部と、上記検出信号にもとずき上記認識された部品
の装着位置に対する位置および姿勢の補正を上記ヘッド
駆動部に指令するとともにチャックミスを検出する演算
制御部とを具備したことを特徴とする部品装着装置。
(1) A component accommodating portion that accommodates a plurality of components in an aligned manner, a plurality of chuck bodies that hold the components, and a circumference supported rotatably around an axis extending in the vertical direction and centered on the axis. a head portion having a head body that holds the chuck bodies evenly spaced and movable up and down; a head drive unit that rotates the head body and moves the chuck body in front and rear, left and right, and up and down directions; and the above parts. has a conveyance section that conveys the object to be mounted to a predetermined position, and an image pickup camera provided at a predetermined position, and detects the position and orientation of the component supported by the chuck body facing directly from above at the predetermined position. a visual recognition unit that recognizes and sends out the detected signal as a detection signal; and a visual recognition unit that instructs the head drive unit to correct the position and orientation of the recognized component with respect to the mounting position based on the detection signal, and detects a chuck error. A component mounting device characterized by comprising a calculation control section.
(2)チャック体は真空チャックであることを特徴とす
る特許請求の範囲第1項記載の部品装着装置。
(2) The component mounting device according to claim 1, wherein the chuck body is a vacuum chuck.
(3)部品は電子部品であり被装着体は回路基板である
ことを特徴とする特許請求の範囲第1項または第2項記
載の部品装着装置。
(3) The component mounting device according to claim 1 or 2, wherein the component is an electronic component and the object to be mounted is a circuit board.
JP61040268A 1986-02-27 1986-02-27 Part packaging apparatus Pending JPS62199322A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61040268A JPS62199322A (en) 1986-02-27 1986-02-27 Part packaging apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61040268A JPS62199322A (en) 1986-02-27 1986-02-27 Part packaging apparatus

Publications (1)

Publication Number Publication Date
JPS62199322A true JPS62199322A (en) 1987-09-03

Family

ID=12575893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61040268A Pending JPS62199322A (en) 1986-02-27 1986-02-27 Part packaging apparatus

Country Status (1)

Country Link
JP (1) JPS62199322A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04109815U (en) * 1991-02-28 1992-09-24 ダイキン工業株式会社 parts supply device
WO1997044157A1 (en) * 1996-05-22 1997-11-27 Matsushita Electric Industrial Co., Ltd. Part supply apparatus
WO1997044156A1 (en) * 1996-05-22 1997-11-27 Matsushita Electric Industrial Co., Ltd. Part supplying device and method for supplying parts using the same device
US7112710B2 (en) 2003-04-25 2006-09-26 Shin-Etsu Chemical Co., Ltd. Preparation of silyl ketene acetal and disilyl ketene acetal
JP2007313601A (en) * 2006-05-25 2007-12-06 Nissan Motor Co Ltd Method, apparatus and system for transferring workpiece
JP2007313591A (en) * 2006-05-24 2007-12-06 Nissan Motor Co Ltd Method, device, and system for transferring work

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4812482U (en) * 1971-06-24 1973-02-12
JPS5773439U (en) * 1980-10-22 1982-05-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4812482U (en) * 1971-06-24 1973-02-12
JPS5773439U (en) * 1980-10-22 1982-05-06

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04109815U (en) * 1991-02-28 1992-09-24 ダイキン工業株式会社 parts supply device
WO1997044157A1 (en) * 1996-05-22 1997-11-27 Matsushita Electric Industrial Co., Ltd. Part supply apparatus
WO1997044156A1 (en) * 1996-05-22 1997-11-27 Matsushita Electric Industrial Co., Ltd. Part supplying device and method for supplying parts using the same device
US5988430A (en) * 1996-05-22 1999-11-23 Matsushita Electric Industrial Co., Ltd. Part supply apparatus
US6257391B1 (en) 1996-05-22 2001-07-10 Matsushita Electric Industrial Co., Ltd. Part supplying device and method for supplying parts using the same device
CN1084658C (en) * 1996-05-22 2002-05-15 松下电器产业株式会社 Part supply apparatus
CN1098626C (en) * 1996-05-22 2003-01-08 松下电器产业株式会社 Part supplying device and method for supplying parts using the same device
US7112710B2 (en) 2003-04-25 2006-09-26 Shin-Etsu Chemical Co., Ltd. Preparation of silyl ketene acetal and disilyl ketene acetal
JP2007313591A (en) * 2006-05-24 2007-12-06 Nissan Motor Co Ltd Method, device, and system for transferring work
JP2007313601A (en) * 2006-05-25 2007-12-06 Nissan Motor Co Ltd Method, apparatus and system for transferring workpiece
JP4697049B2 (en) * 2006-05-25 2011-06-08 日産自動車株式会社 Workpiece transfer method, workpiece transfer device, and workpiece transfer system

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