JPS6219725B2 - - Google Patents

Info

Publication number
JPS6219725B2
JPS6219725B2 JP14322779A JP14322779A JPS6219725B2 JP S6219725 B2 JPS6219725 B2 JP S6219725B2 JP 14322779 A JP14322779 A JP 14322779A JP 14322779 A JP14322779 A JP 14322779A JP S6219725 B2 JPS6219725 B2 JP S6219725B2
Authority
JP
Japan
Prior art keywords
light beam
subject
reflecting mirror
scanning
inspection light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14322779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5667815A (en
Inventor
Akito Iwamoto
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP14322779A priority Critical patent/JPS5667815A/ja
Publication of JPS5667815A publication Critical patent/JPS5667815A/ja
Publication of JPS6219725B2 publication Critical patent/JPS6219725B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Image Input (AREA)
JP14322779A 1979-11-07 1979-11-07 Optical scanner Granted JPS5667815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14322779A JPS5667815A (en) 1979-11-07 1979-11-07 Optical scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14322779A JPS5667815A (en) 1979-11-07 1979-11-07 Optical scanner

Publications (2)

Publication Number Publication Date
JPS5667815A JPS5667815A (en) 1981-06-08
JPS6219725B2 true JPS6219725B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-30

Family

ID=15333847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14322779A Granted JPS5667815A (en) 1979-11-07 1979-11-07 Optical scanner

Country Status (1)

Country Link
JP (1) JPS5667815A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132213A (ja) * 1982-01-30 1983-08-06 Toshiba Corp 光走査検出装置
JPS63314515A (ja) * 1987-06-17 1988-12-22 Union Tool Kk 光学系の平行走査光線発生装置
JPH01320417A (ja) * 1988-06-22 1989-12-26 Matsushita Electric Ind Co Ltd 実装済プリント基板の検査装置
WO2014050319A1 (ja) * 2012-09-25 2014-04-03 株式会社日立ハイテクノロジーズ 成膜装置および成膜方法

Also Published As

Publication number Publication date
JPS5667815A (en) 1981-06-08

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