JPS62195141A - Pellet transfer device - Google Patents
Pellet transfer deviceInfo
- Publication number
- JPS62195141A JPS62195141A JP61035170A JP3517086A JPS62195141A JP S62195141 A JPS62195141 A JP S62195141A JP 61035170 A JP61035170 A JP 61035170A JP 3517086 A JP3517086 A JP 3517086A JP S62195141 A JPS62195141 A JP S62195141A
- Authority
- JP
- Japan
- Prior art keywords
- collet
- holder
- collect
- pellet
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 title claims description 21
- 238000012856 packing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 244000309466 calf Species 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Manipulator (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体の製造工程ｔこおけるペレットの治具詰
、ダイボンディング等で用いられるぺＶット移送装置に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pellet transfer device used in pellet jig packing, die bonding, etc. in semiconductor manufacturing processes.
ペレット移送装置は、ペレットを真空吸着するために、
例えば電子材料１９８３年別冊第１３７頁図２に示すよ
うなコレットを有する。The pellet transfer device vacuum-adsorbs pellets.
For example, it has a collet as shown in FIG. 2, page 137, Special Issue of Electronic Materials, 1983.
従来のコレットは、装置本体にねじｔこより固定されて
いる。A conventional collet is fixed to the main body of the apparatus with a screw.
上記従来例では、コレット清掃などのため交換する場合
、コレットのつけ換えと位置調整などに３０分程鹿の時
間を要している。また交換の際の力が装置本体とコレッ
ト着脱部分（こ加わることや、ねじの締付は力の差など
ｔこより、コレット着脱部分の位置ずれが起こり、コレ
ットの長さにより増巾されてコレット先端の位置精度を
悪くしていた。In the above conventional example, when replacing the collet for cleaning or the like, it takes about 30 minutes to replace the collet and adjust its position. In addition, the force applied during replacement is applied to the device body and the collet attachment/detachment part, and due to the difference in force when tightening screws, the collet attachment/detachment part may become misaligned, and the width of the collet is increased due to the length of the collet. The positional accuracy of the tip was getting worse.
本発明の目的は、コレットの交換を短時間に、しかも位
置精度を良くすることができるペレット移送装置を提供
することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a pellet transfer device that allows collets to be replaced in a short time and with improved positional accuracy.
上記問題点は、コレットをコレツトホルダー部とコレッ
ト部ζこ分割し、コレット部を磁石の磁カーフ・′
テコレツトホルダー部に保持させることＥこより解決さ
れる。The above problem can be solved by dividing the collet into a collet holder part and a collet part, and holding the collet part in the magnetic calf/tecollet holder part of the magnet.
コレット部の着脱を磁石の磁力で行うので、交換を短時
間に行える。またコレツトホルダー部は取外す必要がな
く、コレツトホルダー部と装置の着脱部分に力が加わら
ず、またコレット部は小さいこと等により、再度コレッ
トを取付ける場合の位置精度が良い。Since the collet part is attached and detached using the magnetic force of the magnet, replacement can be done in a short time. In addition, there is no need to remove the collet holder, no force is applied to the attachment/detachment part between the collet holder and the device, and since the collet is small, the positioning accuracy is good when reattaching the collet.
以下図面を参照して本発明の一実施例について説明する
。第１図はダイボンディング装置（こ適用した場合を示
す。同図に示すように、コレット１．２は図示しない駆
動手段で上下動及びＸＹ動される移送アーム３．４ｔこ
固定されている。コレット１は、治具詰部５とペレット
位置決め部６間を往復駆動され、コレット２は、ぺＶッ
ト位置決め部６とボンディング部７間を往復駆動される
。そして、コレット２１こよってボンディング部７１こ
位置前記コレット１．２は、第２図１こ示すようｔこコ
レツトホルダー部１０とコレット部１１とに分割されて
おり、それぞれ真空吸着用の空気穴１０ａ、１１ａが貫
通して形成されている。コレツトホルダー部１０及びコ
レット部１１はそれぞれ磁性体材料よりなり、コレツト
ホルダー部１０ｆこけ電磁石１２が取付けられている。An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a case in which this die bonding apparatus is applied. As shown in the figure, a collet 1.2 is fixed to a transfer arm 3.4t which is moved up and down and in XY by a drive means (not shown). The collet 1 is reciprocated between the jig filling part 5 and the pellet positioning part 6, and the collet 2 is reciprocated between the pellet positioning part 6 and the bonding part 7. 71 The collet 1.2 is divided into a collet holder part 10 and a collet part 11, as shown in FIG. The collet holder portion 10 and the collet portion 11 are each made of a magnetic material, and a moss electromagnet 12 is attached to the collet holder portion 10f.
従って、電磁石１２をオン、オフさせることによりコレ
ット部１１はコレツトホルダー部１１より着脱できる。Therefore, the collet section 11 can be attached to and detached from the collet holder section 11 by turning the electromagnet 12 on and off.
またコレツトホルダー部１０とコレット部１１の合せ面
には、それぞれ雌、雄の関係（こある位置決め凹部１０
ｂ及び位置決め凸部１１ｂが形成されている。In addition, the mating surfaces of the collet holder part 10 and the collet part 11 have a female and male relationship (there is a positioning recess 10), respectively.
b and a positioning convex portion 11b are formed.
そして、コレツトホルダー部１０は第１図に示す移送ア
ーム３．４（こ従来と同じ方法で固定されている。The collet holder part 10 is then secured to the transfer arm 3.4 shown in FIG. 1 in a conventional manner.
次（こ作用について説明する。コレット１のコレット部
１１で治具詰部５上のペレットを真空吸着してぺＶット
位置決め部６Ｉこ移送する。ペレット位置決め部６１こ
載置されたペレットは、図示しない位置決め手段ｔこよ
って位置決めされる。その後、位置決めされたペレット
はコレット２のコレット部１１で真空吸着されてボンデ
ィング部７（こ移送され、リードフレーム８ｆこ押付け
た状態でスクラブさせ、金シリ共晶、銀ペースト等でリ
ードフレーム８シこ固定される。Next, this action will be explained. The collet part 11 of the collet 1 vacuum-chucks the pellet on the jig packing part 5 and transfers it to the pellet positioning part 61. The pellet placed on the pellet positioning part 61 , and is positioned by a positioning means (not shown).Then, the positioned pellet is vacuum-adsorbed by the collet part 11 of the collet 2, transferred to the bonding part 7, and is scrubbed while being pressed against the lead frame 8f. The lead frame 8 is fixed with silicon eutectic, silver paste, etc.
さころで、コレット部１１の吸着部にシリコン片、アル
ミ等の異物が付着すると、ペレット−こ傷を付ける原因
となるので、コレット部１１はコレツトホルダー部１０
より取外して時々清掃する必要がある。この場合は電磁
石１２をオフにすることによりコレット部１１をコレツ
トホルダー部１゜より取外すことができる。またコレッ
ト部１１をコレツトホルダー部１０１こ取付けるには、
電磁石１２をオンにするのみでよく、コレツトホルダー
部１０は移送アーム３．４＃こ取付けたままであり、コ
レツトホルダー部１０と移送アーム３との着脱部分に力
が加わらず、またコレット１．２はコレツトホルダー部
１０とコレット部１１とに分割されてコレット部１１は
小さいので、再度コレット部１１を取付ける場合の位置
精度が良い。この時、第２図Ｉこ示すようにコレツトホ
ルダー部１０とコレット部１１との合せ面に位置決め凹
凸部１０ｂ、１１ｂを設けておくと、更に位置精度が向
上する。If foreign matter such as silicone pieces or aluminum adheres to the suction part of the collet part 11, it may cause the pellet to be damaged.
It needs to be removed and cleaned from time to time. In this case, the collet portion 11 can be removed from the collet holder portion 1° by turning off the electromagnet 12. Also, to attach the collet part 11 to the collet holder part 101,
It is only necessary to turn on the electromagnet 12, and the collet holder part 10 remains attached to the transfer arm 3.4#, so no force is applied to the attachment/detachment part between the collect holder part 10 and the transfer arm 3, and the collet 1 .2 is divided into a collet holder part 10 and a collet part 11, and the collet part 11 is small, so the positioning accuracy when reattaching the collet part 11 is good. At this time, the positioning accuracy can be further improved by providing positioning concavo-convex portions 10b and 11b on the mating surfaces of the collet holder portion 10 and collet portion 11 as shown in FIG. 2I.
なお、上記実施例ｆこおいては、ダイボンディング装置
に適用した場合について説明したが、ペレットの治具詰
ｆこも適用できることはいうまでもない。また電磁石１
２１こ代えて永久磁石でもよい。In the above embodiment f, the case where the present invention is applied to a die bonding apparatus has been described, but it goes without saying that the present invention can also be applied to a jig packing of pellets. Also electromagnet 1
21, a permanent magnet may be used instead.
しかし、電磁石１２の方がオン、オフで着脱が行えるの
で、着脱がより容易である。However, since the electromagnet 12 can be attached and detached by turning it on and off, it is easier to attach and detach it.
本発明ｔこよれば、コレット部の着脱を磁石で行うので
、コレットの着脱が容易で、かつ短時間に行える。また
コレツトホルダー部を装置【こ固定したまま小さなコレ
ット部を着脱するので、着脱の際の位置精度が向上する
。According to the present invention, since the collet portion is attached and detached using a magnet, the collet can be attached and detached easily and in a short time. In addition, since the small collet part is attached and detached while the collet holder part is fixed to the device, positional accuracy during attachment and detachment is improved.
第１図は本発明の一実施例を示す斜視図、第２図はコレ
ットを示し、ｌａ）は拡大断面図、（ｂ）は拡大底面図
である。
１．２・・・コレット、 １０・・・コレツトホルダ
ー部、１１・・・コレット部、 １２・・・電磁石
。FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is a collet, la) is an enlarged sectional view, and (b) is an enlarged bottom view. 1.2... Collet, 10... Collet holder part, 11... Collet part, 12... Electromagnet.
Claims (1)
ト移送装置において、前記コレツトは、装置本体に取付
けられるコレツトホルダー部と、このコレツトホルダー
部の下面に配設されるコレツト部と、このコレツト部を
前記コレツトホルダー部に磁力によつて保持させる磁石
とからなることを特徴とするペレット移送装置。1. In a pellet transfer device that transfers pellets by vacuum suction with a collect, the collet includes a collect holder section attached to the main body of the device, a collect section disposed on the lower surface of the collect holder section, and a pellet transfer device that transfers pellets by vacuum suction with a collect. 1. A pellet transfer device comprising: a magnet for holding the pellet in the collet holder by magnetic force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61035170A JPS62195141A (en) | 1986-02-21 | 1986-02-21 | Pellet transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61035170A JPS62195141A (en) | 1986-02-21 | 1986-02-21 | Pellet transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62195141A true JPS62195141A (en) | 1987-08-27 |
Family
ID=12434387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61035170A Pending JPS62195141A (en) | 1986-02-21 | 1986-02-21 | Pellet transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62195141A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0569361A (en) * | 1990-03-02 | 1993-03-23 | General Motors Corp <Gm> | Device for exchanging robot tool and preventing overload |
| WO2021241065A1 (en) * | 2020-05-26 | 2021-12-02 | キヤノン株式会社 | Suction-attracting mechanism, article manufacturing device, and semiconductor manufacturing device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5548948A (en) * | 1978-10-03 | 1980-04-08 | Toshiba Corp | One-touch collet |
| JPS5827093B2 (en) * | 1977-02-17 | 1983-06-07 | 株式会社プラスチック工学研究所 | Hollow body forming equipment |
| JPS5838678B2 (en) * | 1979-07-17 | 1983-08-24 | 東京電力株式会社 | Liquefied natural gas cold recovery equipment |
-
1986
- 1986-02-21 JP JP61035170A patent/JPS62195141A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5827093B2 (en) * | 1977-02-17 | 1983-06-07 | 株式会社プラスチック工学研究所 | Hollow body forming equipment |
| JPS5548948A (en) * | 1978-10-03 | 1980-04-08 | Toshiba Corp | One-touch collet |
| JPS5838678B2 (en) * | 1979-07-17 | 1983-08-24 | 東京電力株式会社 | Liquefied natural gas cold recovery equipment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0569361A (en) * | 1990-03-02 | 1993-03-23 | General Motors Corp <Gm> | Device for exchanging robot tool and preventing overload |
| WO2021241065A1 (en) * | 2020-05-26 | 2021-12-02 | キヤノン株式会社 | Suction-attracting mechanism, article manufacturing device, and semiconductor manufacturing device |
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