JPS62194760U - - Google Patents

Info

Publication number
JPS62194760U
JPS62194760U JP8516586U JP8516586U JPS62194760U JP S62194760 U JPS62194760 U JP S62194760U JP 8516586 U JP8516586 U JP 8516586U JP 8516586 U JP8516586 U JP 8516586U JP S62194760 U JPS62194760 U JP S62194760U
Authority
JP
Japan
Prior art keywords
heat insulating
exhaust
reaction tube
main heat
side valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8516586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441170Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8516586U priority Critical patent/JPH0441170Y2/ja
Publication of JPS62194760U publication Critical patent/JPS62194760U/ja
Application granted granted Critical
Publication of JPH0441170Y2 publication Critical patent/JPH0441170Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP8516586U 1986-06-03 1986-06-03 Expired JPH0441170Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8516586U JPH0441170Y2 (enrdf_load_stackoverflow) 1986-06-03 1986-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8516586U JPH0441170Y2 (enrdf_load_stackoverflow) 1986-06-03 1986-06-03

Publications (2)

Publication Number Publication Date
JPS62194760U true JPS62194760U (enrdf_load_stackoverflow) 1987-12-11
JPH0441170Y2 JPH0441170Y2 (enrdf_load_stackoverflow) 1992-09-28

Family

ID=30940321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8516586U Expired JPH0441170Y2 (enrdf_load_stackoverflow) 1986-06-03 1986-06-03

Country Status (1)

Country Link
JP (1) JPH0441170Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0441170Y2 (enrdf_load_stackoverflow) 1992-09-28

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