JPS62194760U - - Google Patents
Info
- Publication number
- JPS62194760U JPS62194760U JP8516586U JP8516586U JPS62194760U JP S62194760 U JPS62194760 U JP S62194760U JP 8516586 U JP8516586 U JP 8516586U JP 8516586 U JP8516586 U JP 8516586U JP S62194760 U JPS62194760 U JP S62194760U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- exhaust
- reaction tube
- main heat
- side valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
図面は本考案装置の一実施例を示す縦断面図で
ある。
１……空気導入用断熱部、２……空気排出用断
熱部、３……外筒、４……内筒、５……絶縁碍子
、７……排気側バルブ、８……排風ダクト、９…
…ラジエータ、１０……排風側バルブ、１１……
吸気側バルブ、１２……吸気ダクト、１３……反
応管、１４……扉、１６……排気管、１８……ヒ
ータ、２０……ウエーハ、２１……ボート、２２
……ガス導入ボート、２３……空気層、２４……
主断熱筒。
The drawing is a longitudinal sectional view showing one embodiment of the device of the present invention. DESCRIPTION OF SYMBOLS 1...Air introduction heat insulation part, 2...Air discharge heat insulation part, 3...Outer tube, 4...Inner tube, 5...Insulator, 7...Exhaust side valve, 8...Exhaust duct, 9...
...Radiator, 10...Exhaust valve, 11...
Intake side valve, 12...Intake duct, 13...Reaction tube, 14...Door, 16...Exhaust pipe, 18...Heater, 20...Wafer, 21...Boat, 22
...Gas introduction boat, 23...Air layer, 24...
Main insulation cylinder.
Claims (1)
ト２１を搬入し、当該反応管１３内を加熱し、減
圧下で反応ガスを供給しつつ排気することにより
内部のウエーハ２０に薄膜を生成する減圧ＣＶＤ
装置において、反応管１３の周囲には内、外筒４
，３間に空気層２３を介在させて構成した主断熱
筒２４を配置し、この主断熱筒２４を構成する内
筒４内にヒータ１８を絶縁碍子５で支持せしめ、
上記主断熱筒２４の両端と反応管１３の両端部外
周との間にそれぞれ空気導入用断熱部１及び空気
排出用断熱部２を挿設し、この空気導入用断熱部
１の吸気口に吸気側バルブ１１を介して吸気ダク
ト１２を接続し、空気排出用断熱部２の排気口に
は排気側バルブ７、排風ダクト８、排風側バルブ
１０及び排風ブロワをこの順に接続すると共に、
排風ダクト８内にラジエータ９を設けてなる減圧
ＣＶＤ装置。 A low-pressure CVD method in which a boat 21 with wafers 20 set therein is carried into a reaction tube 13, the inside of the reaction tube 13 is heated, and a thin film is generated on the wafer 20 inside by exhausting while supplying a reaction gas under reduced pressure.
In the apparatus, there are inner and outer tubes 4 around the reaction tube 13.
, a main heat insulating cylinder 24 is arranged with an air layer 23 interposed between the main heat insulating cylinders 24, and the heater 18 is supported by an insulator 5 within the inner cylinder 4 constituting the main heat insulating cylinder 24.
A heat insulating part 1 for introducing air and a heat insulating part 2 for discharging air are inserted between both ends of the main heat insulating cylinder 24 and the outer periphery of both ends of the reaction tube 13, respectively. The intake duct 12 is connected through the side valve 11, and the exhaust side valve 7, the exhaust duct 8, the exhaust side valve 10, and the exhaust blower are connected in this order to the exhaust port of the air exhaust heat insulation part 2.
A reduced pressure CVD device comprising a radiator 9 provided in an exhaust duct 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8516586U JPH0441170Y2 (en) | 1986-06-03 | 1986-06-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8516586U JPH0441170Y2 (en) | 1986-06-03 | 1986-06-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62194760U true JPS62194760U (en) | 1987-12-11 |
| JPH0441170Y2 JPH0441170Y2 (en) | 1992-09-28 |
Family
ID=30940321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8516586U Expired JPH0441170Y2 (en) | 1986-06-03 | 1986-06-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441170Y2 (en) |
-
1986
- 1986-06-03 JP JP8516586U patent/JPH0441170Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441170Y2 (en) | 1992-09-28 |
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