JPS6219725B2 - - Google Patents
Info
- Publication number
- JPS6219725B2 JPS6219725B2 JP14322779A JP14322779A JPS6219725B2 JP S6219725 B2 JPS6219725 B2 JP S6219725B2 JP 14322779 A JP14322779 A JP 14322779A JP 14322779 A JP14322779 A JP 14322779A JP S6219725 B2 JPS6219725 B2 JP S6219725B2
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- subject
- reflecting mirror
- scanning
- inspection light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000007547 defect Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Image Input (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14322779A JPS5667815A (en) | 1979-11-07 | 1979-11-07 | Optical scanner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14322779A JPS5667815A (en) | 1979-11-07 | 1979-11-07 | Optical scanner |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5667815A JPS5667815A (en) | 1981-06-08 |
JPS6219725B2 true JPS6219725B2 (fr) | 1987-04-30 |
Family
ID=15333847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14322779A Granted JPS5667815A (en) | 1979-11-07 | 1979-11-07 | Optical scanner |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5667815A (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58132213A (ja) * | 1982-01-30 | 1983-08-06 | Toshiba Corp | 光走査検出装置 |
JPS63314515A (ja) * | 1987-06-17 | 1988-12-22 | Union Tool Kk | 光学系の平行走査光線発生装置 |
JPH01320417A (ja) * | 1988-06-22 | 1989-12-26 | Matsushita Electric Ind Co Ltd | 実装済プリント基板の検査装置 |
WO2014050319A1 (fr) * | 2012-09-25 | 2014-04-03 | 株式会社日立ハイテクノロジーズ | Appareil et procédé pour former un film |
-
1979
- 1979-11-07 JP JP14322779A patent/JPS5667815A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5667815A (en) | 1981-06-08 |
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